快速大面积测量用原子力显微镜扫描速度对测量结果的影响

崔玉国; 何高法; 荒井義和; 高伟

doi:10.3788/OPE.20111911.2636

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快速大面积测量用原子力显微镜扫描速度对测量结果的影响

微纳技术与精密机械 | 更新时间：2020-08-12

- 快速大面积测量用原子力显微镜扫描速度对测量结果的影响
- Effects of scanning speed on measurement results for high-speed and large-area measurement AFM
- 光学精密工程 2011年19卷第11期页码：2636-2643
- 作者机构：
  
  1. 宁波大学机械工程与力学学院,浙江宁波,315211
  2. 重庆科技学院机械与动力工程学院重庆,401331
  3. 东北大学工学院,日本宫城仙台,980-8579
- 作者简介：
- 基金信息：
  
  日本学术振兴基金资助项目(No. 18206016)()
- DOI：10.3788/OPE.20111911.2636
  中图分类号： TH742
- 收稿日期：2011-02-28，
  
  修回日期：2011-03-23，
  
  网络出版日期：2011-11-25，
  
  纸质出版日期：2011-11-25
- 稿件说明：
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崔玉国, 何高法, 荒井義和, 高伟. 快速大面积测量用原子力显微镜扫描速度对测量结果的影响[J]. 光学精密工程, 2011,19(11): 2636-2643

CUI Yu-guo, HE Gao-fa, ARAI Yoshikazu, GAO Wei. Effects of scanning speed on measurement results for high-speed and large-area measurement AFM[J]. Editorial Office of Optics and Precision Engineering, 2011,19(11): 2636-2643
崔玉国, 何高法, 荒井義和, 高伟. 快速大面积测量用原子力显微镜扫描速度对测量结果的影响[J]. 光学精密工程, 2011,19(11): 2636-2643 DOI： 10.3788/OPE.20111911.2636.

CUI Yu-guo, HE Gao-fa, ARAI Yoshikazu, GAO Wei. Effects of scanning speed on measurement results for high-speed and large-area measurement AFM[J]. Editorial Office of Optics and Precision Engineering, 2011,19(11): 2636-2643 DOI： 10.3788/OPE.20111911.2636.

摘要

构建了一种可快速大面积测量光栅表面微结构的原子力显微镜(AFM)系统

研究了不同扫描模式下扫描速度对测量结果的影响。分别测量了微悬臂探针在恒高模式与恒力模式下的频谱

获得了这两种模式下微悬臂探针的有效带宽。基于恒高模式与恒力模式

在不同扫描速度下分别测量了光栅微结构表面上的一条直线与一个圆周

进而分析了扫描速度对测量结果的影响。基于该AFM系统

采用恒高模式下不失真扫描速度对光栅微结构表面进行了快速、大面积三维形貌测量实验。实验结果表明:测量光栅微结构表面上直径为4.0 mm的圆形区域所用时间仅为40 s。当扫描速度不超过微悬臂探针有效带宽所对应的速度时

所构建的AFM系统可无失真地实现微结构表面的快速、大面积测量。

Abstract

An Atomic Force Microscope (AFM) system with high-speed and large-area was constructed to measure the micro-structure surface of an optical grating. The effects of scanning speed on measuring results under different scanning modes were researched. First

the spectra of the micro-probe under constant-height and constant-force modes were measured

respectively

and the effective bandwidths of the probe were obtained under the two modes. Then

based on the constant-height and constant-force modes

the effects of scanning speed on measuring results were analyzed via measuring a line and a circle on the surface of the optical grating at different scanning speeds. By employing this AFM system

the 3-dimensional profile of the large-area micro-structure surface on the optical grating was measured at a distortionless scanning-speed in a constant-height mode. The results show that it takes only 40 s to measure a circle area with a diameter of 4.0 mm on the grating surface. When the scanning speed is no more than the speed that is corresponding to the effective bandwidth of the micro-probe

the AFM system can achieve the high-speed

large-area and distortionless measurement for micro-structure surfaces.

关键词

Keywords

references

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