同步辐射水平偏转压弯镜面形误差分析与补偿

卢启鹏; 高飒飒; 彭忠琦

doi:10.3788/OPE.20111911.2644

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同步辐射水平偏转压弯镜面形误差分析与补偿

微纳技术与精密机械 | 更新时间：2020-08-12

- 同步辐射水平偏转压弯镜面形误差分析与补偿
- Analysis and compensation of slope error for synchrotron radiation horizontal deflected mirror
- 光学精密工程 2011年19卷第11期页码：2644-2650
- 作者机构：
  
  1. 中国科学院研究生院,北京 100039
  2. 中国科学院长春光学精密机械及物理研究所应用光学国家重点实验室,吉林长春,130033
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No. 11079035)();应用光学国家重点实验室开放基金资助项目(No.O9Q33FQ091)()
- DOI：10.3788/OPE.20111911.2644
  中图分类号： TH744.1
- 收稿日期：2010-12-31，
  
  修回日期：2011-02-15，
  
  网络出版日期：2011-11-25，
  
  纸质出版日期：2011-11-25
- 稿件说明：
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卢启鹏, 高飒飒, 彭忠琦. 同步辐射水平偏转压弯镜面形误差分析与补偿[J]. 光学精密工程, 2011,19(11): 2644-2650

LU Qi-peng, GAO Sa-sa, PENG Zhong-qi. Analysis and compensation of slope error for synchrotron radiation horizontal deflected mirror[J]. Editorial Office of Optics and Precision Engineering, 2011,19(11): 2644-2650
卢启鹏, 高飒飒, 彭忠琦. 同步辐射水平偏转压弯镜面形误差分析与补偿[J]. 光学精密工程, 2011,19(11): 2644-2650 DOI： 10.3788/OPE.20111911.2644.

LU Qi-peng, GAO Sa-sa, PENG Zhong-qi. Analysis and compensation of slope error for synchrotron radiation horizontal deflected mirror[J]. Editorial Office of Optics and Precision Engineering, 2011,19(11): 2644-2650 DOI： 10.3788/OPE.20111911.2644.

摘要

为提高同步辐射压弯镜面形精度

降低水平偏转压弯机构及镜子自重对压弯镜面形的影响

分析了影响压弯镜面形精度的因素

并提出了一种有效的重力平衡补偿方法。在研究水平偏转压弯机构压弯机理的基础上

对压弯镜面形进行误差分析;针对光束线中使用的压弯聚焦镜

利用有限元方法分析了影响面形精度的主要因素;最后

根据水平偏转压弯机构特点及误差分析结果

提出了重力平衡补偿方法。研究显示

镜子自重和冷却装置的重力对压弯镜面形的影响主要表现为柱面镜母线的弯曲

驱动杆重力对压弯镜面形的影响主要体现在子午斜率误差上。利用重力平衡方法对压弯镜面形误差进行补偿

结果显示

柱面镜母线产生的斜率误差均方根值由13.14 rad减小到0.15 rad

镜面在子午方向的斜率误差均方根值由8.21 rad减小到0.86 rad。由此表明

压弯镜面形误差分析及补偿方法行之有效

显著提高了水平偏转压弯镜的面形精度。

Abstract

To improve the precision of a bending mirror and to reduce the influence of a horizontal deflected bender and the mirror weight on the bending mirror

the factors that caused the slope errors were studied and a gravity compensation scheme for the horizontal deflected bender was presented. Firstly

the slope errors were studied on the basis of bending theory. Aiming at the bending focusing mirror used in the beamline

the main factors that affected its precision were analyzed by finite element method. Then

according to the characteristics of the horizontal deflected bender and the results of slope error analysis

a scheme was carried out to compensate the slope errors. The results indicate that the gravity of the mirror and a cooling device mainly had influence on the cylinder mirror generatrix

while the gravity of the driven-rod mainly affected the tangential slope error. After compensation

the slope error rms of cylinder mirror generatrix is reduced from 13.14 rad to 0.15 rad and the tangential slope error rms is reduced from 8.21 rad to 0.86 rad. It verifies that the slope error analysis and gravity compensation scheme proposed is effective

which improves the precision of the bending mirror greatly.

关键词

Keywords

references

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