微尺度激光喷丸强化TiN涂层的表面性能

周建忠; 卫登辉; 黄舒; 朱伟; 樊玉杰

doi:10.3788/OPE.20111911.2679

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微尺度激光喷丸强化TiN涂层的表面性能

微纳技术与精密机械 | 更新时间：2020-08-12

- 微尺度激光喷丸强化TiN涂层的表面性能
- Microscale laser shock peening on TiN coatings
- 光学精密工程 2011年19卷第11期页码：2679-2684
- 作者机构：
  
  江苏大学机械工程学院,江苏镇江 212013
- 作者简介：
- 基金信息：
  
  国家教育部博士学科点基金资助项目(No.200802990004)();江苏省自然科学基金资助项目(No.BK2009219)();江苏省高校自然科学基金重大项目基金资
- DOI：10.3788/OPE.20111911.2679
  中图分类号： TN249;TG156.99
- 收稿日期：2011-03-15，
  
  修回日期：2011-06-12，
  
  网络出版日期：2011-11-25，
  
  纸质出版日期：2011-11-25
- 稿件说明：
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周建忠, 卫登辉, 黄舒, 朱伟, 樊玉杰. 微尺度激光喷丸强化TiN涂层的表面性能[J]. 光学精密工程, 2011,19(11): 2679-2684

ZHOU Jian-zhong, WEI Deng-hui, HUANG Shu, ZHU Wei, FAN Yu-jie. Microscale laser shock peening on TiN coatings[J]. Editorial Office of Optics and Precision Engineering, 2011,19(11): 2679-2684
周建忠, 卫登辉, 黄舒, 朱伟, 樊玉杰. 微尺度激光喷丸强化TiN涂层的表面性能[J]. 光学精密工程, 2011,19(11): 2679-2684 DOI： 10.3788/OPE.20111911.2679.

ZHOU Jian-zhong, WEI Deng-hui, HUANG Shu, ZHU Wei, FAN Yu-jie. Microscale laser shock peening on TiN coatings[J]. Editorial Office of Optics and Precision Engineering, 2011,19(11): 2679-2684 DOI： 10.3788/OPE.20111911.2679.

摘要

采用直径为300 m的激光光斑对TiN涂层表面进行微尺度激光喷丸强化处理以进一步提高TiN涂层的表面性能。利用光学轮廓仪和纳米力学测试系统测量了不同激光工艺参数作用下TiN涂层喷丸区域的表面形貌、纳米硬度及弹性模量分布。结果表明

喷丸区域形成的圆锥形凹坑最大深度约为1.2 m

纳米硬度和弹性模量在喷丸中心处变化最大

并在一定范围内随着激光能量的增大而增大

当激光能量为250 mJ时

两者最大

分别达到50.21 GPa和402.8 GPa

与初始状态相比分别提高了140%和43.9%。

Abstract

A TiN coating was modificated by microscale Laser Shock Peening (LSP) based on the laser spot with a diameter of 300 m to further improve its surface properties. An optical profiler and a nanomechanical test system were used to observe and measure the surface morphology

nano-hardness and the elastic modulus of the TiN coating in a peening area with different LSP parameters. Experimental results show that a conical dent is formed in the peening area after LSP

and the biggest depth is about 1.2 m. The nano-hardness and elastic modulus are significantly changed in the center of peening area

and they are enhanced with the increase of laser energy in a certain range. When the laser energy is 250 mJ

both the nano-hardness and elastic modulus reach the maximum

which are 50.21 GPa and 402.8 GPa

respectively. Compared with the initial state of the TiN coating

they have been increased by 140% and 43.9%

respectively.

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Keywords

references

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