用于精密定位平台的直线超声电机的异步并联

王金鹏; 金家楣; 赵淳生

doi:10.3788/OPE.20111911.2693

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用于精密定位平台的直线超声电机的异步并联

微纳技术与精密机械 | 更新时间：2020-08-12

- 用于精密定位平台的直线超声电机的异步并联
- Asynchronous bundling of linear ultrasonic motor for precision positioning stage
- 光学精密工程 2011年19卷第11期页码：2693-2702
- 作者机构：
  
  南京航空航天大学机械结构强度与振动国家重点实验室,江苏南京 210016
- 作者简介：
- 基金信息：
  
  国家自然科学基金-广东联合基金资助项目(No.U0934004)();国家自然科学基金资助项目(No.10874090)();国家973重点基础研究发展计划资助项目(N
- DOI：10.3788/OPE.20111911.2693
  中图分类号： TM359.4
- 收稿日期：2011-05-11，
  
  修回日期：2011-07-18，
  
  网络出版日期：2011-11-25，
  
  纸质出版日期：2011-11-25
- 稿件说明：
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王金鹏, 金家楣, 赵淳生. 用于精密定位平台的直线超声电机的异步并联[J]. 光学精密工程, 2011,19(11): 2693-2702

WANG Jin-peng, JIN Jia-mei, ZHAO Chun-sheng. Asynchronous bundling of linear ultrasonic motor for precision positioning stage[J]. Editorial Office of Optics and Precision Engineering, 2011,19(11): 2693-2702
王金鹏, 金家楣, 赵淳生. 用于精密定位平台的直线超声电机的异步并联[J]. 光学精密工程, 2011,19(11): 2693-2702 DOI： 10.3788/OPE.20111911.2693.

WANG Jin-peng, JIN Jia-mei, ZHAO Chun-sheng. Asynchronous bundling of linear ultrasonic motor for precision positioning stage[J]. Editorial Office of Optics and Precision Engineering, 2011,19(11): 2693-2702 DOI： 10.3788/OPE.20111911.2693.

摘要

提出了直线超声电机异步并联的概念以提高精密定位平台驱动单元的位移分辨率、输出力及速度。基本原理是若干定子(或振子)在一个振动周期内交替驱动动子(或转子)

使实际的驱动频率成倍提高

可以获得更好的输出性能。分析显示

提高定子与动子之间的接触频率可以提高输出力和速度

改善瞬态响应特性

并可避免同步并联方式下定子的相互干扰问题。两种电机异步并联的实验结果表明

两个定子异步并联时的最大负载力比两个定子同步并联提高了30%以上

比两个定子单独驱动时的推力之和提高25%以上。最小分辨率测试实验表明

异步并联时最小位移分辨率达到32.6 nm

是单个电机的62.8%

是同步并联的38.5%。单驱动头电机的实验还表明

异步并联时空载直线速度比单个定子和两个定子同步并联时都提高了10%以上

最大效率比两个定子同步并联驱动时提高约50%

瞬态响应时间比同步并联更短

约为单个定子驱动时的50%。

Abstract

A concept of Asynchronous Bundle of Linear Ultrasonic Motor (ABLUSM) was proposed to improve the resolution

thrust and the speed of driving unit for a precision positioning stage. It points out that a numbers of stators (vibrators) alternately drive a mover (rotor) in a vibration cycle

the actual driving frequency is increased doubly

and better output performance can be expected. An analysis shows that increasing the contact frequency between stator and mover is able to improve the output force

speed and transient response characteristics of a Linear Ultrasonic Motor (LUSM). Meanwhile

it can avoid the mutual interference of different stators in Synchronous Bundling of LUSM (SBLUSM). Experimental results of two types of motors show that the maximum load force of the ABLUSM is 30% upon that of the SBLUSM or 25% over that of the sum of two motors when they drive the slider respectively. Results of minimum resolution test show that the minimum displacement resolution of the ABLUSM is 32.6 nm

which is 62.8% that of a single LUSM or 38.5% that of the SBLUSM. The mechanical characteristic experiments of the LUSM with one driving tip also prove that the no-load speed of ABLUSM has increased by 10% as compared with that both of the single stator and the SBLUSM. Moreover

the maximum efficiency has by 50% over that of the SBLUSM. Transient response time is shorter than SBLUSM

which is about 50% of a single stator.

关键词

Keywords

references

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