离子束溅射制备&ldquo;日盲&rdquo;紫外诱导透射滤光片

邓文渊; 金春水

doi:10.3788/OPE.20111912.2884

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离子束溅射制备“日盲”紫外诱导透射滤光片

现代应用光学 | 更新时间：2020-08-12

- 离子束溅射制备“日盲”紫外诱导透射滤光片
- Fabrication of solar-blind induced transmission filters by ion-beam sputtering methods
- 光学精密工程 2011年19卷第12期页码：2884-2890
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春,130033
- 作者简介：
- 基金信息：
  
  国家重大科技专项资助项目(2013ZX04006011)
- DOI：10.3788/OPE.20111912.2884
  中图分类号： O484.4
- 收稿日期：2011-02-18，
  
  修回日期：2011-05-26，
  
  网络出版日期：2011-12-25，
  
  纸质出版日期：2011-12-25
- 稿件说明：
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邓文渊, 金春水. 离子束溅射制备“日盲”紫外诱导透射滤光片[J]. 光学精密工程, 2011,19(12): 2884-2890

DENG Wen-yuan, JIN Chun-shui. Fabrication of solar-blind induced transmission filters by ion-beam sputtering methods[J]. Editorial Office of Optics and Precision Engineering, 2011,19(12): 2884-2890
邓文渊, 金春水. 离子束溅射制备“日盲”紫外诱导透射滤光片[J]. 光学精密工程, 2011,19(12): 2884-2890 DOI： 10.3788/OPE.20111912.2884.

DENG Wen-yuan, JIN Chun-shui. Fabrication of solar-blind induced transmission filters by ion-beam sputtering methods[J]. Editorial Office of Optics and Precision Engineering, 2011,19(12): 2884-2890 DOI： 10.3788/OPE.20111912.2884.

摘要

对日盲紫外诱导透射滤光片进行了理论设计与分析

并分别优化了离子束溅射法沉积ZrO

、SiO

和Al薄膜的工艺。利用反射与透射光谱反演获得了ZrO

和SiO

薄膜的光学常数

并由JGS1/SiO

/Al/SiO

/air(SAS)样品的变角度椭偏光谱反演精确获得了Al薄膜的光学常数。在此基础上

采用离子束溅射沉积方法并利用上述3种薄膜材料优化制备了日盲紫外诱导透射滤光片

测量了滤光片的光谱性能。光谱性能分析表明

滤光片的峰值波长位于264 nm

峰值透过率大于60.0%

透过峰带宽(FWHM)约为13 nm

在300~350 nm波段的截止度达到了2.6 OD。研究认为制约离子束溅射制备日盲紫外诱导透射滤光片性能的主要因素是Al金属膜的溅射沉积速率以及沉积Al膜时腔体中残余的O

含量。

Abstract

Solar-blind UV induced Transmission Filters (SBU-ITFs) were fabricated by ion-beam sputtering. Firstly

SBU-ITFs were designed and analyzed theoretically

and the deposition of ZrO

SiO

and Al films by ion beam sputtering was optimized. The optical constants of ZrO

and SiO

films were derived from the transmitting and reflecting spectra

and the optical constant of Al film was determined by the inversion of the variable incidence ellipsometric spectrum of a sample JGS1/SiO

/Al/SiO

/air(SAS).On the basis of the research

the SBU-ITFs were fabricated by using the three films above and their optical properties were measured. The measurement for SBU-ITFs shows that the peak transmittance of the filter at the 264 nm center wavelength is larger than 60%

the transmittance band width (FWHM) is about 13 nm

and the optical density in the 300-350 nm cutoff spectral region reaches to 2.6.The analysis of the transmittance shows that the main factors affecting the properties of SBU-ITFs are a slower deposition speed for Al film and smaller amount of O

contents remaining in the chamber during the deposition of Al film.

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Keywords

references

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离子束溅射制备“日盲”紫外诱导透射滤光片

Fabrication of solar-blind induced transmission filters by ion-beam sputtering methods

DOI：10.3788/OPE.20111912.2884

摘要

Abstract

关键词

Keywords

references