集成铜金属压阻层的SU-8胶悬臂梁微力传感器的制作

褚金奎; 陈兆鹏; 张然

doi:10.3788/OPE.20111912.2935

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集成铜金属压阻层的SU-8胶悬臂梁微力传感器的制作

微纳技术与精密机械 | 更新时间：2020-08-12

- 集成铜金属压阻层的SU-8胶悬臂梁微力传感器的制作
- Microfabrication of SU-8 cantilever micro-force sensor integrated by copper piezoresistance
- 光学精密工程 2011年19卷第12期页码：2935-2940
- 作者机构：
  
  大连理工大学机械工程学院,辽宁大连,116024
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.51175056)();国家973重点基础研究发展计划资助项目(No.2011CB302101)()
- DOI：10.3788/OPE.20111912.2935
  中图分类号： TP212.12
- 收稿日期：2011-05-23，
  
  修回日期：2011-06-21，
  
  网络出版日期：2011-12-25，
  
  纸质出版日期：2011-12-25
- 稿件说明：
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褚金奎, 陈兆鹏, 张然. 集成铜金属压阻层的SU-8胶悬臂梁微力传感器的制作[J]. 光学精密工程, 2011,19(12): 2935-2940

CHU Jin-kui, CHEN Zhao-peng, ZHANG Ran. Microfabrication of SU-8 cantilever micro-force sensor integrated by copper piezoresistance[J]. Editorial Office of Optics and Precision Engineering, 2011,19(12): 2935-2940
褚金奎, 陈兆鹏, 张然. 集成铜金属压阻层的SU-8胶悬臂梁微力传感器的制作[J]. 光学精密工程, 2011,19(12): 2935-2940 DOI： 10.3788/OPE.20111912.2935.

CHU Jin-kui, CHEN Zhao-peng, ZHANG Ran. Microfabrication of SU-8 cantilever micro-force sensor integrated by copper piezoresistance[J]. Editorial Office of Optics and Precision Engineering, 2011,19(12): 2935-2940 DOI： 10.3788/OPE.20111912.2935.

摘要

由于SU-8胶的弹性模量比硅的低

在SU-8胶悬臂梁上集成金属压阻可获得很高的力灵敏度系数

因此本文基于SU-8胶设计并制作了一种集成蛇形结构铜金属压阻层的SU-8胶悬臂梁微力传感器。介绍了制作微力传感器的新型工艺

并进行了传感器性能测试。实验结果表明:设计的SU-8胶微力传感器在0~350 N具有较好的线性度

力灵敏度为0.24 mV/N

测量误差为4.06%。该微力传感器可以满足对微小力的测量

相对于硅材料的微力传感器

其制作工艺更加简单

周期更短。由于SU-8胶的生物兼容性好

该传感器在生物医学研究领域有着很好的应用前景。

Abstract

As the SU-8 cantilever integrated by a metal piezoresistance can achieve a very high force sensitive coefficient due to its low elastic modulus

this paper designs a new type of SU-8 cantilever micro-force sensor integrated by a serpent-shaped copper piezoresistive structure and fabricates a prototype with a double-layer cantilever by a novel processing method. It introduces the design principles and fabrication method for the micro-force sensors and measures its technological parameters.Experimental results show that the SU-8 micro-force sensor has good linearity range in 0-350 N and its force sensitivity is 0.24 mV/N and measuring error is 4.06%. It can implement the micro-force detection and has advantages of simpler production process and shorter cycle as compared with a silicon micro-force sensor. Moreover

the force sensor has potential application in biomedical research for the SU-8 with prominent biological compatibility.

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Keywords

references

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