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1. 大连理工大学 汽车工程学院,辽宁 大连,116024
2. 大连理工大学 电气工程学院,辽宁 大连,116024
收稿日期:2011-06-14,
修回日期:2011-07-19,
网络出版日期:2012-01-25,
纸质出版日期:2012-01-25
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高仁璟, 赵剑, 李雪, 唐祯安. 基于槽式悬臂梁结构的微质量传感器设计[J]. 光学精密工程, 2012,20(1): 102-108
GAO Ren-jing, ZHAO Jian, LI Xue, TANG Zhen-an. Design and analysis of micro-mass sensor based on Ⅰ-shaped cross-section cantilever[J]. Editorial Office of Optics and Precision Engineering, 2012,20(1): 102-108
高仁璟, 赵剑, 李雪, 唐祯安. 基于槽式悬臂梁结构的微质量传感器设计[J]. 光学精密工程, 2012,20(1): 102-108 DOI: 10.3788/OPE.20122001.0102.
GAO Ren-jing, ZHAO Jian, LI Xue, TANG Zhen-an. Design and analysis of micro-mass sensor based on Ⅰ-shaped cross-section cantilever[J]. Editorial Office of Optics and Precision Engineering, 2012,20(1): 102-108 DOI: 10.3788/OPE.20122001.0102.
压电式微质量传感器的测试精度直接依赖于结构频率对质量变化的灵敏程度。本文利用对称槽型梁和压电薄膜组成的对称敏感结构
提出了一种提高传感器灵敏度的结构设计方法
并设计了一种高精度谐振式微质量传感器。建立了结构频率变化对吸附质量敏感性的分析模型
并研究了槽型截面参数、自振频率及振动模态对灵敏度的影响。与矩形截面结构进行了仿真与实验对比
结果表明
相同几何尺寸参数下
槽型截面悬臂梁的一阶自振频率为1 851 Hz
矩形截面悬臂梁的一阶自振频率为1 610 Hz
相应的传感器灵敏度则分别为3.1210
4
Hz/g和1.510
4
Hz/g
前者是后者的2倍。该项设计为提高微质量传感器灵敏度提供了一种新思路。
As the sensitivity of a piezoelectric mass sensor directly depends on the structural frequency variation induced by the mass added. This paper proposes a structure designing method for improving the measuring sensitivity of the mass sensor by using a structure which consists of a symmetrical trough (I-shaped cross-section) cantilever and piezoelectric films. Then
we design and fabricate a novel piezoelectric resonance micro-mass sensor. Considering the influences of the section shape
natural frequency and the vibration mode on the sensitivity
an analytical model is established for analyzing the frequency variation caused by the micro particles. With the same geometric parameters
the simulation and experiments are performed for the sensors with the I-shaped cross-section cantilever and the rectangular section cantilever. It shows that the first order natural frequency of the I-shape cross-section cantilever is 1 851 Hz
and that of the rectangular section cantilever is 1 610 Hz. Moreover
corresponding sensor sensitivities are 3.1210
4
and 1.510
4
Hz/g
respectively
and the former is twice of the latter. The method is feasible and effective for improving the measuring precision of mass sensors.
WARD M D, BUTTRY D A. In situ interfacial mass detection with piezoelectric transducers [J]. Science, 1990, 249: 1000-1007.[2] BURG T P, GODIN M, KNUDSEN S M, et al.. Weighing of biomeolecules, single cells and single nanoparitcles in fluid [J]. Nature, 2007, 446(2): 1066-1069.[3] SAKTI S P, ROSLER S, LUCKLUM R, et al.. Thick polystyrene-coated quartz crystal microbalance as a basis of a cost effective immunosensor [J]. Sens. Actuators A, 1999, 76(1-3): 98-102.[4] LIN Z, YIP C M, JOSHEPH I S, et al.. Operation of an ultrasensitive 30 MHz quartz crystal microbalance in liquids [J]. Anal. Chem. ,1993, 65(11): 1546-1551.[5] VERISSIMO M I S, MANTAS P Q, SENOS A M R, et al.. Suitability of PZT ceramics for mass sensors versus widespread used quartz crystals [J]. Sensors and Actuators B, 2003, 95(1-3): 25-31.[6] SHIH W Y, LI X, GU H, et al.. Simultaneous liquid viscosity and density determination using piezoelectric unimorph cantilevers[J]. J. Appl. Phys., 2001, 89(2): 1497-1505.[7] LI X, SHIH W Y, AKSAY I A, et al.. Electromechanical behavior of PZT-brass unimorphs [J]. J. Am. Ceram. Soc., 1999, 82(7):1733-1740.[8] YI J W, SHIH W Y, SHIH W H. Effect of lengt h, width, and mode on the mass detection sensitivity of piezoelectric unimorph cantilevers [J]. J. Appl. Phys., 2002, 91(3):1680-1686.[9] SHIH W Y, LI X, GU H, et al.. Simultaneous liquid viscosity and density determination with piezoelectric unimorph cantilevers[J]. J. Appl. Phys., 2001, 89(2): 1497-1505.[10] SHEN Z, SHIH W Y, SHIH W H. Flexural vibrations and resonance of piezoelectric cantilevers with a nonpiezoelectric extension [J]. IEEE Trans. Ultrason. Ferro. Freq. Control, 2007, 54(10):2001-2010.[11] SHEN Z, SHIH W Y, SHIH W H. Mass detection sensitivity of piezoelectric cantilevers with a nonpiezoelectric extension [J]. Rev. Sci. Instrum. ,2006, 77(6): 065101.[12] LEE J H, HWANGA K S, PARK J, et al.. Immunoassay of prostate-specific antigen (PSA) using resonant frequency shift of piezoelectric nanomechanical microcantilever [J]. Biosens. Bioelectron, 2005, 20(10): 2157-2162.[13] LEE J H, KIM T S, YOON K H. Effect of mass and stress on resonant frequency shift of functionalized Pb Zr0.52Ti0.48O3 thin film microcantilever for the detection of Creactive protein [J]. Appl. Phys. Lett., 2004, 84(16): 3187-3189.[14] YI J W, SHIH W Y, MUTHARASAN R, et al.. In situ cell detection using piezoelectric lead zirconate titanate-stainless steel cantilevers[J]. J. Appl. Phys., 2003, 93(1): 619-625.[15] KUMAR V, BOLEY J W, EKOWALUYO H, et al.. Linear and nonlinear mass sensing using piezoelectrically-actuated microcantilevers . Proceedings of the SEM Annual Conference Indianapolis, Indiana, USA, June 7-10, 2010.[16] ADANYI N, VARADI M, KIM N, et al.. Development of new immunosensors for determination of contaminants in food[J]. Current Applied Physics, 2006, 6(2):279-286.[17] LI P, LI X. A single-sided micromachined piezoresistive SiO2 cantilever sensor for ultra-sensitive detection of gaseous chemicals [J]. Journal of Micromechanical and Microengineering, 2006, 16(12):2539-2546.[18] YANG J L, ONO T. Mechanical behavior of ultrathin micro-cantilever[J]. Sensors and Actuators, 2000,82(1):102-107.[19] LIU M W, WANG J, WANG L D, et al.. Deposition and characterization of Pb(Zr, Ti)O3 sol-gel thin films for piezoelectric cantilever beams [J]. Smart Mater. Struct., 2007,16(1):93-99.[20] EKINCI K L, HUANG X M, ROUKES M L. Ultrasensitive nanoelectromechanical mass detection [J]. Applied Physics Letters, 2004, 84(22):4469-4471.[21] 陈令新,关亚风,杨丙成,等. 压电晶体传感器的研究进展 [J]. 化学进展. 2002, 14(1):68-76. CHEN L X, GUAN Y F, YANG B CH, et al.. Progress in piezoelectric quartz crystal sensors [J]. Progress in Chemistry, 2002,14(1):68-76.(in Chinese)[22] 邹志青,赵建龙. 纳米技术与生物传感器 [J]. 传感器世界,2004,10(12):5-11. ZOU ZH Q, ZHAO J L. Nanotechnology and Biosensors[J]. Sensor World, 2004,10(12):5-11.(in Chinese)
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