条纹周期动态可调的通用型干涉仪

朱勇建; 那景新; 潘卫清; 李安虎; 尹韶辉

doi:10.3788/OPE.20122001.0109

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条纹周期动态可调的通用型干涉仪

微纳技术与精密机械 | 更新时间：2020-08-12

- 条纹周期动态可调的通用型干涉仪
- Universal interferometer based on dynamically-adjusted fringe periods
- 光学精密工程 2012年20卷第1期页码：109-116
- 作者机构：
  
  1. 湖南大学汽车车身先进设计制造国家重点实验室,湖南长沙,410082
  2. 吉林大学汽车仿真与控制国家重点实验室,吉林长春,130025
  3. 浙江科技学院理学院,浙江杭州,310023
  4. 同济大学机械工程学院上海,200092
- 作者简介：
- 基金信息：
  
  中央高校基本科研业务费(3122015C016)
- DOI：10.3788/OPE.20122001.0109
  中图分类号： TH744.3
- 收稿日期：2011-07-25，
  
  修回日期：2011-08-17，
  
  网络出版日期：2012-01-25，
  
  纸质出版日期：2012-01-25
- 稿件说明：
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朱勇建, 那景新, 潘卫清, 李安虎, 尹韶辉. 条纹周期动态可调的通用型干涉仪[J]. 光学精密工程, 2012,20(1): 109-116

ZHU Yong-jian, NA Jing-xin, PAN Wei-qing, LI An-hu, YIN Shao-hui. Universal interferometer based on dynamically-adjusted fringe periods[J]. Editorial Office of Optics and Precision Engineering, 2012,20(1): 109-116
朱勇建, 那景新, 潘卫清, 李安虎, 尹韶辉. 条纹周期动态可调的通用型干涉仪[J]. 光学精密工程, 2012,20(1): 109-116 DOI： 10.3788/OPE.20122001.0109.

ZHU Yong-jian, NA Jing-xin, PAN Wei-qing, LI An-hu, YIN Shao-hui. Universal interferometer based on dynamically-adjusted fringe periods[J]. Editorial Office of Optics and Precision Engineering, 2012,20(1): 109-116 DOI： 10.3788/OPE.20122001.0109.

摘要

提出一种新型结构的通用型干涉仪

用于实现不同结构、不同形状的光学透镜、光学晶体等元件的快速目视观察与精确测量。该干涉仪利用可相对旋转的双光楔对条纹周期进行动态调制完成实时检测。以两块雅敏干涉平板为主体结构

在双光路中各自放入一对楔角完全相同的光楔对

建立条纹周期和条纹倾斜方向与光楔对相对旋转角度之间的关系

并采用光学晶体畴反转实时检测验证干涉仪的测量性能。试验结果表明

干涉仪的相位检测精度约为0.2 rad(/30)

条纹周期(一对黑白条纹)为0.105~5.993 mm/pair

光路中光楔对的相对转角可在0~179调节。干涉仪具有完全对称的光路结构

由于较高的稳定性和抗干扰能力

可针对不同类型光学元件的结构特点进行条纹周期的实时调制

并可达到较高的检测精度。

Abstract

A universal interferometer is proposed to realize the eyeballed evaluation and accurate measurement of many kinds of optical elements with different structures and shapes

such as lenses and crystals. In the interferometer

a pair of optical wedges are used to adjust the fringe periods dynamically to implement the measurement in real time. The interferometer takes two Jamin glass plates as a main structure

between which two pairs of optical wedges are laid. All wedges are completely identical in sizes and can be revolved along the axis. The relationship between the relative angle of two wedges and the fringe period is established

and then a real time testing experiment of domain reverse in an optical crystal is introduced to test the performance of the interferometer. The experimental result shows that the measurement accuracy is about 0.2 rad in phase (/30)

and the adjustment range of fringe period (white & black fringe) is from 0.105 to 5.993 mm/pair. In the interferometer

the relative angle between the two wedges along the same optical axis can be adjusted from 0 to 179. The interferometer is charaterized by the symmetrical optical structure

so that it has high stability and can endure strong noise and vibration. It can modulate the fringe period in real time to meet requirements of various optical structures and can reach high measurement accuracy.

关键词

Keywords

references

吴栋,朱日宏,陈磊. 移相式激光干涉仪抗振技术的研究进展 [J].激光与光电子学进展,2004,41(6): 25-29. WU D, ZHU R H, CHEN L. Advances in vibration-resistant techniques of phase-shift laser interferometer [J]. Laser & Optoelectronics Progress, 2004, 41(6): 25-29. (in Chinese)[2] 张以谟,井文才,张红霞,等. 数字化白光扫描干涉仪的研究 [J].光学精密工程, 2004,12(6):560-565. ZHANG Y M, JING W C, ZHANG H X, et al.. Computerized white light scanning interferometer and the application [J]. Opt. Precision Eng., 2004,12(6):560-565. (in Chinese)[3] NEAL B, JOHN H, BRAD K, et al.. Dynamic interferometry . Proc. SPIE, Bellingham WA, 2005, 5875: 58750F-1-10.[4] BABAK N S, JAMES M, RITVA K K, et al.. Instantaneous phase-shifted speckle interferometer for measurement of large structures [J]. SPIE, 2004, 5494:152-162.[5] DANIEL M. Optical Shop Testing [M]. New Jersey: John Wiley & Sons, 2007.[6] 邵晶, 马冬梅. 点衍射干涉仪基准波前测试技术研究 [J]. 中国激光, 2011,38(5):0508003-1-6. SHAO J MA D M. Testing the criterion wavefront diffracted by point diffraction interferomete[J]. Chinese Journal of Lasers, 2011, 38(5): 0508003-1-6. (in Chinese)[7] 王孝坤, 王丽辉, 张学军. 子孔径拼接干涉法检测非球面 [J]. 光学精密工程, 2007, 15(2): 192-198. WANG X K, WANG L H, ZHANG X J. Testing asphere by subaperture stitching interferometric method [J]. Opt. Precision Eng., 2007, 15(2): 192-198. (in Chinese)[8] 王孝坤, 王丽辉, 张学军. 干涉法实时测量浅度非球面技术 [J]. 光学精密工程,2008, 16(2): 184-189. WANG X K, WANG L H, ZHANG X J. Testing of weak aspheric surface by real-time interferometry [J]. Opt. Precision Eng., 2008 16(2): 184-189. (in Chinese)[9] 贺俊, 陈磊. 使用红外干涉仪测量非球面面形 [J]. 光学精密工程, 2010, 18(1): 69-74. HE J, CHEN L. Measurement of aspheric surfaces by infrared interferometer[J]. Opt. Precision Eng., 2010, 18(1): 69-74. (in Chinese)[10] 朱勇建, 尹韶辉, 盛晓敏,等, 两种非球面面形的光学测量方法研究 [J]. 中国机械工程, 2009, 20(3): 271-275. ZHU Y J, YIN S H, SHENG X M, et al.. Research on two optical methods for aspheric measurement[J]. China Mechanical Engineering, 2009, 20(3): 271-275. (in Chinese)[11] 朱勇建, 刘立人, 栾竹,等. 检测铌酸锂晶体极化畴反转的装置 :中国, CN1869657A .2006. ZHU Y J, LIU L R, LUAN Z, et al.. Detection setup of domain reverse inside LiNiO3:China, CN1869657A .2006. (in Chinese)[12] QU W J, LIU D A, ZHI Y N, et al.. Quantitative measurement of domain inversion in RuO2:LiNbO3 crystal by digital holographic interferometry [J]. Journal of Applied Physics, 2006, 100(054108):1-6.[13] ZHI Y N, LIU D A, QU W J, et al.. Investigation of effective internal field in congruent lithium niobate crystal by digital holographic interferometry [J], Applied Physics Letters, 2007, 90 (3):032903-032905.[14] ZHI Y N, QU W J, LIU D A, et al.. Ridge-shape phase distribution adjacent to 180 domain wall in congruent LiNbO3 crystal[J]. Applied Physics Letters, 2006, 89 (11):112912-112914.[15] ANGELIS M D, NICOLA S D, FERRARO P. Interferometric analysis of a lithium niobate with engineering reversed domains . Proc. SPIE, San Diego, U.S., 2003, 5144: 745-752.[16] GHIGLIA D C, PRITT M D. Two-Dimensional Phase Unwrapping: Theory, Algorithms, and Software [M]. New York: Wiley, 1998.

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