基于高速摄影动态测试微陀螺振动

姚峰林; 高世桥

doi:10.3788/OPE.20122001.0165

您当前的位置：

首页 >

文章列表页 >

基于高速摄影动态测试微陀螺振动

信息科学 | 更新时间：2020-08-12

- 基于高速摄影动态测试微陀螺振动
- Dynamic test of vibration for micro machined gyroscope based on high speed photography
- 光学精密工程 2012年20卷第1期页码：165-170
- 作者机构：
  
  1. 北京理工大学机电学院北京,100081
  2. 太原科技大学机电学院,山西太原,030024
- 作者简介：
- 基金信息：
  
  十一五"();国防科研计划资助项目()
- DOI：10.3788/OPE.20122001.0165
  中图分类号： TB872;TB936
- 收稿日期：2011-05-31，
  
  修回日期：2011-07-06，
  
  网络出版日期：2012-01-25，
  
  纸质出版日期：2012-01-25
- 稿件说明：
移动端阅览
姚峰林, 高世桥. 基于高速摄影动态测试微陀螺振动[J]. 光学精密工程, 2012,20(1): 165-170

YAO Feng-lin, GAO Shi-qiao. Dynamic test of vibration for micro machined gyroscope based on high speed photography[J]. Editorial Office of Optics and Precision Engineering, 2012,20(1): 165-170
姚峰林, 高世桥. 基于高速摄影动态测试微陀螺振动[J]. 光学精密工程, 2012,20(1): 165-170 DOI： 10.3788/OPE.20122001.0165.

YAO Feng-lin, GAO Shi-qiao. Dynamic test of vibration for micro machined gyroscope based on high speed photography[J]. Editorial Office of Optics and Precision Engineering, 2012,20(1): 165-170 DOI： 10.3788/OPE.20122001.0165.

摘要

针对微机电系统(MEMS)特征尺寸小

常用的动态测试方法和系统还有一定的缺点等问题

本文在介绍MEMS常见的三种动态测试方法的基础上

给出了一种基于高速摄影的微陀螺振动动态测试系统。介绍了系统的硬件架构和软件功能。在动态测试的关键算法上

应用Otsu算法对图像进行分割

使用感兴趣区域(ROI)和不变矩方法得到振动曲线

通过幅频分析得到微机械陀螺的振动特性。实验结果表明:使用这种方法测量振幅的精度达到了0.1 m;频域测量的重复性和一致性也较好。这种动态测试方法稳定可靠、精度高、抗干扰能力强

可以极大地减少计算量

提高系统运行速度。

Abstract

As the common dynamic test method for Micro-electro-mechanical System (MEMS) is limited by its tiny feature sizes

this paper proposes a dynamic test system for micro machined gyroscope based on high speed photography after introducing three kinds of dynamic test methods. The hardware of the system and the function of the software are introduced. Then

it explains the key algorithm of the dynamic test system. It uses the Otsu algorithm to segment the image

and takes the region of Interest (ROI) and moment invariants to obtain the vibration curve. After spectrum analysis

the vibration characteristic of the micro machined gyroscope can be gotten. Experimental results indicate that the precision of the amplitude is 0.1 m and the repeatability and consistency of the frequency domain is satisfactory. The dynamic test method shows higher precision

rapid speed

as well as strong anti-jamming and stabilization. It reduces the amount of calculation and improves the operation speed for the system.

关键词

Keywords

references

张涛,冷长林,钟莹,等. 基于激光差动多普勒效应的微机电系统动态测试技术 [J]. 光学学报,2007,27(1):63-67 . ZHANG T,LENG CH L,ZHONG Y, et al.. MEMS dynamic testing technique based on differential laser Doppler effect[J]. Acta Optica Sinica,2007,27(1):63-67. (in Chinese).[2] REMBE C,MULLER R S . Measurement system for full three-dimensional motion characterization of MEMS[J].Journal of Microelectro Mechanical Systems, 2002,11(5):479-488.[3] HEMMERT W,MERMELSTEIN M S, FREEMA N D M. Nanometer resolution of three-dimensional motions using video interference microscopy[J]. Journal of Microelectromechanical Systems,1999(9):17-21.[4] 高世桥,刘海鹏. 微机电系统力学 [M].北京:国防工业出版社, 2008:222-279. GAO SH Q, LIU H P. MEMS Force[M].Beijing:Defence Publishing House,2008:222-279.(in Chinese)[5] 蒋明,杨福俊. 基于高速摄像的双线性振动陀螺力学特性分析 [J].光学精密工程,2006,14(1):121-126. JIANG M,YANG F J. Analysis of mechanical characteristics in the double linear vibratory gyroscope using high speed photography[J]. Opt. Precision Eng., 2006,14(1):121-126.(in Chinese)[6] OTSU N. A threshold selection method from gray-level histograms[J]. IEEE Transactions on Systems, Man, and Cybernetics,1979, 9(1): 62-66.[7] 魏娟丽,翟社平,王万诚. 视频序列中人体运动目标的检测与跟踪研究 [J]. 计算机应用与软件,2006,23(4): 139-141. WEI J L,ZHAI SH P,WANG W CH.Arch for detecting and tracking of human motion target in vide-obased sequences[J]. Computer Applications and Software, 2006,23(4): 139-141. (in Chinese)[8] 范九伦,赵凤. 灰度图像的二维Otsu曲线阈值分割法 [J].电子学报,2007,35(4): 751-755. FAN J L,ZHAO F.Two-dimensional Otsus curve thresholding segmentation method for gray-level images[J]. Acta Electronica Sinica, 2007,35(4): 751-755. (in Chinese)[9] 章毓晋. 图像分割 [M]. 北京:科学出版社,2001:134-135. ZHANG Y J. Image Segmentation[M]. Beijing:Science Publishing House, 2001:134-135. (in Chinese)[10] 张之敬,杜芳. 微小尺寸零件复杂边缘识别算法 [J].光学精密工程,2009,17(2): 356-361. ZHANG ZH J, DU F. Complex edge recognition algorithm of micro-accessory[J].Opt. Precision Eng.,2009,17(2):356-361.(in Chinese)[11] MING-KUEI H. Visual pattern recognition by moment invariants[J]. Transaction on Information Theroy, 1962, 49(1):179-187.[12] 贾建科,韩团军. 基于Matlab GUI的模拟带通滤波器的设计 [J]. 现代电子技术,2010,33(10): 58-62 JIA J K,HAN T J. Design of analog band-pass filter based on matlab GUI[J]. Modern Electronics Technique, 2010,33(10): 58-62.(in Chinese)[13] 金翠云,栗大超. 基于机器微视觉的MEMS平面微运动测试技术 [J],仪器仪表学报,2005,26(8):772-774. JIN C Y, LI D CH. Measurement technique of in-plane motion for MEMS based on machine micro-vision[J]. Chinese Journal of Scientific Instrument,2005,26(8):772-774.(in Chinese)

浏览量

371

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

微型多参数水质传感器芯片的设计及应用

双通道MEMS微波功率传感器的匹配特性

用于光学遥感器耐受卫星平台微振动环境地面测试的六自由度平台

1.5m口径空间相机主镜组件的结构设计

适用于恶劣环境的MEMS压阻式压力传感器