高精度无导轨位移平台误差分析

曹佃生; 高云国

doi:10.3788/OPE.20122002.0313

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高精度无导轨位移平台误差分析

微纳技术与精密机械 | 更新时间：2020-08-12

- 高精度无导轨位移平台误差分析
- Error analysis of precise non-guiding displacement platform
- 光学精密工程 2012年20卷第2期页码：313-320
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
  2. 中国科学院研究生院北京,100039
- 作者简介：
- 基金信息：
  
  中国科学院长春光学精密机械与物理研究所三期创新工程资助项目(No.061X20C060)()
- DOI：10.3788/OPE.20122002.0313
  中图分类号： TH703;TP273
- 收稿日期：2011-05-23，
  
  修回日期：2011-07-06，
  
  网络出版日期：2012-02-25，
  
  纸质出版日期：2012-02-25
- 稿件说明：
移动端阅览
曹佃生, 高云国. 高精度无导轨位移平台误差分析[J]. 光学精密工程, 2012,20(2): 313-320

CAO Dian-sheng, GAO Yun-guo. Error analysis of precise non-guiding displacement platform[J]. Editorial Office of Optics and Precision Engineering, 2012,20(2): 313-320
曹佃生, 高云国. 高精度无导轨位移平台误差分析[J]. 光学精密工程, 2012,20(2): 313-320 DOI： 10.3788/OPE.20122002.0313.

CAO Dian-sheng, GAO Yun-guo. Error analysis of precise non-guiding displacement platform[J]. Editorial Office of Optics and Precision Engineering, 2012,20(2): 313-320 DOI： 10.3788/OPE.20122002.0313.

摘要

研究了基于补偿式柔性平行四杆机构的高精度位移平台的运动精度

对变形板尺寸误差、比例杆球心距误差和内外变形板装配夹角误差等误差源进行了分析计算。采用半梁模型分析了变形板

得到变形板行程与耦合位移量的关系

给出了平台直线度误差和耦合位移量误差关于平台位移和变形板尺寸的表达式。使用自准直仪和高精度微分测量头对平台直线度和耦合位移量进行了测量

结果表明:该补偿式结构的高精度无导轨位移平台在大行程(5 mm)工作时

仍具有较高的运动精度

直线度小于1.5

耦合位移量小于13.7 m

与理论分析吻合。

Abstract

The motion accuracy of a platform based on two compensated flexible four-bar linkages was researched and three error sources

namely

batten size error

the sphere center distance error of ratio lever and the assembling angle between the inner and external battens were analyzed. A semi-beam model was established to analyze the deformation of the batten and the relationship between working displacement and coupled displacement. The expressions of the platform straightness error and the limiting coupled displacement error which was concerned with the platform displacement and the batten sizes were derived. Finally

an autocollimator and a high precise measuring head were used in the measurements of the platform straightness and the coupled displacement. The experimental results show that the straightness error is smaller than 1.5 and the coupled displacement error is less than 13.7 m when the stroke of the displacement platform is no longer than 5 mm. It is proved that the platform works with high motion accuracy and the experimental result is consistent with the analysis results.

关键词

Keywords

references

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