静电拉伸薄膜反射镜的多电极成形控制

张鹏; 金光; 张元; 钟兴

doi:10.3788/OPE.20122002.0344

您当前的位置：

首页 >

文章列表页 >

静电拉伸薄膜反射镜的多电极成形控制

微纳技术与精密机械 | 更新时间：2020-08-12

- 静电拉伸薄膜反射镜的多电极成形控制
- Surface shape control of electrostatic stretching membrane mirror by multi-electrodes
- 光学精密工程 2012年20卷第2期页码：344-351
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
  2. 中国科学院研究生院北京,100039
- 作者简介：
- 基金信息：
  
  国家863高技术研究发展计划资助项目(No.2007AA12Z113)()
- DOI：10.3788/OPE.20122002.0344
  中图分类号： TH703;TH751
- 收稿日期：2011-05-20，
  
  修回日期：2011-07-28，
  
  网络出版日期：2012-02-25，
  
  纸质出版日期：2012-02-25
- 稿件说明：
移动端阅览
张鹏, 金光, 张元, 钟兴. 静电拉伸薄膜反射镜的多电极成形控制[J]. 光学精密工程, 2012,20(2): 344-351

ZHANG Peng, JIN Guang, ZHANG Yuan, ZHONG Xing. Surface shape control of electrostatic stretching membrane mirror by multi-electrodes[J]. Editorial Office of Optics and Precision Engineering, 2012,20(2): 344-351
张鹏, 金光, 张元, 钟兴. 静电拉伸薄膜反射镜的多电极成形控制[J]. 光学精密工程, 2012,20(2): 344-351 DOI： 10.3788/OPE.20122002.0344.

ZHANG Peng, JIN Guang, ZHANG Yuan, ZHONG Xing. Surface shape control of electrostatic stretching membrane mirror by multi-electrodes[J]. Editorial Office of Optics and Precision Engineering, 2012,20(2): 344-351 DOI： 10.3788/OPE.20122002.0344.

摘要

针对现有薄膜反射镜成形控制方法存在求解复杂

工程实用性差等问题

提出了基于反演求解的半解析成形控制方法。首先

基于Karman方程和静电场理论推导了所要拉伸的抛物面面形与施加压强分布的关系及实验所需的离散电极环电压值;其次

利用有限元软件建模和分析

验证所推导的压强分布;最后

在口径为300 mm的三环电极的静电拉伸反射镜实验平台上进行了验证实验。实验显示

拉伸面形最大变形量与理论值基本吻合

面形误差与传统均匀压强下的相比有所减少

最好的实验结果得到的PV值和RMS值较均匀压强下的值分别减少了9.76%和15.38%。仿真及实验结果表明:所描述的方法可以控制面形并提高面形精度

与传统的成形控制方法相比较具有简单实用等优点。

Abstract

For the complex control and unpractical calculation of the surface shape control method for an electrostatic stretching membrane mirror in engineering

a semi-analytical method of surface shape control based on an inverse approach was proposed.Firstly

the relation between required pressure distribution and voltages and the desired parabolic shape were derived based on the Karman equation and electrostatic field theory.Then

the finite element analysis was used to establish a model to validate the pressure distribution and a verified test was performed on a

300 mm three concentric annular electrode membrane mirror. The experimental results show that the measured values of max displacement are consistent with the theoretical ones basically.The surface shape error has been reduced as compared with that of traditional method and the best RMS and PV values of shape surfaces have reduced by 9.76% and 15.38% respectively under a uniform pressure. In conclusion

the method described can control surface shape and can improve the surface accuracy. Compared with other methods

the method is simpler and more practical.

关键词

Keywords

references

安源,金光,齐迎春,等. 薄膜反射镜的单电极控制静电成形 [J]. 光学精密工程, 2009,17(8):1964-1970. AN Y,JIN G,QI Y CH,et al.. Control of membrane mirror shape by single electrode [J]. Opt.Precision Eng., 2009,17(8):1964-1970. (in Chinese)[2] SIMONA E, BRIAN S, JAMES B. Stretched membrane with electrostatic curvature (SMEC) mirrors: Demonstration of a new technology for large lightweight space telescopes[J].SPIE,2002,3:108-110.[3] CHEN X H,TANG M X,SHEN W M. Membrane mirror deformed by electrostatic pressure[J]. SPIE,2007,6721:67211-67218.[4] 石广丰,金光,刘春雨,等. 薄膜反射镜的成形控制[J]. 光学精密工程,2009,17(4):732-737. SHI G F,JIN G,LIU CH Y, et al..Shaping control of membrane reflector[J]. Opt. Precision Eng., 2009,17(4):732-737.(in Chinese)[5] 陆丽娟,张庚生,唐敏学. 均匀载荷作用下膜基反射镜面形分析和研究[J]. 苏州大学学报(自然科学版),2009,25(4):53-58. LU L J,ZHANG G SH,TANG M X.Analysis and research on the shape of membrane mirror applied by uniform load[J].Journal of Suzhou University(natural science), 2009,25(4):53-58.(in Chinese)[6] MOORE J,GIEROW P,PATRICK B,et al.. A parametric assessment of material properties, boundary conditions, and environmental effects on the performance of membrane optical systems [J].SPIE,4849,2002:321-329.[7] 齐迎春,金光,许艳军. 空间薄膜反射镜面形设计及优化[J]. 光学精密工程,2007,15(6):818-828. QI Y CH,JIN G,XU Y J,et al..The design and optimize about the shape of the space membrane mirror [J].Opt. Precision Eng.,2007,15(6):818-828.(in Chinese)[8] 张鹏、金光、石广丰,等. 多电极静电拉伸薄膜反射镜的面形优化[J]. 光电子激光,2010,21(10):1515-1518. ZHANG P,JIN G,SHI G F,et al..Surface shape optimization for multi-electrode electrostatic stretching membrane mirror [J].Journal of Optoelectronicslaser, 2010,21(10):1515-1518.(in Chinese)[9] LISA R,MILES W,UMESH A K. Membrane mirrors with boundary located electrostatic actuators for exitation of multiplemodes .50thAIAA/ASME/ASCE/AHS/ASC structures,structural Dynamics, and Materials Conference 4-7 may 2009,palm springs,california.[10] MILES W,BRIAN C F,UMESH A K.Closed loop electrostatic actuation of membrane mirrors .boulder,Colorado,USA,2010.[11] ZHANG G SH.minxue tang Design and simulation of the surface shape control system for membrane mirror[J].SPIE,2009,7506:750610-1-750610-8.[12] 孙小伟.空间薄膜反射镜控制机理研究 . 北京:中国科学院研究生院,2007. SUN X W.The Research about the control Principle of the Space Membrane Mirror . Beijing:Graduate School of the Chinese Academy of Sciences,2007.(in Chinese)[13] 钱伟长,林鸿荪,胡海昌,等.弹性圆薄板大挠度问题[M]. 北京:中国科学院,1954:8-9. QIAN W CH,LIN H S,HU H CH, et al..Large deflection problems of circular elastic plates [M].Bei jing:Chinese Academy of Science,1954:8-9.(in Chinese)[14] MARKER D K,JENKINS C H. Surface precision of optical membranes with curvature [J].Optics Express,1997,1(11):324-331.[15] CLAFLIN E S,BAREKET N. Configuring an electrostatic membrane mirror by least squares fitting with analytically derived influence functions[J]. Opt.Soc.Am., 1986,3(11):1833-1839.[16] JENKINS C H,FAISAL S M. Thermal load effects on precision membranes [J].Journal of Spacecraft and Rockets,2001,38(2):207-211.[17] 刘元坤,苏显渝,姜美花,等. 基于相移和非相干成像的反射镜面形测量方法[J]. 光电子激光2006, 17(4):458-463. LIU Y K,SU X Y,JIANG M H, Shape measurement for reflector based on phase-shift and incoherent imaging[J].Journal of OptoelectronicsLaser,2006,17(4):458-463.(in Chinese)[18] MIHORA D J,REDMOND P J.Electrostatically for-med antennas[J].Journal of Spacecraft, 1980,17(5):465-473.

浏览量

333

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

应用条纹投影法测量薄膜反射镜的成形

薄膜反射镜静电成形单电极控制

薄膜反射镜静电成形机理研究