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1. 北京工业大学 激光工程研究院 北京,100124
2. 山东昌邑供电公司,山东 潍坊,261300
收稿日期:2011-10-11,
修回日期:2011-11-03,
网络出版日期:2012-03-22,
纸质出版日期:2012-03-22
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刘友强, 曹银花, 潘飞, 高静, 秦文斌, 刘世光, 王智勇. 激光加工用半导体激光器的光束变换[J]. 光学精密工程, 2012,(3): 455-461
LIU You-qiang, CAO Yin-hua, PAN Fei, GAO Jing, QIN Wen-bin, LIU Shi-guang, WANG Zhi-yong. Beam transformation of diode lasers used in laser processing[J]. Editorial Office of Optics and Precision Engineering, 2012,(3): 455-461
刘友强, 曹银花, 潘飞, 高静, 秦文斌, 刘世光, 王智勇. 激光加工用半导体激光器的光束变换[J]. 光学精密工程, 2012,(3): 455-461 DOI: 10.3788/OPE.20122003.0455.
LIU You-qiang, CAO Yin-hua, PAN Fei, GAO Jing, QIN Wen-bin, LIU Shi-guang, WANG Zhi-yong. Beam transformation of diode lasers used in laser processing[J]. Editorial Office of Optics and Precision Engineering, 2012,(3): 455-461 DOI: 10.3788/OPE.20122003.0455.
考虑不同的激光加工方式对激光功率密度和激光光斑尺寸的要求不同
研究了如何通过调整光路设计实现各种尺寸的聚焦光斑输出
使半导体激光器满足不同激光加工方式的需求。利用ZEMAX光学设计软件模拟半导体激光光路
包括光束整形、准直、聚焦等光束变换方式
实现了多种尺寸的光斑输出。实验中采用16个bar叠加而成的980 nm半导体激光叠阵
阈值电流为6.4 A
最大工作电流为84.8 A
最大输出功率为1 280 W
总的电-光转换效率为58.9%。准直后快轴的发散角小于4 mrad
慢轴的发散角小于20 mrad。通过实验对该激光叠阵进行光束整形和扩束准直、聚焦
最终实现了功率为1 031 W的激光输出
聚焦镜焦距为300 mm时的聚焦光斑尺寸达1.2 mm1.5 mm
功率密度达3.810
4
W/cm
2
可以用于金属的表面重熔、合金化、熔覆和热导型焊接。
As diode laser processing for different processing technologies demands different power densities and spot sizes
this paper researched how to get focus spot outputs with different sizes by adjusting optical path design to meet the requirements of various laser applications. By using ZEMAX to simulate the diode laser optical path
including beam shaping
collimation
focus
etc.
several kinds of spot outputs with various sizes was implemented. In the experiment
a 980 nm diode laser stack with the superposition of 16 bars was used by a threshold current of 6.4 A
the maximum operating current of 84.8 A
maximum output power of 1 280 W
and the total electrical-optical conversion efficiency of 58.9%. After collimation
the divergence angles for the fast axis and slow axis are less than 4 mrad and 20 mrad
respectively. Finally
the experiments were performed on the diode laser stack by the beam shaping
collimation and focusing
and a power output of 1 031 W is obtained. Furthermore
the focused spot size has been 1.2 mm ? 1.5 mm and the laser power density is up to 3.8?10
4
W/cm
2
when the focal length of focusing mirror is 300 nm. Results show that the laser stack can be used in remelting
alloying
cladding and thermal conductivity-type welding for metal surfaces.
DAVID H, MARCO H, RVDIGER B. Dramatic advances in direct diode lasers [J].SPIE,2010,7583:75830B-1-6.[2] 左铁钏. 21世纪的先进制造-激光技术与工程[M]. 北京:科学技术出版社,2007. ZUO T CH. Twenty-first Century Advanced Manufacturing-laser Technology and Engineering [M]. Beijing: Science and Technology Press, 2007.[3] 雷平顺,薛丽芳,何军,等. ZEMAX在多模光纤准直器设计中的应用 [J]. 激光与光电子学进展,2011,48(010605):010605-1-4. LEI P SH, XUE L F, HE J, et al.. Design of multi-mode fiber collimator with ZEMAX [J]. Laser & Optoelectronics Progress, 2011,48(010605):010605-1-4.(in Chinese)[4] 韩冰,纪雷刚,赵延磊,等. 基于ZEMAX的多模高斯光束拟合 [J]. 科技创新导报,2009,9:25-26. HAN B, JI L G, ZHAO Y L, et al.. Gaussian beam fitting based on ZEMAX[J]. Science and Technology Innovation Herald, 2009, 9 : 25-26.(in Chinese)[5] 叶锦函,郝晓剑,周汉昌,等. 基于ZEMAX的激光光束整形技术试验研究 [J]. 工程与试验, 2010, 50(3):46-48. YE J H, HAO X J, ZHOU H CH, et al.. Study on laser beam shaping technology based on ZEMAX [J]. Engineering and Test, 2010, 50(3):46-48.(in Chinese)[6] 彭宇航,顾媛媛,单肖楠,等. 大功率半导体激光光源光束整形技术研究 [J]. 中国激光,2011,2(38):0202010-1-6. PENG Y H, GU Y Y, SHAN X N, et al.. Study on beam shaping of high power diode laser[J]. Chinese Journal of Lasers, 2011,2(38):0202010-1-6.(in Chinese)[7] 单肖楠,刘云,曹军胜,等. 808 nm千瓦级高效大功率半导体激光光源 [J]. 光学 精密工程, 2011,19(2):452-456. SHAN X N, LIU Y, CAO J SH, et al.. 808 nm KW-output high-efficiency diode laser sources [J]. Opt. Precision Eng., 2011, 19(2): 452-456. (in Chinese)
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