Shack-Hartmann波前传感器检测大口径圆对称非球面反射镜

张金平; 张学军; 张忠玉; 郑立功

doi:10.3788/OPE.20122003.0492

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Shack-Hartmann波前传感器检测大口径圆对称非球面反射镜

现代应用光学 | 更新时间：2020-08-12

- Shack-Hartmann波前传感器检测大口径圆对称非球面反射镜
- Test of rotationally symmetric aspheric surface using Shack-Hartmann wavefront sensor
- 光学精密工程 2012年20卷第3期页码：492-498
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所中国科学院光学系统先进制造技术重点实验室, 吉林长春 130033
  2. 中国科学院研究生院,北京 100039
- 作者简介：
- 基金信息：
  
  国家自然科学基金重点项目(No.61036015)()
- DOI：10.3788/OPE.20122003.0492
  中图分类号： O439;TQ171.6+5
- 收稿日期：2010-09-25，
  
  修回日期：2011-03-24，
  
  网络出版日期：2012-03-22，
  
  纸质出版日期：2012-03-22
- 稿件说明：
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张金平, 张学军, 张忠玉, 郑立功. Shack-Hartmann波前传感器检测大口径圆对称非球面反射镜[J]. 光学精密工程, 2012,(3): 492-498

ZHANG Jin-ping, ZHANG Xue-jun, ZHANG Zhong-yu, ZHENG Li-gong. Test of rotationally symmetric aspheric surface using Shack-Hartmann wavefront sensor[J]. Editorial Office of Optics and Precision Engineering, 2012,(3): 492-498
张金平, 张学军, 张忠玉, 郑立功. Shack-Hartmann波前传感器检测大口径圆对称非球面反射镜[J]. 光学精密工程, 2012,(3): 492-498 DOI： 10.3788/OPE.20122003.0492.

ZHANG Jin-ping, ZHANG Xue-jun, ZHANG Zhong-yu, ZHENG Li-gong. Test of rotationally symmetric aspheric surface using Shack-Hartmann wavefront sensor[J]. Editorial Office of Optics and Precision Engineering, 2012,(3): 492-498 DOI： 10.3788/OPE.20122003.0492.

摘要

针对大口径非球面反射镜在研磨阶段后期其面形与理想面形存在较大偏差

且表面粗糙度较大、反射率较低

采用轮廓仪和普通干涉仪检测无法满足测试要求等问题

提出采用动态范围大且精度高的Shack-Hartmann波前传感器来检测大口径非球面反射镜。研究分析了Shack-Hartmann波前传感器检测系统的原理及系统误差并编写了相应的数据处理软件。为了验证该方法的可行性

对已经加工完成的350 mm口径旋转对称双曲面面形进行了检测

测量得到的面形误差PV值、RMS值分别为0.388、0.043(=632.8 nm);与干涉测量的标准结果进行了对比

得到的面形偏差PV值、RMS值分别为0.014和0.001。对比结果表明

Shack-Hartmann波前传感器的测量结果正确可靠

从而验证了Shack-Hartmann波前传感器检测大口径非球面反射镜的可行性。

Abstract

As the surface shape of a reflection mirror is different from the target shape at the end stage of the grinding process

and the profilometers and common interferometers can not measure the surface error exactly

this paper proposed a method to measure the large aperture aspheric surface by using a Shack-Hartmann Wavefront Sensor (SHWS) with a large dynamic range and high precision. The principle of the measuring system for SHWS was researched

its measuring errors were analyzed and a corresponding data processing software was compiled. Using a simulation reference file

a hyperboloid reflection mirror with a diameter of 350 mm was tested by the SHWS. Results indicate that the PV and RMS of the surface error are 0.388 and 0.043

respectively (=632.8 nm). In order to testify the measurement result

the mirror is also measured by an interferometer with a null compensator. Comparing the two testing results

the PV and RMS of the deviation are 0.014 and 0.001

respectively

which proves the feasibility of measuring large aperture aspheric surfaces by SHWSs.

关键词

Keywords

references

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