谱学显微光束线光斑水平漂移分析与检测

马磊; 卢启鹏; 彭忠琦

doi:10.3788/OPE.20122003.0514

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谱学显微光束线光斑水平漂移分析与检测

现代应用光学 | 更新时间：2020-08-12

- 谱学显微光束线光斑水平漂移分析与检测
- Analysis and test of light spot transversal transfer of spectromicroscopic beamline
- 光学精密工程 2012年20卷第3期页码：514-519
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春 130033
  2. 中国科学院研究生院,北京 100039
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No. 11079035)();应用光学国家重点实验室开放基金资助项目(No.O9Q33FQ091)()
- DOI：10.3788/OPE.20122003.0514
  中图分类号： TB92;TH744.1
- 收稿日期：2011-03-08，
  
  修回日期：2011-04-15，
  
  网络出版日期：2012-03-22，
  
  纸质出版日期：2012-03-22
- 稿件说明：
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马磊, 卢启鹏, 彭忠琦. 谱学显微光束线光斑水平漂移分析与检测[J]. 光学精密工程, 2012,(3): 514-519

MA Lei, LU Qi-peng, PENG Zhong-qi. Analysis and test of light spot transversal transfer of spectromicroscopic beamline[J]. Editorial Office of Optics and Precision Engineering, 2012,(3): 514-519
马磊, 卢启鹏, 彭忠琦. 谱学显微光束线光斑水平漂移分析与检测[J]. 光学精密工程, 2012,(3): 514-519 DOI： 10.3788/OPE.20122003.0514.

MA Lei, LU Qi-peng, PENG Zhong-qi. Analysis and test of light spot transversal transfer of spectromicroscopic beamline[J]. Editorial Office of Optics and Precision Engineering, 2012,(3): 514-519 DOI： 10.3788/OPE.20122003.0514.

摘要

为提高上海光源搭建的国内首条软X射线谱学显微光束线站的整体性能

分析了其分光装置-变包含角平面光栅单色仪在波长扫描过程中影响谱学显微光束线光斑水平漂移的各个因素

推导出了各因素与光斑水平漂移的传递关系

并结合具体要求进行了误差分配。针对光斑水平角漂移重复精度的检测

采用自准直原理

构建了测试系统。利用该系统

完成了谱学显微光束线站光斑水平漂移重复精度的离线检测

其结果为0.67

满足设计指标1的要求。对安装调试后的束线进行了总体性能测试

结果均满足谱学显微设计和使用要求。由此表明

提出的对谱学显微光束线光斑水平漂移误差来源的分析及检测方法

有效保证了束线性能的实现。

Abstract

With the aim to improve the unified performance of the first soft X-ray spectromicroscopic beamline built in Shanghai Synchrotron Radiation Facility(SSRF)

This paper analyzes the main factors that effect the light spot transversal transfer of the spectromicroscopic beamline during wavelength scanning by a variable-included-angle plane grating monochromator. It deduces the relation between various factors and light spot transversal transfer

and solves the error distribution of the system to ensure the performance of the beamline. A test system for the repeatability of light spot transversal transfer is built by auto collimation principle and the off-line testing of the light spot transversal transfer is finished by using this test system. The result shows that the repeatability is 0.67

which satisfies the technical requirement of 1. The unified performance for the beamline is tested after it is assembled. Obtained results meet the requirements of design and application

and prove the effectiveness of error analysis and testing for the light spot transversal transfer.

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Keywords

references

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