双球面法标定立式参考球面的精度分析

谷勇强; 苗二龙; 隋永新

doi:10.3788/OPE.20122003.0527

您当前的位置：

首页 >

文章列表页 >

双球面法标定立式参考球面的精度分析

现代应用光学 | 更新时间：2020-08-12

- 双球面法标定立式参考球面的精度分析
- Accuracy analysis on calibrating vertical spherical reference by two-sphere method
- 光学精密工程 2012年20卷第3期页码：527-533
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所, 吉林长春 130033
  2. 中国科学院研究生院,北京 100039
- 作者简介：
- 基金信息：
  
  光学系统关键技术研究资助项目(No.06E030)()
- DOI：10.3788/OPE.20122003.0527
  中图分类号： TH744.3
- 收稿日期：2011-05-28，
  
  修回日期：2011-07-08，
  
  网络出版日期：2012-03-22，
  
  纸质出版日期：2012-03-22
- 稿件说明：
移动端阅览
谷勇强, 苗二龙, 隋永新. 双球面法标定立式参考球面的精度分析[J]. 光学精密工程, 2012,(3): 527-533

GU Yong-qiang, MIAO Er-long, SUI Yong-xin. Accuracy analysis on calibrating vertical spherical reference by two-sphere method[J]. Editorial Office of Optics and Precision Engineering, 2012,(3): 527-533
谷勇强, 苗二龙, 隋永新. 双球面法标定立式参考球面的精度分析[J]. 光学精密工程, 2012,(3): 527-533 DOI： 10.3788/OPE.20122003.0527.

GU Yong-qiang, MIAO Er-long, SUI Yong-xin. Accuracy analysis on calibrating vertical spherical reference by two-sphere method[J]. Editorial Office of Optics and Precision Engineering, 2012,(3): 527-533 DOI： 10.3788/OPE.20122003.0527.

摘要

采用双球面法对立式Fizeau干涉仪的参考球面进行标定以确定由重力、安装夹持力等导致的面形形变量

提高立式光学系统中光学元件的面形检测精度。首先

推导了双球面法标定算法;进而

理论分析和模拟计算了影响检测精度的环境、重力、安装夹持力等因素;最后

利用双球面法对立式Fizeau干涉仪的参考球面进行标定

并利用误差合成理论分析实验结果。实验结果显示

利用双球面法标定

/1.5的立式Fizeau干涉仪参考面的精度为2.3 nm。其中

算法本身以及实验操作引起的测量重复性不大于0.7 nm

包含环境误差时的重复性低于1.2 nm;重力导致的面形形变约为0.9 nm

标准镜安装导致的面形形变约为1.7 nm。结果论证了双球面法具有很高的标定精度;环境对检测精度的影响与干涉腔长度有关

长度增加时影响很明显;立式工作时

重力、安装等因素导致的标准镜参考球面的面形形变很大

在高精度使用前必须进行标定。

Abstract

The spherical reference in a vertical Fizeau interferometer was calibrated by the two-sphere method to identify the surface deformations induced by gravity

mounting or holding forces to improve the surface measurement accuracy of optical elements in vertical optical systems. First

the algorithm of two-sphere absolute method was deduced. Then

the factors that may influence measurement accuracy

including environment

gravity

mounting or holding forces were analyzed in theory or calculation by simulation. Finally

the spherical reference used in the vertical Fizeau interferometer was calibrated by two-sphere method

and the experimental results were analyzed by the law of error combination. Experimental results indicate that the calibration accuracy by using two-sphere method is 2.3 nm RMS for the spherical reference of

/1.5 vertical Fizeau interferometer. Among them

the measurement repeatability induced by the method and experimental operation is no more than 0.7 nm

and that is no more than 1.2 nm while environment influences are taken into account

including vibration and temperature. Furthermore

the surface deformation induced by gravity is about 0.9 nm RMS

and that induced by mounting or holding force is about 1.7 nm. In conclusion

two-sphere method is high precise method that can be used in calibrating vertical spherical reference and the influence of environments on measurement is relative to the length of interferometric cavity. The spherical reference must be calibrated before it is used for high precise measurement vertically

for the surface deformation will be remarkable induced by the gravity

mounting or holding forces.

关键词

Keywords

references

CLAMPIN M, Status of the james webb space telescope (JWST)[J]. SPIE, 2008,7010:1-70100L.[2] MATSUYAMA T, OHMURA Y, WILLIAMSON D M. The lithographic lens: its history and evolution. SPIE, 2006,6154: 24-37.[3] 林强,金春水,向鹏,等. 离轴照明Schwarzchild投影物镜的计算机辅助装调方法 [J].光学精密工程,2003, 11(2):144-150. LIN Q, JIN CH SH, XIANG P, et al..Computer-aided alignment of Schwarzchild objective with off axis illumination [J].Opt. Precision Eng., 2003, 11(2):144-150. (in Chinese)[4] ARNOLD T, BOHM G, FECHNER R, et al.. Ultra-precision surface finishing by ion beam and plasma jet techniques-status and outlook [J]. Nuclear Instruments and Methods in Physics Research A, 2010,616:147-156.[5] 武建芬,卢振武,张红鑫,等. 光学非球面离子束加工模型及误差控制 [J] 光学精密工程, 2009,17(11):2678-2689. WU J F, LU ZH W, ZHANG H X, et al.. Model of ion beam figuring in aspheric optics and its error control [J] Opt. Precision Eng., 2009,17(11):2678-2689.(in Chinese)[6] 周旭升,大中型非球面计算机控制研抛工艺方法研究.北京:中国科学院研究生院,2007 ZHOU X SH, Study on techniques in computer-controlled grinding and polishing for large and medium aspheric surfaces. Beijing: Graduate university of Chinese Academy of Science,2007.(in Chinese)[7] KORDONSKI W. Apparatus and method for abrasive jet finishing of deep concave surfaces using magneto-rheological fluid. US Patent, 2003, 6561874.[8] MOH L L, GEK S CH, QUN Y L, et al.. Ion Beam Figuring (IBF) for high precision optics [J]. SPIE,2010,7591:1-9.[9] TAKAYUKI H, CHIDANE O, MASANOBU H. EUV wavefront metrology system in EUVA[J] SPIE, 2004, 5374:797-807.[10] 马强,刘伟奇,李香波,等. 点衍射干涉仪中小孔衍射波面误差分析 [J],光学学报,2008, 28(12):2321-2324. MA Q, LIU W Q, LI X B, et al.. Analysis of diffraction wavefront error in point diffraction interferometer [J] Acta Optica Sinica, 2008, 28(12):2321-2324. (in Chinese)[11] WYANT J C, O’NEILL P K, Computer generated hologram; null lens test of aspheric wavefronts[J] Applied optics, 1974, 13(12):2762-2765.[12] SCHULZ G, SCHWIDER J, Interferometric testing of smooth surfaces [J] Progress in Optics (North-Holland, Amsterdam), 1976, 13:93-167.[13] GUNTER S and JORGEN G, Absolute flatness testing by the rotation method with optimal measuring-error compensation [J] APPLIED OPTICS, 1992, 31(19):3767-3780.[14] FRITZ B S. Absolute calibration of an optical flat [J] Opt. Precision Eng., 1984,23:379-383.[15] AI. C., WYANT J C, Absolute testing of flats by using even and odd functions [J] Appl. Opt. 1993,32:4698-4705.[16] PARKS R E. A practical implementation of the random ball test [J] in Frontiers in Optics, OSA Technical Digest, 2006, 12:1-3.[17] EDLEN B, The refractive index of air [J] Metrologia, 1966,2(2):71-80.[18] BRICH K P, DOWNS M J. Correction to the updated edlen equation for the refractive index of air [J] Metrologia, 1994, 31(4): 315-316.

浏览量

1041

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

Fizeau干涉仪主机的热稳定性设计与分析