压电驱动器记忆特性迟滞非线性建模

张桂林; 张承进; 赵学良

doi:10.3788/OPE.20122005.0996

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压电驱动器记忆特性迟滞非线性建模

微纳技术与精密机械 | 更新时间：2020-08-12

- 压电驱动器记忆特性迟滞非线性建模
- Modeling of nonlocal memory hysteresis in piezoelectric actuators
- 光学精密工程 2012年20卷第5期页码：996-1001
- 作者机构：
  
  山东大学控制科学与工程学院,山东济南 250061
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No. 61174044)();山东省自然科学基金资助项目(No. ZR2010FM016)()
- DOI：10.3788/OPE.20122005.0996
  中图分类号： TN384;TP391.9
- 收稿日期：2011-12-16，
  
  修回日期：2012-02-23，
  
  网络出版日期：2012-05-10，
  
  纸质出版日期：2012-05-10
- 稿件说明：
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张桂林, 张承进, 赵学良. 压电驱动器记忆特性迟滞非线性建模[J]. 光学精密工程, 2012,20(5): 996-1001

ZHANG Gui-lin, ZHANG Cheng-jin, ZHAO Xue-liang. Modeling of nonlocal memory hysteresis in piezoelectric actuators[J]. Editorial Office of Optics and Precision Engineering, 2012,20(5): 996-1001
张桂林, 张承进, 赵学良. 压电驱动器记忆特性迟滞非线性建模[J]. 光学精密工程, 2012,20(5): 996-1001 DOI： 10.3788/OPE.20122005.0996.

ZHANG Gui-lin, ZHANG Cheng-jin, ZHAO Xue-liang. Modeling of nonlocal memory hysteresis in piezoelectric actuators[J]. Editorial Office of Optics and Precision Engineering, 2012,20(5): 996-1001 DOI： 10.3788/OPE.20122005.0996.

摘要

考虑压电驱动器固有的迟滞特性对驱动器定位精度的影响

提出了一种精确描述压电驱动器迟滞非线性特性的建模方法。根据迟滞曲线的运动规律

并且考虑迟滞曲线的记忆更新特性

新的迟滞数学模型修正了单纯采用抛物线拟合时的建模误差。为了验证模型的有效性

以PST150/7/40VS12型压电陶瓷驱动器为例进行了试验研究。研究显示

采用抛物线迟滞模型对一阶反转输入信号进行预测时

最大误差为0.141 3 m

均方误差为0.060 4 m

对复杂信号模型预测的最大误差为1.396 0 m

均方误差为0.856 6 m;采用修正后的模型对文中复杂信号建模时

最大误差为0.237 0 m

均方误差为0.09 m。实验结果表明

修正后的模型不仅能够满足迟滞曲线的运动规律

还能够满足迟滞非线性的记忆更新特性

可以比较精确地描述复杂输入信号下的迟滞非线性特性。

Abstract

As piezoelectric actuators have poor position accuracy caused by their inherent hysteresis nonlinearities

this paper proposed a new modeling method to precisely describe their hysteresis phenomena. Based on the motion rules of hysteresis curves and the nonlocal memory property of the hysteresis nonlinearity

proposed model modified the modeling errors fitted by parabolic model. To verify the feasibility of the model

an experiment was performed by the PST150/7/40VS12 piezoelectric actuator. Experimental results indicate that for the first order reversal signal

the maximum error is 0.141 3 m and the mean-squared error (MSE) is 0.060 4 m by using the parabolic model. However

for a more complex signal

those of the parabolic model are 1.396 0 m and 0.856 6 m

respectively. When using the amended model to predict the actuator response under the above-mentioned complex signal

the maximum prediction error and the mean-squared error are 0.237 0 m and 0.09 m

respectively. These data demonstrate that the proposed model not only provides a minor-loop identical property

but also offers the nonlocal property and it can precisely predict the hysteresis path for assigned complex input profiles.

关键词

Keywords

references

DEVASIA S, ELEFTHERIOU E, MOHEIMANI S O R. A survey of control Issues in nanopositioning [J]. IEEE Transactions on Control Systems Technology, 2007, 15(5): 802-823.[2] MOHEIMANI S O R. Accurate and fast nanopositioning with piezoelectric tube scanners: Emerging trends and future challenges [J]. Review of Scientific Instruments, 2008, 79(5):1-11.[3] 李黎,刘向东,侯朝桢,等. 混合Preisach 迟滞模型及其性质研究 [J].光学精密工程, 2008,16(2): 279-284. LI L, LIU X D, HOU CH ZH, et al.. Mixed preisach hysteresis model and its properties [J]. Opt. Precision Eng., 2008, 16(2): 279-284. (in Chinese)[4] GE P, JOUANEH M. Generalized preisach model for hysteresis nonlinearity of piezoceramic actuators [J]. Precision Engineering, 1997, 20(2): 99-111.[5] 张栋,张承进,魏强. 压电微动工作台的动态迟滞模型 [J].光学精密工程,2009,17(3):549-556. ZHANG D, ZHANG CH J, WEI Q. Dynamic hysteresis model of piezopositioning stage[J]. Opt. Precision Eng., 2009, 17(3):549-556. (in Chinese)[6] BASHASH S, JALILII N. Robust multiple frequency trajectory tracking control of piezoelectrically driven micro/nanopositioning systems[J]. IEEE Transactions on Control Systems Technology, 2007, 15(5): 867-878.[7] SONG D, LI C.J. Modeling of piezoactuator's nonlinear and frequency dependent dynamics[J]. Mechatronics,1999, 9:391-410.[8] 王代华,朱炜. WTYD型压电陶瓷微位移器的迟滞特性建模与实验验证 [J]. 光学精密工程,2010, 18(1):205-211 WANG D H, ZHU W. Hysteretic modeling and experimental verification for WTYD type piezoceramic micro-actuators [J]. Opt. Precision Eng., 2010, 17(3):211-217 .(in Chinese)[9] 魏强,张玉林. 压电陶瓷微位移工作台的建模方法 [J]. 光学精密工程,2007, 15(10):1596-1601 WEI Q, ZHANG Y L. Modeling method of micro-displacement stage driven by piezoelectric ceramic [J]. Opt. Precision Eng., 2007, 15(10):1596-1601. (in Chinese)[10] TZEN J J, JENG S L, CHIENG W H. Modeling of piezoelectric actuator for compensation and controller design[J]. Precision Engineering, 2003, 27(1):70-86.[11] SUN L N, RU C H, RONG W B, et al. Tracking control of piezoelectric actuator based on a new mathematical model [J]. Journal of Micromechanics and Microengineering, 2004,14(1):1439-1444.

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