压电双晶片扫描器的低温迟滞蠕变特性

张旋; 潘鸣

doi:10.3788/OPE.20122005.1064

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压电双晶片扫描器的低温迟滞蠕变特性

微纳技术与精密机械 | 更新时间：2020-08-12

- 压电双晶片扫描器的低温迟滞蠕变特性
- Cryogenic hysteresis and creep characteristics of piezoelectric bimorph scanner
- 光学精密工程 2012年20卷第5期页码：1064-1068
- 作者机构：
  
  1. 中国科学院上海技术物理研究所上海,200083
  2. 中国电子科技集团公司第五十研究所,上海 200063
- 作者简介：
- 基金信息：
  
  上海技术物理研究所三期知识创新工程资助项目(No. C1-30)()
- DOI：10.3788/OPE.20122005.1064
  中图分类号： TN384;TN216
- 收稿日期：2012-02-13，
  
  修回日期：2012-03-15，
  
  网络出版日期：2012-05-10，
  
  纸质出版日期：2012-05-10
- 稿件说明：
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张旋, 潘鸣. 压电双晶片扫描器的低温迟滞蠕变特性[J]. 光学精密工程, 2012,20(5): 1064-1068

ZHANG Xuan, PAN Ming. Cryogenic hysteresis and creep characteristics of piezoelectric bimorph scanner[J]. Editorial Office of Optics and Precision Engineering, 2012,20(5): 1064-1068
张旋, 潘鸣. 压电双晶片扫描器的低温迟滞蠕变特性[J]. 光学精密工程, 2012,20(5): 1064-1068 DOI： 10.3788/OPE.20122005.1064.

ZHANG Xuan, PAN Ming. Cryogenic hysteresis and creep characteristics of piezoelectric bimorph scanner[J]. Editorial Office of Optics and Precision Engineering, 2012,20(5): 1064-1068 DOI： 10.3788/OPE.20122005.1064.

摘要

研究了用于空间红外相机低温光学系统的压电双晶片扫描器的低温迟滞蠕变问题。压电双晶片具有行程大

不发热

在低温下仍然能够工作等优点

然而由于压电陶瓷固有的迟滞蠕变特性

使得其扫描精度受到了较大的影响。本文在常温和低温下

对所研制的压电双晶片扫描器的迟滞和蠕变特性进行实验研究和特性对比。结果显示:尽管压电双晶片扫描器的迟滞量和蠕变量均有大幅度下降

但由于总行程的下降幅度更大

使得迟滞度和蠕变系数有较大上升;120 K下的迟滞度约为300 K下的2倍

120 K下的蠕变系数比300 K下的上升了一个数量级。低温下压电双晶片扫描器的迟滞和蠕变特性相比常温下更加严重

这给其在低温下的高精度应用带来了更大的影响。

Abstract

The cryogenic hysteresis and creep characteristics of piezoelectric bimorph scanners for cryogenic optical systems in space infrared cameras were studied. The piezoelectric bimorph has superior characteristics of large displacement

high resolution

no self-heating

etc

moreover

it can work efficiently at a cryogenic temperature. However

the inherent hysteresis and creep characteristics of the piezoelectric bmorph have a large impact on the scanning accuracy when it is used for high precision scanning. In this paper

the hysteresis and creep characteristics of a fabricated piezoelectric bimorph scanner were experimentally studied at room temperature and cryogenic temperature and the results were compared. The results indicate that both hysteresis displacement and creep displacement of the piezoelectric bimorph scanner have a large decrease

but the decrease of total travel displacement is much larger

which leads the hysteresis rate and creep coefficient increase more large. The hysteresis rate at 120 K is twice that at 300 K and the creep coefficient at 120 K increases by an order of magnitude as compared with that at 300 K. Results mean that the hysteresis and creep characteristics of piezoelectric bimorph scanner at cryogenic temperature are more serious than it at room temperature

which will bring greater impact when it is used for high precision applications.

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Keywords

references

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