光学元件表面的数字全息在线检测

王璠璟; 肖文; 潘锋; 丛琳; 李建毅

doi:10.3788/OPE.20122006.1182

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光学元件表面的数字全息在线检测

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- 光学元件表面的数字全息在线检测
- Digital holographic on-line detection of optic component surface
- 光学精密工程 2012年20卷第6期页码：1182-1187
- 作者机构：
  
  北京航空航天大学仪器科学与光电工程学院北京,100191
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.31000387,61177006)()
- DOI：10.3788/OPE.20122006.1182
  中图分类号： O438.1
- 收稿日期：2012-01-06，
  
  修回日期：2012-03-01，
  
  网络出版日期：2012-06-10，
  
  纸质出版日期：2012-06-10
- 稿件说明：
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王璠璟, 肖文, 潘锋, 丛琳, 李建毅. 光学元件表面的数字全息在线检测[J]. 光学精密工程, 2012,20(6): 1182-1187

WANG Fan-jing, XIAO Wen, PAN Feng, CONG Lin, LI Jian-yi. Digital holographic on-line detection of optic component surface[J]. Editorial Office of Optics and Precision Engineering, 2012,20(6): 1182-1187
王璠璟, 肖文, 潘锋, 丛琳, 李建毅. 光学元件表面的数字全息在线检测[J]. 光学精密工程, 2012,20(6): 1182-1187 DOI： 10.3788/OPE.20122006.1182.

WANG Fan-jing, XIAO Wen, PAN Feng, CONG Lin, LI Jian-yi. Digital holographic on-line detection of optic component surface[J]. Editorial Office of Optics and Precision Engineering, 2012,20(6): 1182-1187 DOI： 10.3788/OPE.20122006.1182.

摘要

针对光学元件表面质量在线检测的特点

设计了基于数字全息的三维再现检测系统。该系统采用离轴光路

避开了被测元件的光轴

在数字全息再现过程中应用倾斜相差补偿技术去除了由于离轴检测引入的倾斜相位畸变。在检测过程中

利用围绕光轴旋转被测元件的方法来改变入射照明光方向矢量和相应的观察方向

实现了多照明矢量合成孔径技术的应用

扩展了系统的检测距离

提高了系统分辨率。同时

多照明角度下检测数据的叠加

还有效地抑制了检测过程中出现的散斑噪声对结果准确度的影响。通过对分辨率板、高精度玻璃反射镜的检测实验

验证了该系统在光学元件表面检测中的作用。当记录距离为40 cm时

其分辨率能够达到10 μm

满足光学元件表面检测的需要。

Abstract

An on-line 3D detection system for optic component surface measurement was designed based on digital holography. An off-axis structure was chosen to evade the optical axis of a test object and the tilt phase compensation was used to eliminate the tilted phase distortion caused by an off-axis optic path. In this system

the illuminating angle and view direction could be changed by rotating the object around the optical axis

by which the recording distance was increased and the resolution was improved using synthetic aperture technique. Meanwhile

the superposition of reconstruction images could decrease the effect of speckle noise on the reconstructed distribution. The proposed method is experimentally validated by a resolution test target and an optic mirror

and it shows that the 2D resolution of the system has been 10 μm at a recording distance of 40 cm and the system noise also be suppressed effectively.

关键词

Keywords

references

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