凹面光栅衍射效率测试仪精度分析和优化

寇婕婷; 吴娜; 巴音贺希格; 唐玉国; 齐向东; 于宏柱

doi:10.3788/OPE.20122006.1225

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凹面光栅衍射效率测试仪精度分析和优化

现代应用光学 | 更新时间：2020-08-12

- 凹面光栅衍射效率测试仪精度分析和优化
- Precision analysis and optimization on diffraction efficiency instrument for concave gratings
- 光学精密工程 2012年20卷第6期页码：1225-1232
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
  2. 中国科学院研究生院北京,100039
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.60478043)();"十一五"国家科技支撑计划重大项目(No.2006BAK03A02)();中国科学院重大科研装备研制资助项目(N
- DOI：10.3788/OPE.20122006.1225
  中图分类号： O436.1;TH744.1
- 收稿日期：2011-12-10，
  
  修回日期：2012-03-04，
  
  网络出版日期：2012-06-10，
  
  纸质出版日期：2012-06-10
- 稿件说明：
移动端阅览
寇婕婷, 吴娜, 巴音贺希格, 唐玉国, 齐向东, 于宏柱. 凹面光栅衍射效率测试仪精度分析和优化[J]. 光学精密工程, 2012,20(6): 1225-1232

KOU Jie-ting, WU Na, Bayanheshig, TANG Yu-guo, QI Xiang-dong, YU Hong-zhu. Precision analysis and optimization on diffraction efficiency instrument for concave gratings[J]. Editorial Office of Optics and Precision Engineering, 2012,20(6): 1225-1232
寇婕婷, 吴娜, 巴音贺希格, 唐玉国, 齐向东, 于宏柱. 凹面光栅衍射效率测试仪精度分析和优化[J]. 光学精密工程, 2012,20(6): 1225-1232 DOI： 10.3788/OPE.20122006.1225.

KOU Jie-ting, WU Na, Bayanheshig, TANG Yu-guo, QI Xiang-dong, YU Hong-zhu. Precision analysis and optimization on diffraction efficiency instrument for concave gratings[J]. Editorial Office of Optics and Precision Engineering, 2012,20(6): 1225-1232 DOI： 10.3788/OPE.20122006.1225.

摘要

分析和优化了凹面光栅衍射效率自动测试仪的测量精度

以提高凹面光栅相对衍射效率测量结果的准确性。根据凹面光栅相对衍射效率测量原理

对凹面光栅出射光谱增宽、衍射光束截面变化、光源辐射亮度的控制和测量波长同步精度等影响测量准确性的因素进行分析

给出了必要的运算关系式。采用回归分析等数学方法

基于大量实验数据建立了测量结果的优化公式

并将该公式编入测量程序

实现了在测量结束的同时自动优化测量结果。实验表明

经过优化后的测量值更加准确

与相对衍射效率理论值的偏差均在±2.5%以内

有效提高了仪器的测量精度。该方法操作简单

无需添加或改动仪器的任何部件

可满足仪器实时性强、测量准确的要求。

Abstract

This paper analyzes the measuring results of a diffraction efficiency measuring instrument for concave gratings to improve the measuring accuracy of relative diffractive efficiency. According to the testing theory of diffraction efficiency of concave gratings

the effects of the spectral broadening of exit beam for the concave grating

section changing of diffraction beam

control of light source radiation luminance and the synchronization precision of testing wavelength on the measuring accuracy were analyzed

and several kinds of necessary equations were given. Based on regression analysis and a large number of experiment data

an optimization equation was established and programmed into a testing programming to correct automatically the test results. Experiments indicate that the tested results are correct and more precise

and the difference between optimization value and theoretical one is less than?2.5%

which improves the testing precision effectively. This method is simpler operation

not to change the components of the instrument

and can satisfy the test requirements in strong real-time and higher precision.

关键词

Keywords

references

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