压电陶瓷微动台的复合控制

王俐; 饶长辉; 饶学军

doi:10.3788/OPE.20122006.1265

您当前的位置：

首页 >

文章列表页 >

压电陶瓷微动台的复合控制

微纳技术与精密机械 | 更新时间：2020-08-12

- 压电陶瓷微动台的复合控制
- Feed-forward control of piezoelectric ceramic positioning stage
- 光学精密工程 2012年20卷第6期页码：1265-1271
- 作者机构：
  
  1. 中国科学院光电技术研究所,四川成都,610209
  2. 中国科学院研究生院北京,100039
  3. 中国科学院自适应光学重点实验室,四川成都,610209
- 作者简介：
- 基金信息：
  
  国家自然科学基金重点项目(No.11178004)()
- DOI：10.3788/OPE.20122006.1265
  中图分类号： TN384;TP273
- 收稿日期：2012-02-10，
  
  修回日期：2012-03-05，
  
  网络出版日期：2012-06-10，
  
  纸质出版日期：2012-06-10
- 稿件说明：
移动端阅览
王俐, 饶长辉, 饶学军. 压电陶瓷微动台的复合控制[J]. 光学精密工程, 2012,20(6): 1265-1271

WANG Li, RAO Chang-hui, RAO Xue-jun. Feed-forward control of piezoelectric ceramic positioning stage[J]. Editorial Office of Optics and Precision Engineering, 2012,20(6): 1265-1271
王俐, 饶长辉, 饶学军. 压电陶瓷微动台的复合控制[J]. 光学精密工程, 2012,20(6): 1265-1271 DOI： 10.3788/OPE.20122006.1265.

WANG Li, RAO Chang-hui, RAO Xue-jun. Feed-forward control of piezoelectric ceramic positioning stage[J]. Editorial Office of Optics and Precision Engineering, 2012,20(6): 1265-1271 DOI： 10.3788/OPE.20122006.1265.

摘要

压电陶瓷微动台的迟滞非线性严重影响其动态定位精度

为了解决这一问题

采用一种改进的PI模型对微动台的迟滞非线性进行了建模。为了提高传统PID算法对压电陶瓷微动台的动态定位性能

将改进的PI模型与传统PID算法组合构成前馈复合控制算法

并进行了微动台的慢速与快速动态定位实验。结果表明

对同频曲线定位时

前馈PID复合算法的最大误差为传统PID算法的40%左右

平均误差为传统算法的20%~30%左右;对多频曲线定位时

前馈PID复合算法的最大误差和平均误差为传统PID算法的33%左右。数据表明前馈PID复合算法的动态定位性能明显优于传统PID算法。

Abstract

As the nonlinear hysteresis of a piezoelectric ceramic positioning stage affects its dynamic positioning precision badly

this paper proposes a model for the piezoelectric ceramic hysteresis based on a modified PI hysteresis model. In order to improve the dynamic positioning precision of the piezoelectric ceramic positioning stage based on traditional PID algorithm

the feed-forward control is constituted with the modified PI inverse hysteresis model and a traditional PID

and the experiments on slow speed and high speed positionings are performed. Experimental results show that the maximal error and mean error of the feed-forward controller are 40% and 20%-30% that of traditional PID algorithm for tracking single frequency trajectory.For multi-frequency trajectory tracking

the feed-forward controller has better dynamic control effect

and both maximal error and mean error are almost 33% that of traditional one.These data indicate the availability of the feed-forward control algorithm.

关键词

Keywords

references

GOLDFARB M,CELANOVIC N. Modeling piezoelectric stack actuators for control of micromanipulation[J]. IEEE Control system,1997,17(3):69-79.

李黎,刘向东,候朝桢,等. 混合Preisach迟滞模型及其性质研究[J]. 光学精密工程,2008,16(2):279-284. LI L,LIU X D,HOU CH ZH,et al.. Mixed Preisach hysteresis model and its properties[J]. Opt. Precision Eng.,2008,16(2):279-284.(in Chinese)

COLEMAN B D,HODGDON M L. A constitutive relation for rate independent hysteresis in ferromagnetically soft materials[J]. Int. J. of Engineering Science,1986,24(6):897-919.

王代华,朱炜. WTYD型压电陶瓷微位移器的迟滞特性建模与实验验证[J]. 光学精密工程,2010,18(1):205-211. WANG D H,ZHU W. Hysteretic modeling and experimental verification for WTYD type piezoceramic micro-actuators[J]. Opt. Precision Eng.,2010,18(1):205-211.(in Chinese)

SONG G,ZHAO J Q,ZHOU X Q,et al.. Tracking control of a piezoceramic actuator with hysteresis compensation using inverse Preisach model[J]. IEEE/ASME Transactions on Mechatronics,2005,10(2):198-209.

耿洁,刘向东,陈振,等. Preisach迟滞逆模型的神经网络分类排序[J]. 光学精密工程,2010,18(4):855-862. GENG J,LIU X D,CHEN ZH,et al.. Realization of sorting & taxis of Preisach inverse hysteresis model using neural network[J]. Opt. Precision Eng.,2010,18(4):855-862.(in Chinese)

王湘江,王兴松. 迟滞动态模型辨识[J]. 仪器仪表学报,2009,30(5):1042-1048. WANG X J,WANG X S. Identifying dynamic hysteresis model[J]. Chinese Journal of Scientific Instrument,2009,30(5):1042-1048.(in Chinese)

TAN U X,WIN T L,ANG W T. Modeling piezoelectric actuator hysteresis with singularity free Prandtl-Ishlinskii model . IEEE International Conference on Robotics and Biomimetics,December 17-20,2006, Kunming,China. 2006:251-256.

KUHNEN K,JANOCHA H. Inverse feedforward controller for complex hysteretic nonlinearities in smart-material systems[J]. Control Intell. Syst.,2001,29(3):74-83.

KUHNEN K,JANOCHA H. Compensation of creep and hysteresis effects of piezoelectric actuators with inverse systems . Proceedings of Actuator 98 6th International Conference on New Actuators Germany:1998.

KUHNEN K. Modeling identification and compensation of complex hysteresis nonlinearities a modified Prandtl-Ishlinskii approach[J]. Euro Pen Journal of Control,2003,9(4):407-418.

王希花,郭书祥,叶秀芬,等. 压电陶瓷迟滞特性的建模及复合控制[J]. 电机与控制学报,2009,13(5):766-771. WANG X H,GUO SH X,YE X F,et al.. Modeling and feed-forward control based on piezoelectric ceramic hysteretic[J]. Electric Machines and Control,2009,13(5):766-771.(in Chinese)

党选举,陈辉. 非线性动态迟滞压电陶瓷的实时控制[J]. 压电与声光,2008,30(3):353-355. DANG X J,CHEN H. Real-time control of nonlinear dynamic hysteresis piezoceramic[J]. Piezoelectectrics & Acoustooptics,2008,30(3):353-355.(in Chinese)

浏览量

266

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

地基大口径望远镜动态目标跟踪中压电式快速反射镜迟滞效应的补偿

千单元自适应压电变形镜的高压放大器设计

压电定位平台Hammerstein建模与反馈线性化控制

压电陶瓷迟滞非线性前馈补偿器

杠杆式尺蠖压电直线驱动器