光学相干层析技术在光学表面间距测量中的应用

王志斌; 史国华; 何益; 丁志华; 张雨东

doi:10.3788/OPE.20122007.1469

您当前的位置：

首页 >

文章列表页 >

光学相干层析技术在光学表面间距测量中的应用

现代应用光学 | 更新时间：2020-08-12

- 光学相干层析技术在光学表面间距测量中的应用
- Application of optical coherence tomography to distance measurement of optical surface
- 光学精密工程 2012年20卷第7期页码：1469-1474
- 作者机构：
  
  1. 浙江大学现代光学仪器国家重点实验室,浙江杭州,310027
  2. 中国科学院研究生院北京,100039
  3. 中国科学院光电技术研究所,四川成都,610209
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.61108082)();中国科学院创新方向资助项目(No.KGCX2-Y11-920)()
- DOI：10.3788/OPE.20122007.1469
  中图分类号： TP391.41;TH816.3
- 收稿日期：2011-12-23，
  
  修回日期：2012-02-29，
  
  网络出版日期：2012-07-10，
  
  纸质出版日期：2012-07-10
- 稿件说明：
移动端阅览
王志斌, 史国华, 何益, 丁志华, 张雨东. 光学相干层析技术在光学表面间距测量中的应用[J]. 光学精密工程, 2012,20(7): 1469-1474

WANG Zhi-bin, SHI Guo-hua, HE Yi, DING Zhi-hua, ZHANG Yu-dong. Application of optical coherence tomography to distance measurement of optical surface[J]. Editorial Office of Optics and Precision Engineering, 2012,20(7): 1469-1474
王志斌, 史国华, 何益, 丁志华, 张雨东. 光学相干层析技术在光学表面间距测量中的应用[J]. 光学精密工程, 2012,20(7): 1469-1474 DOI： 10.3788/OPE.20122007.1469.

WANG Zhi-bin, SHI Guo-hua, HE Yi, DING Zhi-hua, ZHANG Yu-dong. Application of optical coherence tomography to distance measurement of optical surface[J]. Editorial Office of Optics and Precision Engineering, 2012,20(7): 1469-1474 DOI： 10.3788/OPE.20122007.1469.

摘要

搭建了适于镜头中光学表面间距测量的实验装置

用于非接触高精度测量镜面间距。该装置以光纤型时域光学相干层析系统为基础

通过光学表面的层析成像精确测量其相对位置。对样品扫描装置进行了改进

利用高精度导轨移动光纤准直器来移动成像范围

实现对不同深度光学表面的层析成像。利用实验测量系统完成了对空气间隙样品及已装调好镜头的光学表面间距的测量

其中空气间隙样品的测量值为6.026 mm

用游标卡尺得到的对比测量值为6.02 mm;对镜头关键参数空气间隙的测量值为10.750 mm

其设计值为(10.7±0.03) mm。实验系统误差为3.871 μm

测量灵敏度为10.5 μm。结果显示该方法具有非接触、高精度、高灵敏度的特点。

Abstract

A measuring system based on optical coherence tomography was established to measure the distance of optical surfaces non-contactly. The system was developed by modifying the sample scanning device based on a time-domain optical coherence tomographic system. The tomographic images of optical surfaces in different depths were acquired by moving the fiber collimator in sample arm through a high precision guide. The distance of an air gap sample and a lens were measured by using this system. Results show that the measured value of air gap sample is 6.026 mm while it is 6.02 mm by using a vernier caliper. Furthermore

the measured value of air gap in the lens is 10.750 mm while its design value is (10.7±0.03) mm .The systematic error is 3.871 μm and the sensitivity is 10.5 μm. The measurement method is characterized by non-contact

high precision

and high sensitivity

and has great potential in optical material testing.

关键词

Keywords

references

HUANG D, SWANSON E A, LIN C P, et al.. Optical coherence tomography[J]. Science, 1991, 254(22):1178-1181.

史国华,丁志华,戴云,等. 光纤型光学相干层析技术系统的眼科成像 [J].中国激光,2008,35(9):1429-1431. SHI G H, DING ZH H ,DAI Y, et al.. Ophthalmic imaging by optical coherence tomography[J]. Chinese Journal of Lasers, 2008,35(9):1429-1431. (in Chinese)

曾楠,何永红,马辉. 用于玉石结构分析的光学相干层析技术 [J].光学精密工程,2008,16(7):1335-1342. ZENG N, HE Y H, MA H. Imaging and analyzing subsurface morphologies of jade objects with optical coherence tomography[J]. Optics and Precision Engineering, 2008,16(7):1335-1342. (in Chinese)

SORIN W V, GRAY D F. Simultaneous thickness and group index measurement using optical low-coherence reflectometry[J]. IEEE Photonics Technology Letters, 1992,4(1):105-107.

HARUNA M, OHMI M, MITSUYAMA T, et al.. Simultaneous measurement of the phase and group indices and the thickness of transparent plates by low-coherence interferometry[J]. Optics Letters, 1998, 23(12):966-968.

史国华, 饶学军,丁志华,等. 基于光学相干层析技术的光学表面间距测量方法 [J]. 中国激光,2009,36(2):210-214. SHI G H, RAO X J, DING ZH H, et al.. Distance measurement of optical surface based on optical coherence tomography[J]. Chinese Journal of Lasers,2009,36(2):210-214. (in Chinese)

TEARNEY G J, BOUMA B E, FUJIMOTO J G. High-speed phase-and group-delay scanning with a grating-based phase control delay line[J]. Optics Letters,1997,22(23):1811-1813.

杨亚良,丁志华,俞晓峰,等. OCT系统中基于快速扫描光学延迟线的色散补偿 [J].光子学报,2008,37(1):21-24. YANG Y L, DING ZH H, YU X F, et al.. Dispersion compensation in OCT system by rapid scanning optical delay line [J]. Acta Photonica Sinica, 2008,37(1):21-24. (in Chinese)

李晖,谢树森,陆祖康. 色散、群速与群折射率 [J].光子学报,1999,28(12):1075-1078. LI H, XIE SH S, LU ZH K. Dispersive,group velocity and refractive index[J]. Acta Photonica Sinica, 1999,28(12):1075-1078. (in Chinese)

浏览量

213

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

用于Mach-Zehnder干涉仪的双向双阈值条纹计数方案

光学表面冗余粒子在离轴及斜入射高斯波束作用下的辐射力

谱域光学相干层析成像量化技术及其在生物组织定量分析中的应用

双Mach-Zehnder光纤干涉传感系统中的偏振衰落控制