微装配正交精确对准系统的设计

唐永龙; 张之敬; 张晓峰; 孙媛

doi:10.3788/OPE.20122007.1542

您当前的位置：

首页 >

文章列表页 >

微装配正交精确对准系统的设计

微纳技术与精密机械 | 更新时间：2020-08-12

- 微装配正交精确对准系统的设计
- Design of precise alignment orthogonal system used in micro-assembly
- 光学精密工程 2012年20卷第7期页码：1542-1550
- 作者机构：
  
  北京理工大学机械与车辆学院北京,100081
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.51127004)();国家部委基金资助项目(No.0920110013)()
- DOI：10.3788/OPE.20122007.1542
  中图分类号： TH741.14;TP242.6
- 收稿日期：2012-04-03，
  
  修回日期：2012-05-17，
  
  网络出版日期：2012-07-10，
  
  纸质出版日期：2012-07-10
- 稿件说明：
移动端阅览
唐永龙, 张之敬, 张晓峰, 孙媛. 微装配正交精确对准系统的设计[J]. 光学精密工程, 2012,20(7): 1542-1550

TANG Yong-long, ZHANG Zhi-jing, ZHANG Xiao-feng, SUN Yuan. Design of precise alignment orthogonal system used in micro-assembly[J]. Editorial Office of Optics and Precision Engineering, 2012,20(7): 1542-1550
唐永龙, 张之敬, 张晓峰, 孙媛. 微装配正交精确对准系统的设计[J]. 光学精密工程, 2012,20(7): 1542-1550 DOI： 10.3788/OPE.20122007.1542.

TANG Yong-long, ZHANG Zhi-jing, ZHANG Xiao-feng, SUN Yuan. Design of precise alignment orthogonal system used in micro-assembly[J]. Editorial Office of Optics and Precision Engineering, 2012,20(7): 1542-1550 DOI： 10.3788/OPE.20122007.1542.

摘要

针对平板类零件微装配系统设计过程中面临的问题

提出采用正交光学对准机构来实现用人机协同的微装配系统对微小型平板类结构件的高精度装配

并分析计算高精度对准机构模块产生的误差。建立了基于显微机器视觉及正交光学对准的微装配系统平台

用本文提出的方法进行了微装配实验

结果显示本装配系统在装配的一致性与装配效率方面有较大的改善与提高。提出的光学对准方法可有效地用于平板结构的硅微MEMS器件和非硅MEMS器件等集成的复杂微小型异构机电系统的装配

设计的平台具有很好的开放性和可移植性。棱镜正交对准机构产生0.001°的角度误差时

对准理论偏差小于0.98 μm

实际实验中微装配平台系统装配精度小于5 μm

满足平板类微小型结构件装配一般精度需求。

Abstract

For the problems in the design of a flat part micro-assembly system

an orthogonal optical alignment mechanism was proposed to realize high-precision assembly of the miniature flat class structure by a man-machine cooperation micro-assembly system

and the error of high-precision alignment mechanism module was analyzed and calculated. Then

a micro-assembly system platform based on the microscopic machine vision and orthogonal optical alignment was established

and the micro-assembly experiments by proposed method were carried out. The optical alignment method proposed was effectively used in the assembly of integrated and complex micro heterogeneous electromechanical system such as the flat structures of silicon micro-MEMS devices and non-silicon MEMS devices. The results show that the consistency and efficiency of the micro-assembly are improved and enhanced greatly

and the designed platform has good openness and portability. When the prism orthogonal alignment mechanism produces the error of 0.001°

the theoretical deviation is less than 0.98 μm and the assembly accuracy of the actual experimental micro-assembly platform is less than 5 μm.The precision meets the general assembling accuracy requirements of the miniature flat class structure.

关键词

Keywords

references

李江昊. 基于毫米级移动微机器人的微装配系统运动控制与路径规划研究 .上海:上海交通大学,2009. LI J H.Motion Control and Path Planning for Millimeter Size Mobile Microrobot Based Microassembly System .Shanghai: Shanghai Jiao Tong University ,2009.(in Chinese)

Workshop on Micro/Meso Mechanical Manufacturing . Evanston, llinois, USA: Northwestern University,2000.

BROWNE J. MEMS devices emerge at 2002 seattle MTT-S . Microwave & RF,2002,41(8):33-42.

FINEPLACER System Flip Chip Bonding . http://www.finetech.com/.

陈伟明,杨维全,胡松,等. 对准标记处理的改进亚像素细分定位算法 [J].微细加工技术,2001,(3):56-59. CHEN W M,YANG W Q,HU S,et al.. Developed sub-pexel fine positioning alogrithm for image processing of alignment mark[J].Microfabrication Technology, 2001,(3):56-59. (in Chinese)

夏奇,周明才,王宏昇,等. 高精度自动贴片机视觉对准系统及其图像处理 [J].光学技术,2004,30(2):146-149. XIA Q, ZHOU M C, WANG H SH,et al.. Vision alignment system in automatic high precision chip mounter and its image processing[J].Optical Technique, 2004,30(2):146-149. (in Chinese)

李玉和,刘志峰.微系统自动化装配技术[M]. 北京:电子工业出版社 ,2008. LI Y H,LIU ZH F.Micro-system assembly atuomation technology[M].Beijing:Electronics Industry Press,2008.

徐征,王晓东,程新宇,等. 基于机器视觉的微装配控制策略及软件架构 [J].光学精密工程,2009,17(4):819-822. XU ZH,WANG X D,CHENG X Y,et al.. Control tactics and software architectures for micro-assembly based on machine vision[J].Opt. Precision Eng.,2009,17(4):819-822.(in Chinese)

叶鑫,张之敬,孙媛,等. 集成微力检测与反馈的双晶片微夹持器 [J].兵工学报,2009,30(9):1242-1247. YE X,ZHANG ZH J,SUN Y,et al.. A bimorph piezoelectric ceramic microgripper integration micro-force detecting and feedback[J].Acta Armamentrii,2009,30(9):1242-1247.(in Chinese)

张之敬,王强,叶鑫,等. 等一种用于微小型结构件的自动对位装配系统:中国, CN101972928A .2011-02-16. ZHANG ZH J,WANG Q,YE X,et al.. An auto-aligment system used in microstructure assembly:China, CN101972928A .2011-2-16.(in Chinese)

张之敬,杜芳,金鑫,等. 微小尺寸零件复杂边缘识别算法[J].光学精密工程,2009,17(2):356-361. ZHANG ZH J,DU F,JIN X,et al.. Complex edge recognition algorithm of micro-accessory[J].Opt. Precision Eng., 2009,17(2):356-361.(in Chinese)

张之敬,杜芳,金鑫,等. 基于不同加工工艺的微小型零件结构件边缘识别 [J].纳米技术与精密工程,2008,6(5):362-366. ZHANG ZH J,DU F,JIN X,et al.. Edge detection of micro accessory based on different machining process[J].Nanotechnology and Precision Engineering,2008,6(5):362-366.(in Chinese)

张林,张之敬,杜芳,金鑫. 基于工艺匹配的微小型结构件边缘检测方法 [J].北京理工大学学报,2009,29(12):1063-1066. ZHANG L,ZHANG ZH J,DU F,et al.. Processin matching principle for edge detection method of micro parts[J].Transations of Beijing Institute of Technology,2009,29(12):1063-1066.(in Chinese)

王仲,操晶晶,张立昆,等. 基于图像的轮廓测量与评定 [J]. 光学精密工程,2009,17(2):395-401. WANG ZH, CAO J J, ZHANG L K, et al.. Measurement and evaluation for profile tolerance based on images[J]. Opt. Precision Eng.,2010,18(6):395-401.(in Chinese)

陈立国,王明月,杨治亮,等. 显微视觉快速自动调焦方法及实验 [J].光学精密工程,2010,18(6):1361-1365. CHEN L G, WANG M Y, YANG ZH L, et al.. Fast autofocus method for microscopic computer vision[J]. Opt. Precision Eng., 2010,18(6):1361-1365.(in Chinese)

浏览量

125

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

微颗粒的三维空间跨尺度装配方法

面向显微视觉的端对端去模糊模型

基于形变检测的弱微零件过盈装配控制

显微视觉自动聚焦及控制策略

基于柔性解耦梁和显微视觉的精密同轴定位系统