应用双摆动技术加工离轴碳化硅反射镜

李俊峰; 宋淑梅

doi:10.3788/OPE.20122008.1669

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应用双摆动技术加工离轴碳化硅反射镜

现代应用光学 | 更新时间：2020-08-12

- 应用双摆动技术加工离轴碳化硅反射镜
- Manufacture of SiC off-axis aspheric mirrors by double-swing method
- 光学精密工程 2012年20卷第8期页码：1669-1675
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所光学系统先进制造技术重点实验室,吉林长春,130033
- 作者简介：
- 基金信息：
  
  国家863高技术研究发展计划资助项目(No.2007AA12Z113)();科技部国际合作项目(No.2011DFA50590)()
- DOI：10.3788/OPE.20122008.1669
  中图分类号： TH703;TN305.2
- 收稿日期：2012-03-21，
  
  修回日期：2012-04-17，
  
  纸质出版日期：2012-08-10
- 稿件说明：
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李俊峰, 宋淑梅. 应用双摆动技术加工离轴碳化硅反射镜[J]. 光学精密工程, 2012,(8): 1669-1675

LI Jun-feng, SONG Shu-mei. Manufacture of SiC off-axis aspheric mirrors by double-swing method[J]. Editorial Office of Optics and Precision Engineering, 2012,(8): 1669-1675
李俊峰, 宋淑梅. 应用双摆动技术加工离轴碳化硅反射镜[J]. 光学精密工程, 2012,(8): 1669-1675 DOI： 10.3788/OPE.20122008.1669.

LI Jun-feng, SONG Shu-mei. Manufacture of SiC off-axis aspheric mirrors by double-swing method[J]. Editorial Office of Optics and Precision Engineering, 2012,(8): 1669-1675 DOI： 10.3788/OPE.20122008.1669.

摘要

研究了用双摆动技术抛光离轴非球面的工艺。介绍了用双摆动抛光加工离轴非球面的原理

分析了双摆动抛光过程中抛光盘与工件的相对运动特性及各个工艺参数对相对运动路径的影响。建立了双摆动抛光运动的数学模型

进行了计算机仿真

并对不同参数下的仿真结果进行了比较。给出了抛光模形状模型

实验验证了不同形状抛光模的材料去除特性。应用双摆动技术加工了一个224 mm×108 mm离轴碳化硅反射镜

结果显示:应用该技术加工离轴非球面镜可以有效抑制光学表面中频误差

具有较高的材料去除效率

面形精度可以稳定达到λ/30(rms

@633 nm)。因此

双摆动抛光技术的研究有助于推动离轴非球面制造技术的发展。

Abstract

The polishing principle of Double-Swing Method (DSM) was introduced

the relative movement characteristic between polishing lap and workpiece was analyzed

and the influence of polishing parameters on the relative movement was discussed. A mathematical model of the DSM in a movement state was established and its movement was simulated in a programming language. Then

simulation effects under different parameters was compared. The shape model of the polishing lap was presented

and the material removal character of the polishing lap with diffident shapes was verified.Finally

a rectangle off-axis aspheric mirror in a size of 224 mm×108 mm was polished by the DSM. The experiment result shows that to manufacture the off-axis aspheric mirror by the DSM can control the middle-frequency error and can obtain high working efficiency

and the surface precision is about λ/30 (rms

@633nm). Therefore

the DSM benefits the development of the manufacture technique for off-axis aspheric mirrors.

关键词

Keywords

references

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