陶瓷微热板阵列式可燃气体传感器

薛严冰; 唐祯安

doi:10.3788/OPE.20122010.2200

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陶瓷微热板阵列式可燃气体传感器

微纳技术与精密机械 | 更新时间：2020-08-12

- 陶瓷微热板阵列式可燃气体传感器
- Gas sensor array based on ceramic micro-hotplate for flammable gas detection
- 光学精密工程 2012年20卷第10期页码：2200-2206
- 作者机构：
  
  1. 大连交通大学电气信息学院,辽宁大连,116028
  2. 大连理工大学电子科学与技术学院,辽宁大连,116024
- 作者简介：
- 基金信息：
  
  国家自然科学基金重大项目(No.61131004)();辽宁省企为博士后项目(No.94392)()
- DOI：10.3788/OPE.20122010.2200
  中图分类号： TP212.1
- 收稿日期：2012-05-23，
  
  修回日期：2012-07-01，
  
  纸质出版日期：2012-10-10
- 稿件说明：
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薛严冰, 唐祯安. 陶瓷微热板阵列式可燃气体传感器[J]. 光学精密工程, 2012,20(10): 2200-2206

XUE Yan-bing, TANG Zhen-an. Gas sensor array based on ceramic micro-hotplate for flammable gas detection[J]. Editorial Office of Optics and Precision Engineering, 2012,20(10): 2200-2206
薛严冰, 唐祯安. 陶瓷微热板阵列式可燃气体传感器[J]. 光学精密工程, 2012,20(10): 2200-2206 DOI： 10.3788/OPE.20122010.2200.

XUE Yan-bing, TANG Zhen-an. Gas sensor array based on ceramic micro-hotplate for flammable gas detection[J]. Editorial Office of Optics and Precision Engineering, 2012,20(10): 2200-2206 DOI： 10.3788/OPE.20122010.2200.

摘要

设计了基于陶瓷基底的悬桥式微热板结构以解决硅微热板高温稳定性差的问题。分析了微热板的传热过程

并通过有限元工具对其稳态热响应特性及微加热器电极结构进行了模拟。采用常规微电子技术结合激光微加工技术

实际制作了基底厚度为100

桥宽度为2 mm的微结构

并对结构的加热功率-温度关系进行了测试。结果表明:热板具有较好的高温稳定性

1.5 W加热功率可使板上平均温度达到630℃。将桥式微热板作为阵列传感器的加热平台

Pd掺杂原子数百分比为0.2%和10%的SnO

纳米材料分别作为阵列中两只传感器的敏感膜材料

设计并制作了阵列式气体传感器。传感器在恒电压加热方式下可实现CO或CH

单一模式气体检测;阵列传感器在高、低温脉冲电压加热模式下可实现对CO和CH

两种混合气体的定量检测。

Abstract

A ceramic hotplate with the structure of suspending bridge was designed to improve the thermal stability of silicon micro hotplates. The heat transfer process of the hotplate was analyzed and the characteristics of steady-state thermal response and the electrode structure of a heater were simulated by using the finite element method. Combined the conventional microelectronic technology and laser micro processing technology

the microstructures with thickness of 100

m and bridge width of 2 mm were produced actually and the property of power assumption verses the temperature was measured. The results show that the hotplate has good stability at high temperature

and the average temperature on the ceramic hot-plate can reach 630℃ when a 1.5 W heating power is applied.By taking the ceramic hotplate as heating platform and nano-scale SnO

materials with Pd doping concentration of 0.2% and 10%(atom number percentage) as sensitive membrane materials

respectively

the array with two sensors was designed and fabricated.Experiments show that when the sensor array works in the constant voltage heating mode

it can be used as a single sensor with good response to CO or CH

gases. When the sensor array works at pulse voltage heating mode with alternating high or low working temperatures

it can realize quantitative detection for mixed gases of CO and CH

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Keywords

references

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