非偏振分光镜对干涉式椭偏仪测量精度的影响

邓元龙; 李学金; 耿优福; 洪学明

doi:10.3788/OPE.20122011.2373

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非偏振分光镜对干涉式椭偏仪测量精度的影响

现代应用光学 | 更新时间：2020-08-12

- 非偏振分光镜对干涉式椭偏仪测量精度的影响
- Influence of nonpolarizing beam splitters on measurement accuracy in interferometric ellipsometers
- 光学精密工程 2012年20卷第11期页码：2373-2379
- 作者机构：
  
  1. 深圳大学机电与控制工程学院,广东深圳,518060
  2. 深圳市传感器技术重点实验室,广东深圳 518060
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.60978041)();深圳市科技配套资助项目(No.ZYC201006090091A)()
- DOI：10.3788/OPE.20122011.2373
  中图分类号： O484.5;TH744.3
- 收稿日期：2012-06-01，
  
  修回日期：2012-07-17，
  
  纸质出版日期：2012-11-10
- 稿件说明：
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邓元龙, 李学金, 耿优福, 洪学明. 非偏振分光镜对干涉式椭偏仪测量精度的影响[J]. 光学精密工程, 2012,20(11): 2373-2379

DENG Yuan-long, LI Xue-jin, GENG You-fu, HONG Xue-ming. Influence of nonpolarizing beam splitters on measurement accuracy in interferometric ellipsometers[J]. Editorial Office of Optics and Precision Engineering, 2012,20(11): 2373-2379
邓元龙, 李学金, 耿优福, 洪学明. 非偏振分光镜对干涉式椭偏仪测量精度的影响[J]. 光学精密工程, 2012,20(11): 2373-2379 DOI： 10.3788/OPE.20122011.2373.

DENG Yuan-long, LI Xue-jin, GENG You-fu, HONG Xue-ming. Influence of nonpolarizing beam splitters on measurement accuracy in interferometric ellipsometers[J]. Editorial Office of Optics and Precision Engineering, 2012,20(11): 2373-2379 DOI： 10.3788/OPE.20122011.2373.

摘要

提出了一种新型激光外差干涉椭偏测量术用于实现纳米级精度的薄膜厚度测量。采用偏振光p和s分量透射比、反射比、反射相移、透射相移共同表征非偏振分光镜(NPBS)的退偏效应

建立了相应的误差模型

从而研究了多层介质膜NPBS的退偏效应和方位角对椭偏参数误差的影响。研究结果表明

由环境温度、入射角和光束偏振态的变化引起的NPBS退偏参数的漂移对椭偏测量精度影响很大

且无法通过标定来降低。为实现纳米级测量精度

NPBS的对准误差需要控制在0.1以内。相对而言

用于合光的NPBS方位角误差对测量精度影响较大

NPBS所导致的膜厚测量总误差约为1.8~2.5 nm

说明NPBS是马赫曾德尔干涉式椭偏仪的一个不可忽视的误差源。

Abstract

A novel heterodyne interferometric ellipsometer was investigated to measure the thicknesses of thin films in the nanometer-accuracy. The depolarization effect of a Nonpolarizing Beam Splitter (NPBS) was characterized by the transmission-induced-retardance (TIR) between p and s components of a polarizing beam

reflectance ratio

transmittance ratio and reflection-induced-retardance (RIR)

then a corresponding error model was established. The influence of the depolarization effect and misorientation of a multi-layer dielectric NPBS on the errors of ellipsometric parameters was investigated. Experimental results indicate that the fluctuation of the depolarization effect caused by the environmental temperatures

incident angles and the change of polarizating state has a major impact on the measurement accuracy

and it can not be eliminated by calibration. In order to implement the nanometer-accuracy

the misorientation angle must be smaller than 0.1. Furthermore

it shows that the NPBS orientation angle errors for recombination of the measurement light and the reference light have more important contribution than another ones to the measurement accuracy. The thickness measurement error of thin film induced by NPBS is about 1.8-2.5 nm

which means that the NPBS is an assignable error source in the Mach-Zehnder interferometric ellipsometer.

关键词

Keywords

references

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