衍射光栅刻划机的闭环控制系统

蔡锦达; 王英; 颜廷萌; 秦绪祥; 王亮

doi:10.3788/OPE.20122011.2416

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衍射光栅刻划机的闭环控制系统

微纳技术与精密机械 | 更新时间：2020-08-12

- 衍射光栅刻划机的闭环控制系统
- Closed-loop control system for diffraction grating ruling machine
- 光学精密工程 2012年20卷第11期页码：2416-2423
- 作者机构：
  
  1. 上海理工大学机械工程学院上海,200093
  2. 大连理工大学机械工程学院,辽宁大连,116024
- 作者简介：
- 基金信息：
  
  2012国家重大科学仪器设备开发专项资助项目(No.2011YQ150040)();2011年上海市重大技术装备研制专项资助项目2B-ZB (No.ZB-ZBYZ-03
- DOI：10.3788/OPE.20122011.2416
  中图分类号： TG63;O436.1
- 收稿日期：2012-05-21，
  
  修回日期：2012-07-02，
  
  纸质出版日期：2012-11-10
- 稿件说明：
移动端阅览
蔡锦达, 王英, 颜廷萌, 秦绪祥, 王亮. 衍射光栅刻划机的闭环控制系统[J]. 光学精密工程, 2012,20(11): 2416-2423

CAI Jin-da, WANG Ying, YAN Ting-meng, QIN Xu-xiang, WANG Liang. Closed-loop control system for diffraction grating ruling machine[J]. Editorial Office of Optics and Precision Engineering, 2012,20(11): 2416-2423
蔡锦达, 王英, 颜廷萌, 秦绪祥, 王亮. 衍射光栅刻划机的闭环控制系统[J]. 光学精密工程, 2012,20(11): 2416-2423 DOI： 10.3788/OPE.20122011.2416.

CAI Jin-da, WANG Ying, YAN Ting-meng, QIN Xu-xiang, WANG Liang. Closed-loop control system for diffraction grating ruling machine[J]. Editorial Office of Optics and Precision Engineering, 2012,20(11): 2416-2423 DOI： 10.3788/OPE.20122011.2416.

摘要

以S3C2440A为控制核心

设计了衍射光栅刻划机的高精度运动控制系统

实现了现场显示、实时控制等功能。用S3C2440A微控制器控制伺服电机和步进电机完成光栅刻划的分度运动和刻划运动

通过SiGNUM

RELM直线光栅尺反馈和PD加前馈控制算法补偿由于惯性等原因造成的分度误差

并用MATLAB对使用PD加前馈控制算法的分度运动进行仿真。采用RON225增量式角度编码器反馈以补偿执行刻划运动的步进电机因失步造成的误差

通过分析和处理实验数据获得分度运动最佳速度和伺服电机在此分度运动速度下停止时的过冲距离。最后

对可能产生控制误差的原因进行了初步分析

并提出了需要进一步改进和完善之处。

Abstract

The high accurate control system for a diffraction grating ruling machine was designed by taking the S3C2440A as a control core to implement the real-time shows

real-time control and other functions. The S3C2440A micro controller was used to control a servo motor and a stepping motor to complete the indexing movement and the ruling movement of the grating ruling

the SiGNUM

RELM straight line grating' feedback and PD plus feedforward control algorithm were taken to compensate the index error caused by the inertia and other reasons

then the indexing movement using PD plus feedforward control algorithm was simulated by MATLAB. Furthermore

the error caused by the out-of-step of stepping motor was compensated by the feedback of a RON225 incremental angle encoder

and the best speed of the indexing movement and the overshoot distance of the servo motor when it stopped were collected by the analysis and the process of the experimental data. Finally

the analysis on the controlling error was introduced

and how to improve the system in further was put forward.

关键词

Keywords

references

谢品,倪争技,黄元申,等. 中阶梯光栅的应用研究进展[J]. 激光杂志,2009,30(2): 4-6. XIE P, NI ZH J, HUANG Y SH, et al.. Application research progress in the echelle grating[J]. Laser Journal, 2009, 30(2): 4-6. (in Chinese)[2] 赵博,郝徳阜. 用拼接法获取大面积衍射光栅[J]. 光学精密工程,2000,8(5):503-507. ZHAO B, HAO D F. Manufacturing large-size grating by mosaic way [J]. Opt. Precision Eng., 2000, 8(5): 503-507. (in Chinese)[3] 赵博,齐向东. 高效平面全息衍射光栅的获取方法[J]. 光学精密工程,2001,9(2):109-114. ZHAO B, QI X D. Manufacturing of high efficient holographic diffraction gratings [J]. Opt. Precision Eng., 2001, 9(2): 109-114. (in Chinese)[4] 赵复垣. 刻划阶梯光栅的原理和应用特性[J]. 光谱学与光谱分析,1993,13(3): 101-107. ZHAO F Y. The principle and characters for applying of echelle [J].Spectroscopy and Spectral Analysis, 1993, 13(3): 101-107. (in Chinese)[5] 时轮,郝徳阜,齐向东. 高精度的光电式衍射光栅刻划机[J]. 仪器仪表学报,2001,22(4): 103-104. SHI L, HAO D F, QI X D. High precision photoelectric diffration grating ruling engine [J]. Chinese Journal of Scientific Instrument, 2001, 22(4): 103-104. (in Chinese)[6] 刘栋材,申远,钟俊,等. 大型衍射光栅刻划机控制系统研究[J]. 中国科学技术大学学报,2011,41(6): 560-564. LIU D C, SHEN Y, ZHONG J, et al.. Research on the controlling system of a grating ruling engine [J].Journal of University of Science and Technology of China, 2011, 41(6): 560-564. (in Chinese)[7] 王晓琳,杨厚民,郭杜,等. 衍射光栅刻划机的高精度开环定位系统[J]. 仪器仪表学报,1999,20(1): 63-67. WANG X L, YANG H M, GUO D, et al.. A high precision open-loop control positioning system for a diffraction grating ruling machine [J]. Chinese Journal of Scientific Instrument, 1999,20(1): 63-67.(in Chinese)[8] 徐向东,刘正坤,邱克强,等. 用于1 m Seya－Namioka单色仪的1200lp/mm Laminar光栅[J]. 光学精密工程,2012,20(1):1-8. XU X D, LIU ZH K,QIU K Q, et al.. Fabrication of 1 200 lp/mm Laminar gratings for 1 m Seya-Namioka monochromator at NSRL [J]. Opt. Precision Eng., 2012, 20(1): 1-8. (in Chinese)[9] 冯其波,谢芳,张斌,等. 光学测量技术与应用 [M].北京:清华大学出版社,2008. FENG Q B,XIE F,ZHANG B, et al..Optical Measurement Techniques and Applications[M]. Beijing: Tsinghua University Press, 2008. (in Chinese)[10] 方涌奎. 旋转型编码器的应用[J]. 精密制造与自动化,2009,2: 35-59. FANG Y K. Application of rotary encoder[J]. Precise Manufacturing & Automation, 2009,2: 35-59.(in Chinese)[11] 杨原青,刘卫东,李乐. 基于自适应模糊 PID算法的切纸机伺服控制器设计[J]. 微特电机,2010,3: 55-58. YANG Y Q, LIU W D, LI L. Design of guillotine servo controller based on fuzzy PID algorithm [J]. Small & Special Electrical Machines, 2010,3: 55-58.(in Chinese)[12] 刘金琨. 先进PID控制及其 MATLAB仿真 [M]. 北京:电子工业出版社,2003. LIU J K.Advanced PID Control MATLAB [M]. Beijing: Publishing House of Electronics Industry, 2003. (in Chinese)[13] 时轮,马春翔,胡德金,等. 制作高密度衍射光栅的光电式刻划控制的研究[J]. 光学技术,2004,30(3):340-342. SHI L, MA CH X, HU D J, et al.. Study of the photoelectric ruling control on the fabricating of the high density diffraction grating[J]. Optical Technique, 2004, 30(3): 340-342.(in Chinese)

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