基准圆光栅偏心检测及测角误差补偿

艾晨光; 褚明; 孙汉旭; 张延恒; 叶平

doi:10.3788/OPE.20122011.2479

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基准圆光栅偏心检测及测角误差补偿

微纳技术与精密机械 | 更新时间：2020-08-12

- 基准圆光栅偏心检测及测角误差补偿
- Eccentric testing of benchmark circular grating and compensation of angular error
- 光学精密工程 2012年20卷第11期页码：2479-2484
- 作者机构：
  
  北京邮电大学自动化学院,北京 100876
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.61175080)();高等学校博士学科点专项科研基金资助项目(No.20110005120004)();中央高校基本科研业务费专项资金
- DOI：10.3788/OPE.20122011.2479
  中图分类号： O436.1;TB922
- 收稿日期：2012-07-26，
  
  修回日期：2012-08-30，
  
  纸质出版日期：2012-11-10
- 稿件说明：
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艾晨光, 褚明, 孙汉旭, 张延恒, 叶平. 基准圆光栅偏心检测及测角误差补偿[J]. 光学精密工程, 2012,20(11): 2479-2484

AI Chen-guang, CHU Ming, SUN Han-xu, ZHANG Yan-heng, YE Ping. Eccentric testing of benchmark circular grating and compensation of angular error[J]. Editorial Office of Optics and Precision Engineering, 2012,20(11): 2479-2484
艾晨光, 褚明, 孙汉旭, 张延恒, 叶平. 基准圆光栅偏心检测及测角误差补偿[J]. 光学精密工程, 2012,20(11): 2479-2484 DOI： 10.3788/OPE.20122011.2479.

AI Chen-guang, CHU Ming, SUN Han-xu, ZHANG Yan-heng, YE Ping. Eccentric testing of benchmark circular grating and compensation of angular error[J]. Editorial Office of Optics and Precision Engineering, 2012,20(11): 2479-2484 DOI： 10.3788/OPE.20122011.2479.

摘要

为了修正关节测试平台中由圆光栅安装偏心所产生的测量误差

建立了圆光栅偏心测角误差补偿模型并对安装偏心检测方法进行研究。首先

根据圆光栅测角与偏心参数间的几何关系

推导出圆光栅测量误差补偿模型。然后

描述了采用双读数头对比接收正弦信号间相位差

检测偏心参数的方法和原理; 通过合成信号的李萨茹图形

检测出关节测试平台内圆光栅的偏心距及偏心方向。最后

根据所推导的偏心测角误差补偿公式对测试系统进行修正。对比实验结果表明:修正后的圆光栅测角精度大幅提高

测量精度提高了近5倍

满足关节测试平台的测量精度要求。

Abstract

To correct the measuring angle errors derived from the eccentricity of installing a circular grating in a manipulator joint test system

a model for compensation of grating measuring angle errors and the test method for installing eccentric errors are investigated. First

according to the relationship between angular error and eccentric parameters

the paper deduces the model of angular errors caused by install eccentricity. Then

it describes the method and principle to detect the grating eccentricity and eccentric direction by receiving phase errors of signals using two sensors in contrast. Based on the Lissajous plot generated by composite signals

the eccentric parameters of the grating in manipulator joint test system is measured. Finally

using the angle error formulas to compensate the measuring angle

the measuring system has been amended. The experiment shows that the amended angular accuracy has greatly improved

and the measurement accuracy is increased by nearly five times. It can satisfy the requirements of high accurate systems.

关键词

Keywords

references

韩彬. 柔性机械臂模块化测试系统的设计与实现.北京:北京邮电大学,2009. HAN B. Design and implementation of a modular test system for the flexible manipulator.Beijing: Beijing University of Post and Telecommunication,2009.(in Chinese)[2] 郭阳宽,李玉和,李庆祥,等. 运动偏心对圆光栅副测量的影响及误差补偿[J]. 清华大学学报(自然科学版),2005,45(2):178-181. GUO Y K, LI Y H, LI Q X, et al.. Error compensation for eccentric motions of circular gratings [J].Journal of Tsinghua University (Sci&Tech),2005,45(2):178-181.(in Chinese)[3] 于连栋,丁洋,程文涛. 平行双关节坐标测量机圆光栅测角误差补偿技术[J]. 南京理工大学学报(自然科学版), 2009, 33(5):659-662. YU L D,DING Y,CHENG W T. Compensation of angle measurement error of circular gratings for parallel dual-joint coordinate measuring machine[J].Journal of Nanjing University of Science and Technology(Natural& Science),2009, 33(5):659-662.(in Chinese)[4] 张礼松,管炳良. 关节坐标测量机研制中圆光栅误差修正技术[J]. 计测技术,2007,27(4):41-44. ZHANG L S, GUAN B L. Error correction and its application to multi-joint CMM research [J].Metrology & Measurement Technology, 2007,27(4):41-44.(in Chinese)[5] 王文,林铿,高贯斌,等. 关节臂式坐标测量机角度传感器偏心参数辨识[J]. 光学精密工程,2010, 18(1):135-134. WANG W, LIN K, GAO G B, et al.. Eccentricity parameter identification of angle sensors for articulated arm CMMs [J]. Opt. Precision Eng., 2010, 18 (1):135-141. (in Chinese)[6] 高贯斌,王文,林铿,等. 圆光栅角度传感器的误差补偿及参数辨识[J]. 光学精密工程,2010,18(8):1766-1772. GAO G B, WANG W, LIN K,et al.. Error compensation and parameter identification of circular grating angle sensors [J].Opt. Precision Eng.,2010, 18(8):1766-1772. (in Chinese)[7] 朱帆,吴易明,刘长春. 四读头法消除码盘偏心和振动对叠栅条纹相位测量的影响[J]. 光学学报, 2011,31(4):1-7. ZHU F, WU Y M, LIU CH CH. Eliminating influence of grating encoders eccentricity and vibration to moire fringes signal by four reading heads[J].Acta Optica Sinica,2011,31(4):1-7.(in Chinese)[8] NOBUMI H, YOSHIHISA S, HIDEAKI M. A method of improving the resolution and accuracy of rotary encoders using a code compensation technique [J]. IEEE Trans. on Instrumentation and Measurentm,1992,41(1):98-101.[9] 洪喜,续志军,杨宁. 基于径向基函数网络的光电编码器误差补偿法[J]. 光学精密工程,2008,16(4):598-604. HONG X, XU ZH J, YANG N. Error compensation of optical encoder based on RBF network [J]. Opt. Precision Eng., 2008,16(4):598-604.(in Chinese)[10] PORTMAN V, PESCHANSKY B. Phase-statistical method and device for high precise and high-efficiency angular measurements[J].Precision Engineering, 2001,25(4): 309-315.

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