超精密车削表面微观形貌对光学特性影响研究

黄昆涛; 宫虎; 房丰洲

doi:10.3788/OPE.20132101.0077

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超精密车削表面微观形貌对光学特性影响研究

微纳技术与精密机械 | 更新时间：2020-08-12

- 超精密车削表面微观形貌对光学特性影响研究
- Study on the optical characteristics of the surface microscopic topology generated by ultra-precision turning
- 光学精密工程 2013年21卷第1期页码：101-107
- 作者机构：
  
  天津大学精密仪器与光电子工程学院精密测试技术及仪器国家重点实验室
- 作者简介：
- 基金信息：
  
  国家重点基础研究发展计划(2015CB857100)
- DOI：10.3788/OPE.20132101.0077
  中图分类号：
- 收稿日期：2012-07-17，
  
  修回日期：2012-09-11，
  
  网络出版日期：2013-01-24，
  
  纸质出版日期：2013-01-15
- 稿件说明：
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黄昆涛宫虎房丰洲. 超精密车削表面微观形貌对光学特性影响研究[J]. 光学精密工程, 2013,21(1): 101-107

HUANG Kun-tao GONG Hu FANG Feng-zhou. Study on the optical characteristics of the surface microscopic topology generated by ultra-precision turning[J]. Editorial Office of Optics and Precision Engineering, 2013,21(1): 101-107
黄昆涛宫虎房丰洲. 超精密车削表面微观形貌对光学特性影响研究[J]. 光学精密工程, 2013,21(1): 101-107 DOI： 10.3788/OPE.20132101.0077.

HUANG Kun-tao GONG Hu FANG Feng-zhou. Study on the optical characteristics of the surface microscopic topology generated by ultra-precision turning[J]. Editorial Office of Optics and Precision Engineering, 2013,21(1): 101-107 DOI： 10.3788/OPE.20132101.0077.

摘要

为了给超精密车削加工表面的光学性能评价提供参考，指导实际加工过程的优化，本文对表面形貌和其光学性能之间的关系进行深入研究。对于仅有理想刀痕的表面所产生的重影现象，采用阈值分析和粗糙度散射理论两方面进行分析。阈值分析是指先计算单段圆弧刀痕的散射特性，再根据周期性结构对光的调制性，可以求得加工出镜面对刀尖圆弧半径和进给率（主轴每转的进给距离）选择的大约临界值要求。在入射光波长500 nm的情况下，当刀尖圆弧半径选择500 um时，可以算得阈值进给率为19 um。粗糙度散射理论分析则是通过电场积分公式Stratton-Chu公式进行更精确的计算。最终得出结论，对于超精车加工得到的表面，当从入射光的非镜面方向，尤其是一极大散射方向观察不到光强时，则可以认为加工出了镜面效果。

Abstract

The ultra-precision single point diamond turning (SPDT) is widely used in recent years. In order to optimize SPDT parameters of machining reflectors and evaluate the optical characteristics of diamond turned surfaces microscopic topology

the relationship with the ultra-precision SPDT surface microscopic topology and the optical performance is discussed comprehensively. For surface microscopic topology generated by ideal tool

the phenomena of multiple images reflection is analyzed by both threshold analysis and roughness surface scattering theory. To conduct threshold analysis

the scattering of single arc tool mark is calculated

and with modulation of periodic tool mark structure

the approximate threshold tool nose radius and feedrate (feeding distance per spindle rotation) is calculated. In the situation that wavelength of incident light is 500 nm

tool nose radius is 500 um. The threshold feedrate is calculated 19 um. To conduct roughness scattering theory analysis

the calculation is more precise by using Electric Integral----Stratton-Chu Integral. Results show that when we cannot see the light in observing the turned surface with non-mirror direction

especially 1-order maximum direction

the surface can be seen mirror.

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references

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