硅微陀螺仪正交耦合系数的计算及验证

姜劭栋; 裘安萍; 施芹; 苏岩

doi:10.3788/OPE.20132101.0087

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硅微陀螺仪正交耦合系数的计算及验证

微纳技术与精密机械 | 更新时间：2020-08-12

- 硅微陀螺仪正交耦合系数的计算及验证
- Calculation and verification of quadrature coupling coefficients of silicon microgyroscope
- 光学精密工程 2013年21卷第1期页码：87-93
- 作者机构：
  
  南京理工大学机械工程学院,江苏南京,中国,210094
- 作者简介：
- 基金信息：
  
  国家高技术研究发展计划（863）汽车电子稳定程序（ESP）微传感器及系统()
- DOI：10.3788/OPE.20132101.0087
  中图分类号： U666;V241.5
- 收稿日期：2012-08-24，
  
  修回日期：2012-10-22，
  
  网络出版日期：2013-01-24，
  
  纸质出版日期：2013-01-15
- 稿件说明：
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姜劭栋裘安萍施芹苏岩. 硅微陀螺仪正交耦合系数的计算及验证[J]. 光学精密工程, 2013,21(1): 87-93

JIANG Shao-dong QIU An-ping SHI Qin SU Yan. Calculation and verification of quadrature coupling coefficients of silicon microgyroscope[J]. Editorial Office of Optics and Precision Engineering, 2013,21(1): 87-93
姜劭栋裘安萍施芹苏岩. 硅微陀螺仪正交耦合系数的计算及验证[J]. 光学精密工程, 2013,21(1): 87-93 DOI： 10.3788/OPE.20132101.0087.

JIANG Shao-dong QIU An-ping SHI Qin SU Yan. Calculation and verification of quadrature coupling coefficients of silicon microgyroscope[J]. Editorial Office of Optics and Precision Engineering, 2013,21(1): 87-93 DOI： 10.3788/OPE.20132101.0087.

摘要

硅微陀螺仪多采用微机械加工工艺制作，其加工的相对精度较低，从而易产生正交耦合误差，影响陀螺仪的输出。为了优化设计硅微陀螺仪结构，提高其性能，本文建立了陀螺仪正交耦合系数的理论分析模型。首先，利用能量方法推导陀螺仪驱动梁的面内刚度；然后，建立陀螺仪的刚度矩阵；最后，推导了正交耦合系数的理论计算公式。针对本课题组研制的双质量振动式硅微陀螺仪，理论计算出其直接耦合系数为4.7410

-5

，二次耦合系数为8.4410

-7

。得到的陀螺仪的正交耦合系数为4.7510

-5

，与仿真值相差8.7%。分析得到陀螺仪正交耦合系数的最大值为2.1810

-4

，与仿真值相差7.9%。最后，实验验证了计算结果的正确性。得到的结果表明，建立的正交耦合系数理论分析模型可为硅微陀螺仪的结构优化设计提供理论依据和实际指导。

Abstract

Silicon microgroscope is processed usually by microfabrication technology. It could lead to a quadrature coupling error and influence the output of the silicon microgyroscope for the lower relative accuracy from the fabrication processing. To optimize the structure of the silicon microgyroscope and enhance its performance

a theoretical model of quadrature coupling coefficients for the microgyroscope was established. Firstly

energy theorem was used to infer the in-plane stiffness of driving beam to set up the stiffness matrix of the microgyroscope. Then

the theoretical analysis model of quadrature coupling coefficients was established. According to a dual-mass vibrating silicon microgyroscope developed by our research group

the theoretical calculation shows that the direct coupling coefficient and the second-order coupling coefficient are 4.7410

-5

and 8.4410

-7

respectively

and the quadrature coupling coefficient of the developed microgyroscope is 4.7510

-5

8.7% different from the simulation value. Meanwhile

the analysis indicates that the maximum value of quadrature coupling coefficient is 2.1810

-4

7.9% different from the simulation value. Finally

the calculating result is confirmed by an experiment test. It concludes that the theoretical model of quadrature coupling coefficients can provide the theory foundation and application direction for improving the properties of silicon microgyroscopes.

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Keywords

references

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