激光共焦透镜曲率半径测量系统

邱丽荣; 李佳; 赵维谦; 杨佳苗

doi:10.3788/OPE.20132102.0246

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激光共焦透镜曲率半径测量系统

现代应用光学 | 更新时间：2020-08-12

- 激光共焦透镜曲率半径测量系统
- Laser confocal measurement system for curvature radii of lenses
- 光学精密工程 2013年21卷第2期页码：246-252
- 作者机构：
  
  北京理工大学光电学院北京,中国,100081
- 作者简介：
- 基金信息：
  
  国家重大科学仪器设备开发专项(2014YQ120351)
- DOI：10.3788/OPE.20132102.0246
  中图分类号： TH741
- 收稿日期：2012-10-11，
  
  修回日期：2012-12-03，
  
  网络出版日期：2013-02-23，
  
  纸质出版日期：2013-02-15
- 稿件说明：
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邱丽荣李佳赵维谦杨佳苗. 激光共焦透镜曲率半径测量系统[J]. 光学精密工程, 2013,21(2): 246-252

QIU Li-rong LI Jia ZHAO Wei-qian YANG Jia-miao. Laser confocal measurement system for curvature radii of lenses[J]. Editorial Office of Optics and Precision Engineering, 2013,21(2): 246-252
邱丽荣李佳赵维谦杨佳苗. 激光共焦透镜曲率半径测量系统[J]. 光学精密工程, 2013,21(2): 246-252 DOI： 10.3788/OPE.20132102.0246.

QIU Li-rong LI Jia ZHAO Wei-qian YANG Jia-miao. Laser confocal measurement system for curvature radii of lenses[J]. Editorial Office of Optics and Precision Engineering, 2013,21(2): 246-252 DOI： 10.3788/OPE.20132102.0246.

摘要

基于共焦技术独特的轴向层析定焦能力并结合气浮导轨平移台和激光干涉仪测长系统

研制了一套高精度、非接触激光共焦透镜曲率半径测量系统。该系统利用共焦轴向光强响应曲线的峰值点对应系统物镜聚焦焦点这一特性，使用峰值点对被测透镜的猫眼位置及共焦位置进行精确定位，并结合激光干涉仪获得透镜猫眼位置及共焦位置坐标值，从而计算得到透镜的曲率半径。系统由主控软件控制气浮导轨带动被测透镜在猫眼位置及共焦位置附近进行扫描测量，并实现信号采集和数据处理。实验表明，利用该系统测量透镜的曲率半径时，测量重复性优于2 μm，满足国内高精度透镜曲率半径测量的精度需求。该系统测量速度快、操作简便、结构简单且易于实现小型化。

Abstract

Combined an air bearing platform and a laser interferometer

a set of non-contact and high precision system for curvature radius measurements of lenses is developed based on the axial focusing of confocal technique. The developed system is characterized by that the peak point of the confocal axial intensive curve corresponds to the focus of an objective. On the characteristic

it identifies precisely the cat-eye and confocal positions of the test lens. Then it takes the laser interferometer to obtain the position coordinates of the cat-eye and confocal positions and calculates the curvature radius of the lens. Furthermore

the main control software drives an air bearing slider with a test lens to achieve the scanning measurement near the cat eye and confocal positions

and then acquires signals and processes data. Experimental results show that the measurement system has the reproducibility less than 2 μm， which meets the requirements of curvature radius measurement for high precision. The developed measurement system has the advantages of high test speed

easy operation

simple structure and easy to be miniaturized.

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references

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