用空间载频法测量玻璃平板的厚度均匀性

蔡怀宇; 李宏跃; 朱猛; 黄战华

doi:10.3788/OPE.20132102.0260

您当前的位置：

首页 >

文章列表页 >

用空间载频法测量玻璃平板的厚度均匀性

现代应用光学 | 更新时间：2020-08-12

- 用空间载频法测量玻璃平板的厚度均匀性
- Measurement of thickness uniformity for glass plate by spatial carrier
- 光学精密工程 2013年21卷第2期页码：260-266
- 作者机构：
  
  天津大学精密仪器与光电子工程学院光电信息技术教育部重点实验室(天津大学)
- 作者简介：
- 基金信息：
  
  高等学校博士点基金()
- DOI：10.3788/OPE.20132102.0260
  中图分类号： TB92;O436.1
- 收稿日期：2012-07-05，
  
  修回日期：2012-10-11，
  
  网络出版日期：2013-02-23，
  
  纸质出版日期：2013-02-15
- 稿件说明：
移动端阅览
蔡怀宇李宏跃朱猛黄战华. 用空间载频法测量玻璃平板的厚度均匀性[J]. 光学精密工程, 2013,21(2): 260-266

CAI Huai-Yu LI Hong-yue ZHU Meng HUANG Zhan-hua. Measurement of thickness uniformity for glass plate by spatial carrier[J]. Editorial Office of Optics and Precision Engineering, 2013,21(2): 260-266
蔡怀宇李宏跃朱猛黄战华. 用空间载频法测量玻璃平板的厚度均匀性[J]. 光学精密工程, 2013,21(2): 260-266 DOI： 10.3788/OPE.20132102.0260.

CAI Huai-Yu LI Hong-yue ZHU Meng HUANG Zhan-hua. Measurement of thickness uniformity for glass plate by spatial carrier[J]. Editorial Office of Optics and Precision Engineering, 2013,21(2): 260-266 DOI： 10.3788/OPE.20132102.0260.

摘要

设计了一种基于迈克耳逊干涉光路的相位测量系统，将单臂作为检测端完成了对玻璃平板厚度均匀性的直接测量和分析。该系统由CCD采集干涉图样，利用傅里叶变换条纹分析术和相位解包裹技术提取干涉图中所包含的待测相位信息;对于傅里叶变换法中频谱旁瓣中心无法准确定位的问题，采用三角变换法去载频，从而不需要准确地得知频谱旁瓣的中心位置就可以计算出相位结果，消除了人为估算和垂轴方向上的微小载频分量给测量结果带来的误差。实验测量了多块玻璃平板的厚度均匀性。测量结果显示：使用像元大小为4.65 μm×4.65 μm的CCD相机，测量玻璃平板两表面在长度方向和宽度方向上的厚度均匀性的理论精度分别达到0.93%和0.92%，表明本系统基本满足玻璃平板厚度均匀性测量的要求，且对干涉图频谱旁瓣的定位精度和载频的方向精度要求较低。

Abstract

On the basis of the Michelson interferometer

a phase interference measurement system with one single arm as the measurement output port was designed to measure and analyze the thickness uniformity of a glass plate. In the system

a CCD camera was used to collect the interference pattern and the Fourier transform fringe analysis and phase unwrapping techniques were used to extracted the phase information contained in the interference pattern. For the problem that the sidelobe center of Fourier transform spectrum could not be accurately located

an applicable triangular transformation method was proposed to extract the volume of phase change directly. With this approach

the phase results could be obtained more accurately without knowing the central location of the spectral sidelobe

meanwhile

the errors induced by man-made estimation and the small carrier frequency component in vertical axis were eliminated. The thickness uniformity of a group of glass plates was measured in both of the length and width directions. The experimental results show that the theoretical accuracy is 0.93% and 0.92% in two directions

respectively

when they measured by a CCD camera with a unit size of 4.65 μm×4.65 μm. The system can measure the thickness uniformity of the glass plates

and has lower demands for the location accuracy of frequency spectral sidelobe and the direction precision of carrier frequency.

关键词

Keywords

references

初国强，王子君，赵家民，等.氧离子辅助法沉积ITO透明导电膜的研究[J].光学精密工程，2001，9(2):169-173.CHU G Q, WANG Z J, ZHAO J M, et al.. Transparent conductive film (ITO) deposited by IAD [J]. Opt. Precision Eng., 2001,9(2):169-173. (in Chinese)[2]李维堤.ITO玻璃基板的平整度及测量[J].现代显示，1995，3(1)：14-17.LI W D. The flatness and measurement of ITO glass substrate [J]. Advanced Display, 1995, 3(1):14-17. (in Chinese)[3]孙艳，王昭，谭玉山.表面平整度测量的新方法研究[J].西安交通大学学报，2003，37(3): 314-317.SUN Y, WANG ZH, TAN Y SH. Research on new technology of surface roughness measurement [J]. J. Xi'an Jiaotong University, 2003, 37(3): 314-317. (in Chinese)[4]SHUKLA R P, UDUPA D V, DAS N C. Non-destructive thickness measurement of dichromated gelatin films deposited on glass plates [J]. Optics & Laser Technology, 2004, 38(7): 552-557. [5]闫坤.塑料薄膜厚度在线测量系统的设计[J].仪表技术与传感器，2011，2(1): 91-98.YAN K. Design of on-line measurement system of plastic film thickness [J]. Instrument Technique and Sensor, 2011,2(1):91-98. (in Chinese)[6]乔杨，张宁，徐熙平，等.基于共焦法的透镜厚度测量系统设计[J].仪器仪表学报，2011，32(7): 1635-1641. QIAO Y, ZHANG N, XU X P, et al.. Design of lens thickness measurement system based on confocal technology [J]. Chinese Journal of Scientific Instrument, 2011, 32(7): 1635-1641. (in Chinese) [7]RONCALLO S, PAINTER J, COUSINS M, et al.. A method to quantify the degree of uniformity of thickness of thin films [J]. Thin Solid Films, 2008,516(23): 8493-8497. [8]宋晨，吕岑，郭琪，等.一种激光外差多普勒玻璃厚度测量方法[J].光子学报，2008，37(8): 1635-1638. SONG CH, LU C, GUO Q, et al.. One method for measuring thickness of glass by using laser heterodyne and doppler [J]. Acta Photonica Sinica, 2008, 37(8): 1635-1638. (in Chinese) [9]姜宏志，赵慧洁，李旭东，等.用于强反射表面形貌测量的投影栅相位法[J].光学精密工程，2010，18(9): 2002-2008. JIANG H ZH, ZHAO H J, LI X D, et al.. Projected fringe profilometry for profile measurement of high reflective surface [J]. Opt. Precision Eng., 2010, 18(9): 2002-2008. (in Chinese) [10]贾大功，武立强，马彩缤，等.剪切散斑干涉术中剪切量的测量[J].光学精密工程，2012，20(2): 226-232. JIA D G, WU L Q, MA C B, et al.. Shear measurement of shearing speckle interferometry [J]. Opt. Precision Eng., 2012, 20(2): 226-232. (in Chinese) [11]何煦，马军.共光路径向剪切干涉仪的设计[J].光学精密工程，2011，19(9): 2029-2035. HE X, MA J. Design of common path radial shearing interferometer [J]. Opt. Precision Eng., 2011, 19(9): 2029-2035. (in Chinese) [12]BRAD K, JAMES M, JAMES W, et al.. Low coherence vibration insensitive fizeau interferometer [J]. SPIE, 2006, 6292: 62920F-1-F-12. [13]YOUICHI B. Digital phase-shifting interferometer with an electrically addressed liquid-crystal spatial light modulator[J]. Opt. Lett., 2003, 17(28):1576-1578. [14]HAGYONG K, SEUNG W K. Fiber-diffraction interferometer for vibration desensitization[J]. Opt. Lett., 2005, 16(30): 2059-2061. [15]DANIEL D A, FERNANDO M S, MANUEL H D T, et al.. Insect wing deformation measurements using high speed digital holographic interferometry [J]. Optics Express, 2010, 18(6): 5661-5667. [16]桂敏，匡登峰，方志良. 基于相位测量法测量透射式相位光栅的表面形貌[J]. 光电子·激光，2009，20(10): 1337-1341. GUI M, KUANG D F, FANG ZH L. Fourier analysis of phase-masked spatial carrier interferogram [J]. Journal of Optoelectronics· Laser, 2009, 20(10):1337-1341. (in Chinese) [17]王开福，高明慧.散斑计量[M]. 北京：北京理工大学出版社，2010. WANG K F, GAO M H. Speckle Metrology[M]. Beijing: Beijing Institure of Technology Press, 2010. (in Chinese) [18]林振衡，黄元庆.载波电子散斑干涉频谱旁瓣中心偏移的克服方法[J].厦门大学学报，2011，50(3): 563-569. LIN ZH H, HUANG Y Q. Methods to overcome frequency spectrum side band’s center excursion of CESPI [J]. J. Xiamen University, 2011, 50(3): 563-569. (in Chinese) [19]MIGUEL A H, DAVID R B, MICHAEL J L, et al.. Fast two-dimensional phase-unwrapping algorithm based on sorting by reliability following a noncontinuous path [J]. Applied Optics, 2002, 41(35): 7437-7444. [20]岸本岸二郎，古川正治，仲彰，等. 浮法玻璃的制造方法:中国,CN 101842324A[P].2010. KISHIMOTO K J,FOROKAWA M,ZHONG ZH,et al.. Method for ITO manufacture:China,CN 101842324A[P].2010.(in China)

浏览量

162

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

Tsallis相对熵引导的包裹相位修补

高精度激光共焦半导体晶圆厚度测量

基于空洞空间卷积网络的点衍射干涉图像相位解包技术

混频对全视场外差动态干涉仪测量精度的影响

光谱共焦法偏心下径向梯度折射率透镜的厚度测量