137单元变形镜性能测试及校正能力实验

林旭东; 刘欣悦; 王建立; 王富国; 卫沛锋

doi:10.3788/OPE.20132102.0267

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137单元变形镜性能测试及校正能力实验

现代应用光学 | 更新时间：2020-08-12

- 137单元变形镜性能测试及校正能力实验
- Performance test and experiment of correction capability of 137-element deformable mirror
- 光学精密工程 2013年21卷第2期页码：267-273
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20132102.0267
  中图分类号： O439;TH743
- 收稿日期：2011-12-11，
  
  修回日期：2012-02-22，
  
  网络出版日期：2013-02-23，
  
  纸质出版日期：2013-02-15
- 稿件说明：
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林旭东刘欣悦王建立王富国卫沛锋. 137单元变形镜性能测试及校正能力实验[J]. 光学精密工程, 2013,21(2): 267-273

LIN Xu-dong LIU Xi-yue WANG Jian-li WANG Fu-guo WEI Pei-feng. Performance test and experiment of correction capability of 137-element deformable mirror[J]. Editorial Office of Optics and Precision Engineering, 2013,21(2): 267-273
林旭东刘欣悦王建立王富国卫沛锋. 137单元变形镜性能测试及校正能力实验[J]. 光学精密工程, 2013,21(2): 267-273 DOI： 10.3788/OPE.20132102.0267.

LIN Xu-dong LIU Xi-yue WANG Jian-li WANG Fu-guo WEI Pei-feng. Performance test and experiment of correction capability of 137-element deformable mirror[J]. Editorial Office of Optics and Precision Engineering, 2013,21(2): 267-273 DOI： 10.3788/OPE.20132102.0267.

摘要

自制了一个137单元分立促动器的连续镜面式变形镜，用于自适应光学相关技术的研究。首先，利用Zygo激光干涉仪对变形镜的静态性能进行了测试，包括面形测试、单个促动器的响应测试和耦合测试;然后，针对变形镜的校正能力，分别进行了Zernike多项式拟合和展平测试，并利用自适应光学实验平台实验验证了变形镜的校正能力;最后，利用搭建的快速响应测量平台测试了变形镜及其驱动电路的动态响应性能。测试及实验表明，137单元变形镜静态展平后的面形RMS值优于/50，PV值优于0.18（=632.8 nm）;能够对前7阶Zernike多项式进行较好的拟合和校正;变形镜及其高压驱动器的动态响应优于1 kHz;该变形镜能使系统的Strehl ratio从小于0.1提高到优于0.9，明显改善了系统的成像能力。

Abstract

A 137-element Deformable Mirror(DM) was manufactured by ourselves to carry out the research on the adaptive optics. First

a Zygo interferometer was used to test the static characteristics of the DM

which included figure tests

response tests of single actuators and coupling tests. Then

Zernike polynomial fitting and surface flattening were performed to test the correction capability of the DM

respectively

and the correction capability was also verified experimentally at an adaptive optics test-bed. Finally

a fast response measurement system was built up to test the dynamic response abilities of the DM and its drive electronics. The tests and experiments show that the surface of the DM after flatten calibration has the RMS and PV better than /50 and 0.18(=632.8 nm)

respectively. Furthermore

the DM can fit and correct the first 7 order Zernike polynomials reasonably. The dynamic responses both of the DM and its high voltage driver are faster than 1 kHz. The tests in the indoor adaptive optics system show that the DM improves the system's Strehl ratio from less than 0.1 to better than 0.9

which enhances the imaging capability of the system greatly.

关键词

Keywords

references

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