单光源双光路激光并行共焦测量系统设计

余卿; 余晓芬; 崔长彩

doi:10.3788/OPE.20132102.0281

您当前的位置：

首页 >

文章列表页 >

单光源双光路激光并行共焦测量系统设计

现代应用光学 | 更新时间：2020-08-12

- 单光源双光路激光并行共焦测量系统设计
- Design of laser parallel confocal measurement system with single source and dual beam paths
- 光学精密工程 2013年21卷第2期页码：281-286
- 作者机构：
  
  华侨大学机电及自动化学院2. 合肥工业大学仪器科学与光电工程学院
- 作者简介：
- 基金信息：
  
  国家自然科学基金(41301448)
- DOI：10.3788/OPE.20132102.0281
  中图分类号： TH703;TN247
- 收稿日期：2012-09-11，
  
  修回日期：2012-10-12，
  
  网络出版日期：2013-02-23，
  
  纸质出版日期：2013-02-15
- 稿件说明：
移动端阅览
余卿余晓芬崔长彩. 单光源双光路激光并行共焦测量系统设计[J]. 光学精密工程, 2013,21(2): 281-286

YU Qing YU Xiao-fen CUI Chang-cai. Design of laser parallel confocal measurement system with single source and dual beam paths[J]. Editorial Office of Optics and Precision Engineering, 2013,21(2): 281-286
余卿余晓芬崔长彩. 单光源双光路激光并行共焦测量系统设计[J]. 光学精密工程, 2013,21(2): 281-286 DOI： 10.3788/OPE.20132102.0281.

YU Qing YU Xiao-fen CUI Chang-cai. Design of laser parallel confocal measurement system with single source and dual beam paths[J]. Editorial Office of Optics and Precision Engineering, 2013,21(2): 281-286 DOI： 10.3788/OPE.20132102.0281.

摘要

针对传统激光并行共焦测量过程中存在的泰伯效应，提出将数字微镜器件（DMD）引入激光并行共焦测量系统来正确辨识正焦面的位置。采用了DMD作为光分束器件，从理论上验证了它是一种投影式的阵列光源，对激光分束后不会在光路方向上产生泰伯像;同时，考虑DMD不能对分束后的光线产生会聚作用，并非高效的并行光源分束器件，本文将DMD与微透镜阵列(MLA)结合构建了单光源双光路并行共焦测量系统。该系统利用DMD光路探测正焦面位置，利用微透镜阵列光路进行精确的共焦测量。实验结果表明，两种光路下的正焦面位置仅相差2 μm，在一个泰伯间距范围之内，可以较好地克服泰伯效应对激光并行共焦测量的影响，进而保证较高精度的并行共焦测量。

Abstract

To avoid the Talbot effect that is a multiple imaging in the traditional laser parallel confocal measurement

this paper introduces a Digital Micromirror Device(DMD) into the laser parallel confocal measurement to recognize the in-focus image. By taking the DMD as an optical splitting system

it is verified to be a flexible array source

and can not bring Talbot effect into the measurement system. However

the DMD is not an effectual splitting source as it can not converge the split ray effectively. Based on the characteristics of DMD

a laser parallel confocal measurement system with a single source and dual beam paths is constructed by combining a DMD and a Microlens Array(MLA). In this system

the position of in-focus image can be distinguished with the beam path of DMD and the high precision measurement can be completed with the beam path of MLA. The theoretical analysis and the experiment results indicate that the difference between the positions of in-focus images under two kinds of optical detection paths is about 2 μm. Moreover

the influence of Talbot effect on the laser parallel confocal measurement becomes weaker

and the parallel confocal measurement with high precision is achieved.

关键词

Keywords

references

姚楠,王中林.纳米技术中的显微学手册[M]. 北京:清华大学出版社,2006.YAO N,WANG ZH L.Handbook of Microscopy for Nanotechnology[M]. Beijing:Tsinghua University Press.(in English)[2]THOMAS R, ANDREAS W, VERDES, et al.. Confocal reader for biochip screening and fluorescence microscopy[J]. Biosensors and Bioelectronics, 2005, 20(9):1872-1877.[3]曾毅波,蒋书森,黄彩虹,等.激光共焦扫描显微镜在微机电系统中的应用[J]. 光学精密工程,2008,16(7):1241-1246. ZENG Y B, JIANG SH S,HUANG C H, et al.. Application of laser scanning confocal microscope in micro-electro-mechanical system [J]. Opt. Precision Eng., 2008,16(7):1241-1246.(in Chinese)[4]ZHOU CH, WANG W, DAI E W， et al.. Simple principles of the Talbot effect [J]. Opt. Photonics News, 2004, 15(11):46-50.[5]TENG S Y, LIU L,ZU J, et al.. Uniform theory of the Talbot effect with partially coherent light illumination [J]. J. Opt. Soc. Am.A,2003,20:1747-1754.[6]TENG S Y, CHEN X Y,ZHOU T, et al.. Quasi-Talbot effect of a grating in the deep fresnel diffraction region [J]. J. Opt. Soc. Am. A, 2007,24(6):1656-1665.[7]滕树云,刘立人,刘德安,等.部分相干光照明下光栅的塔尔博特效应[J]. 光学学报,2004, 24(5):692-695.TENG SH Y, LIU L R, LIU D A,et al.. Fresnel diffraction of the grating illuminated by partially coherent light [J]. Acta Optica Sinica, 2004, 24(5):692-695.(in Chinese)[8]周同军,滕树云.光栅尺寸对光栅泰伯效应的影响[J]. 山东师范大学学报(自然科学版),2007, 22(3):50-51.ZHOU T J, TENG SH Y. The influence of size of the grating on the Talbot effect[J]. Journal of Shandong Normal University (Natural Science), 2007, 22(3):50-51.(in Chinese)[9]滕树云,刘立人,祖继锋,等. 脉冲和连续多色光源照明下光栅泰伯效应的等价性[J]. 中国激光, 2004, 31(10):1177-1182.TENG SH Y, LIU L R, ZU J F, et al.. Equivalence of Talbot effect of the grating illuminated by the pulsed laser and continuous polychromatic light[J]. Chinese Journal of Lasers, 2004, 31(10):1177-1182.(in Chinese)[10]余卿,余晓芬,程伶俐,等.泰伯效应对激光并行共焦显微系统成像影响的研究[J]. 仪器仪表学报, 2009, 30(6):1271-1274.YU Q, YU X F, CHENG L L, et al.. Research on the influence of Talbot effect on the imaging in laser parallel confocal microscopy system [J]. Chinese Journal of Scientific Instrument, 2009, 30(6):1271-1274.(in Chinese)[11]韩超,韦穗,权希龙,等.数字微镜器件的全息显示[J].中国激光, 2010, 37(1):190-194.HAN CH,WEI S,QUAN X L, et al.. Holographic display of digital micromirror device [J]. Chinese Journal of Lasers, 2010, 37(1):190-194.(in Chinese)[12]王巍,巩马理.数字微镜器件（DMD）在相干光照明下的空间光调制特性[J].光电技术应用, 2007, 22 (3):31-35.WANG W, GONG M L. Spatial light modulating characters of digital micromirror device (DMD) at laser illumination[J]. Electro-optic Technology Application, 2007,22 (3):31-35.(in Chinese)[13]李俊昌,宋庆和,桂进斌.数字微镜用于菲涅耳衍射全息显示的理论研究[J].光子学报, 2009, 38(6):1459-1463.LI J CH,SONG Q H,GUI J B. Theory research on fresnel diffraction hologram display with DMD[J]. Acta Photonica Sinica, 2009, 38(6):1459-1463.(in Chinese)[14]余卿,余晓芬,刘文文,等. 数字微镜器件用于并行共焦测量的再研究[J]. 光学学报, 2011, 31(5):0523005-1-0523005-5.YU Q, YU X F, LIU W W, et al.. Re-studies on parallel confocal measurement system with digital micromirror device [J]. Acta Optica Sinica, 2011, 31(5):0523005-1-0523005-5.(in Chinese)

浏览量

394

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

用于InGaAs单光子探测器的微透镜阵列及表征

基于卷积神经网络判定方法的激光微透镜阵列微米级加工工艺

数字微镜器件光谱成像技术进展

光刻胶掩膜材料超光滑表面切削

光纤阵列准直器设计及其发散角测量