浏览全部资源
扫码关注微信
中国科学院 长春光学精密机械与物理研究所 发光学及应用国家重点实验室
收稿日期:2012-04-17,
修回日期:2012-05-10,
网络出版日期:2013-03-20,
纸质出版日期:2013-03-15
移动端阅览
徐华伟 宁永强 曾玉刚 张星 秦莉. 852nm半导体激光器量子阱设计与外延生长[J]. 光学精密工程, 2013,21(3): 590-597
XU Hua-wei NING Yong-qiang ZENG Yu-gang ZHANG Xing QIN Li. Design and epitaxial growth of quantum-well for 852 nm laser diode[J]. Editorial Office of Optics and Precision Engineering, 2013,21(3): 590-597
徐华伟 宁永强 曾玉刚 张星 秦莉. 852nm半导体激光器量子阱设计与外延生长[J]. 光学精密工程, 2013,21(3): 590-597 DOI: 10.3788/OPE.20132103.0590.
XU Hua-wei NING Yong-qiang ZENG Yu-gang ZHANG Xing QIN Li. Design and epitaxial growth of quantum-well for 852 nm laser diode[J]. Editorial Office of Optics and Precision Engineering, 2013,21(3): 590-597 DOI: 10.3788/OPE.20132103.0590.
设计并外延生长了具有高温度稳定性的InAlGaAs/AlGaAs应变量子阱激光器,用于解决852 nm半导体激光器在高温环境下工作时的波长漂移问题。基于理论模型,计算并模拟对比了InAlGaAs
InGaAsP
InGaAs和GaAs量子阱的增益及其增益峰值波长随温度的漂移,结果显示
采用In
0.15
Al
0.11
Ga
0.74
As作为852 nm半导体激光器的量子阱可以使器件同时具有较高的增益峰值和良好的波长温漂稳定性。使用金属有机化合物气相淀积(MOCVD)外延生长了In
0.15
Al
0.11
Ga
0.74
As/Al
0.3
Ga
0.7
As有源区,通过反射各向异性谱(RAS)在线监测和PL谱研究了InAlGaAs/AlGaAs界面的外延质量,实验证明了通过降低生长温度和在InAlGaAs/AlGaAs界面处使用中断时间,可以有效抑制In析出,从而获得InAlGaAs/AlGaAs陡峭界面。最后,采用优化后的外延生长条件,研制出了InAlGaAs/AlGaAs应变量子阱激光器。实验测试结果显示
其光谱半高宽为1.1 nm,斜率效率为0.64 W/A,激射波长随温度漂移为0.256 nm/K。理论计算结果与实验测试结果相吻合,证明器件性能满足在高温环境下工作的要求。
An InAlGaAs/AlGaAs strained quantumwell laser with high temperature stability was designed and grown to overcome the emission wavelength shift occurred in high temperature for a 852 nm laser diode. Based on a comprehensive model
the gains and wavelengths versus the operation temperatures of InAlGaAs
InGaAsP
InGaAs and GaAs quantumwells were calculated and compared. The results indicate that In
0.15
Al
0.11
Ga
0.74
Asquantumwell is the most appropriate candidate for the quantum well of the 852 nm laser diode with the higher gain and better temperature stability simultaneously. Then
Metalorganic Chemical Vapor Deposition(MOCVD) was used to grow compressivestrained In
0.15
Al
0.11
Ga
0.74
As/Al
0.3
Ga
0.7
Asactive region and Reflectance Anisotropy Spectroscopy (RAS) and Photoluminescence Measurements (PL) were applied to the evaluation of crystalline quality for InAlGaAs/AlGaAs interfaces. It is proved that the indium segregation effect can be effectively suppressed by lowering the growth temperature and using the interruption time between InAlGaAs quantumwell and AlGaAs barriers
and an abrupt interface and good crystalline quality for InAlGaAs/AlGaAs quantumwell can be obtained. Finally
an InAlGaAs/AlGaAs strained quantumwell laser was grown with optimized growth conditions. Experimental results indicate that the laser has a Full Width Half Maximum (FWHM) of 1.1 nm, the slope efficiency of 64 W/A and the wavelength shift with temperature of 0.256 nm/K. The theoretical calculation results are in good agreement with experimental results
which verifies that the laser meets the work requirements at a high temperature.
史晶晶, 秦莉, 宁永强,等. 850 nm垂直腔面发射激光列阵[J]. 光学 精密工程,2012, 20(1): 17-23.SHI J J, QIN L, NING Y Q, et al.. 850 nm vertical cavity surface-emitting laser arrays [J]. Opt. Precision Eng., 2012, 20(1): 17-23. (in Chinese)[2]张星, 宁永强, 曾玉刚,等. 980 nm高功率垂直腔面发射激光列阵的单元结构优[J]. 光学 精密工程,2011,19(9): 2014-2021.ZHANG X, NING Y Q, ZENG Y G, et al.. Optimization of element structure in 980 nm high-power vertical-cavity surface-emitting laser array [J]. Opt. Precision Eng., 2011, 19(9): 2014-2021. (in Chinese) [3]史晶晶, 秦莉, 刘迪,等. 大功率垂直腔面发射激光列阵的串接结构[J]. 光学 精密工程,2011, 19(10): 2309-2313.SHI J J, QIN L, LIU D, et al.. High-power vertical cavity surface emitting laser array in series structure [J]. Opt. Precision Eng., 2011, 19(10): 2309-2313. (in Chinese)[4]VINCENT L, FRANCOIS J V, SHAILENDRA B, et al.. High power Al free active region (= 852 nm) DFB laser diodes for atomic clocks and interferometry applications [C]. Conference on Lasers and Electro-Optics, California, 2006:398-405.[5]KARACHINSKY L Y, NOVIKOV I I, SHERNYAKOV Y M, et al.. High power GaAs/AlGaAs lasers (~850 nm) with ultranarrow vertical beam divergence [J]. Applied Physics Letters, 2006, 89(23): 23114-1-23114-3.[6]KLEHR A, WENZEL H, BROX O, et al.. High power DFB lasers for D1 and D2 caesium absorption spectroscopy and atomic clocks [C]. Novel In-Plane Semiconductor Lasers Ⅶ, San Jose, 2008: 69091E-1-69091E-10.[7]ZORN M, ZETTLER J T, KNALLER A, et al.. In situ determination and control of AlGaInP composition during MOVPE growth [J]. Journal of Crystal Growth, 2006, 287(2): 637-641.[8]BUGGE F, ZORN M, ZEIMER V, et al.. MOVPE growth of InGaAs/GaAsP-MQWs for high power laser diodes studied by reflectance anisotropy spectroscopy [J]. Journal of Crystal Growth, 2009, 311(4): 1065-1069.[9]晏长岭, 秦莉, 宁永强,等. GaInAs/GaAs应变量子阱能带结构的计算[J]. 激光杂志, 2004, 25(5): 29-31.YAN CH L, QIN L, NING Y Q, et al.. Calculation of energy band structure of GaInAs/ GaAs quantum well [J]. Laser Journal, 2004, 25(5): 29-31. (in Chinese)[10]ZHANG Y, NING Y, ZHANG L, et al.. Design and comparison of GaAs, GaAsP and InGaAlAs quantum-well active regions for 808-nm VCSELs [J]. Optics Express, 2011, 19(13): 12569-12581.[11]徐华伟, 宁永强, 曾玉刚,等. 852 nm半导体激光器InGaAlAs、InGaAsP、InGaAs和GaAs量子阱的温度稳定性\[J\]. 发光学报, 2012, 33(6):640-646.XU H W, NING Y Q, ZENG Y G, et al.. Temperature Stability of InGaAlAs, InGaAsP, InGaAs and GaAs Quantum-wells for 852nm Laser Diode \[J\]. Chin. J. Lumin, 2012, 33(6): 640-646. (in Chinese)[12]徐华伟, 宁永强, 曾玉刚,等. 反射各向异性谱在线监测852 nm半导体激光器AlGaInAs/AlGaAs量子阱的MOCVD外延生长研究[J]. 中国激光, 2012, 39(5):0502010-1-0502010-6.XU H W, NING Y Q, ZENG Y G, et al.. MOCVD growth of AlGaInAs/AlGaAs QW for 852 nm laser diodes studied by reflectance anisotropy spectroscopy [J]. Chinese Journal of Lasers, 2012, 39(5): 0502010-1-0502010-6. (in Chinese)
0
浏览量
92
下载量
9
CSCD
关联资源
相关文章
相关作者
相关机构