用于惯性约束聚靶丸测量的激光差动共焦传感器

郭俊杰; 邱丽荣; 王允; 孟婕; 高党忠

doi:10.3788/OPE.20132103.0644

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用于惯性约束聚靶丸测量的激光差动共焦传感器

微纳技术与精密机械 | 更新时间：2020-08-12

- 用于惯性约束聚靶丸测量的激光差动共焦传感器
- Laser differential cofocal sensor for ICF capsule measurement
- 光学精密工程 2013年21卷第3期页码：644-651
- 作者机构：
  
  北京理工大学光电学院2. 中国工程物理研究院激光聚变中心
- 作者简介：
- 基金信息：
  
  中国工程物理研究院与国家自然基金委联合自然基金()
- DOI：10.3788/OPE.20132103.0644
  中图分类号： TP212.14;TL816.9
- 收稿日期：2012-09-19，
  
  修回日期：2012-11-20，
  
  网络出版日期：2013-03-20，
  
  纸质出版日期：2013-03-15
- 稿件说明：
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郭俊杰邱丽荣王允孟婕高党忠. 用于惯性约束聚靶丸测量的激光差动共焦传感器[J]. 光学精密工程, 2013,21(3): 644-651

GUO Jun-jie QIU Li-rong WANG Yun MENG Jie GAO Dang-zhong. Laser differential cofocal sensor for ICF capsule measurement[J]. Editorial Office of Optics and Precision Engineering, 2013,21(3): 644-651
郭俊杰邱丽荣王允孟婕高党忠. 用于惯性约束聚靶丸测量的激光差动共焦传感器[J]. 光学精密工程, 2013,21(3): 644-651 DOI： 10.3788/OPE.20132103.0644.

GUO Jun-jie QIU Li-rong WANG Yun MENG Jie GAO Dang-zhong. Laser differential cofocal sensor for ICF capsule measurement[J]. Editorial Office of Optics and Precision Engineering, 2013,21(3): 644-651 DOI： 10.3788/OPE.20132103.0644.

摘要

针对目前原子力显微镜等方法只能测量激光惯性约束核聚变(ICF)靶丸外表面等难题，研制了高精度、非接触、小型化的激光差动共焦传感器（LDCS）。该传感器基于差动共焦原理，利用激光差动共焦轴向响应曲线的零点对靶丸内外表面和球心分别进行定位，并结合物镜微位移驱动技术，实现靶丸内外表面和壳层厚度的高精度测量。该方法减少了靶丸表面的反射率、倾斜等因素对测量瞄准特性的影响，显著提高了系统的抗干扰能力。将传统的显微成像与差动共焦测量光路进行有机融合，实现了对被测样品的精确瞄准。初步实验与理论分析表明：当测量物镜的数值孔径NA为0.65时，LDCS的轴向分辨力优于5 nm，信噪比优于1 160，过零点的标准偏差为10 nm。该传感器为激光惯性约束核聚变靶丸测量提供了一种新的技术途径。

Abstract

As Atomic Force Microscope can only measure the outside surface of a capsule in the Inertial Confinement fusion (ICF)

a high precision

non-contact

miniaturized Laser Differential Confocal Sensor (LDCS) is developed. Based on the differential confocal principle

the sensor positions respectively the test points on the outer surface

inner surface and spherical center of the ICF capsule in sequence by the absolute zero point of a laser differential axial intensity curve. Then it implements the high-precision measurement of the ICF capsule by combing with the high precision displacement sensor. This method reduces the influences of the surface reflectivity and tilt of the capsule and other factors on pointing characteristics and improves the anti-interference ability. Combining the traditional microscopic imaging and differential confocal optical path organically

the precision pointing is achieved. Theoretical analysis and preliminary experiments indicate that the axial resolution of LDCS is better than 5 nm

the standard deviation of absolute zero is 10 nm and the signal to noise ratio is better than 1160 when the Numerical Aperture(NA) is 0.65. The sensor provides a new way for measuring capsules in the ICFs.

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references

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