光学材料磨削亚表面损伤预测

吕东喜; 王洪祥; 黄燕华

doi:10.3788/OPE.20132103.0680

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光学材料磨削亚表面损伤预测

微纳技术与精密机械 | 更新时间：2020-08-12

- 光学材料磨削亚表面损伤预测
- Prediction of grinding induced subsurface damage of optical materials
- 光学精密工程 2013年21卷第3期页码：680-686
- 作者机构：
  
  哈尔滨工业大学机电工程学院2. 3. 中国工程物理研究院激光聚变研究中心
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20132103.0680
  中图分类号： TN305.2;TQ171.6+8
- 收稿日期：2012-07-19，
  
  修回日期：2012-09-14，
  
  网络出版日期：2013-03-20，
  
  纸质出版日期：2013-03-15
- 稿件说明：
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吕东喜王洪祥黄燕华. 光学材料磨削亚表面损伤预测[J]. 光学精密工程, 2013,21(3): 680-686

LV Dong-xi WANG Hong-xiang HUANG Yan-hua. Prediction of grinding induced subsurface damage of optical materials[J]. Editorial Office of Optics and Precision Engineering, 2013,21(3): 680-686
吕东喜王洪祥黄燕华. 光学材料磨削亚表面损伤预测[J]. 光学精密工程, 2013,21(3): 680-686 DOI： 10.3788/OPE.20132103.0680.

LV Dong-xi WANG Hong-xiang HUANG Yan-hua. Prediction of grinding induced subsurface damage of optical materials[J]. Editorial Office of Optics and Precision Engineering, 2013,21(3): 680-686 DOI： 10.3788/OPE.20132103.0680.

摘要

基于压痕断裂力学理论，建立了工件表面粗糙度与亚表层损伤深度的理论关系模型，用于预测磨削加工脆性光学材料引起的亚表层损伤深度。利用磁流变角度抛光技术检测了不同磨削加工工艺条件下亚表层的损伤深度，验证了理论模型的正确性。分析了加工工艺参数对工件表面粗糙度及亚表层损伤深度的影响规律，提出了提高材料去除率的磨削加工工艺方案。分析结果表明：脆性材料工件的亚表层损伤深度与工件的表面粗糙度呈非线性单调递增关系。工件亚表层损伤深度及工件表面粗糙度均随着切削深度和进给速度的增加而增加，随着主轴转速的增加而减小。对比实验结果与理论模型预测结果表明，提出的模型可以准确、无损伤地的预测磨削加工引起的工件亚表层损伤深度。

Abstract

On the basis of indentation fracture mechanics

a theoretical model was developed to evaluate the relationship between surface roughnesses (SRs) and Subsurface Damage Depths (SSDs) of brittle optical materials and to predict their grinding induced SSDs. For validating the feasibility of this method

the SSDs generated with various process parameters were measured by Magnetorheological Finishing (MRF) wedge technique. The influences of processing parameters on the SRs and SSDs were investigated

and a process strategy was also proposed to improve the material removal rate. The prediction results of this theoretical model show that the SSDs are nonlinear monotone increasing with the square of SR values during grinding processes. The SSDs and SRs increase with the increasing of cutting depth and feed rate

while reduce with the increasing of spindle speed. The measurement results of SSDs are consistent with the prediction values of the model

which demonstrates the feasibility of utilizing this model to accurately and non-destructively predict the SSDs.

关键词

Keywords

references

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