Nanohandling robots have become an enabling technology for analysis and prototyping in the field of nanotechnology and nanomaterials. Nanorobotic pick-and-place operations facilitate the flexible integration of individual nanostructures into existing micro devices increasing their overall performance and sensitivity. The automation of this so-called robotic micro-nano-integration is required to establish the technology not only in research labs
but also in industrial areas. In this paper
basic technologies for the development
integration and automation of nanohandling robots are presented. In addition
special handling strategies for the assembly of different kinds of Atomic Force Microscope(AFM) supertips are discussed.
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references
ABBOTT J J, NAGY Z, BEYELER F,et al.. Robotics in the Small, Part I: Microrobotics [J]. IEEE Robotics