微结构光学零件的大气等离子体数控加工

李娜; 王波; 金会良; 袁野; 杨允利

doi:10.3788/OPE.20132104.0934

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微结构光学零件的大气等离子体数控加工

微纳技术与精密机械 | 更新时间：2020-08-12

- 微结构光学零件的大气等离子体数控加工
- Numerically controlled atmospheric pressure plasma processing of micro-structured optics
- 光学精密工程 2013年21卷第4期页码：934-940
- 作者机构：
  
  哈尔滨工业大学机电工程学院2. 哈尔滨工业大学精密工程研究所
- 作者简介：
- 基金信息：
  
  大尺寸有障碍空间角度与基面位置测量的关键技术()
- DOI：10.3788/OPE.20132104.0934
  中图分类号： TG659;TN305.2
- 收稿日期：2012-09-03，
  
  修回日期：2012-11-12，
  
  网络出版日期：2013-04-20，
  
  纸质出版日期：2013-04-15
- 稿件说明：
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李娜王波金会良袁野杨允利. 微结构光学零件的大气等离子体数控加工[J]. 光学精密工程, 2013,21(4): 934-940

LI Na WANG Bo JIN Hui-liang YUAN Ye YANG Yun-li. Numerically controlled atmospheric pressure plasma processing of micro-structured optics[J]. Editorial Office of Optics and Precision Engineering, 2013,21(4): 934-940
李娜王波金会良袁野杨允利. 微结构光学零件的大气等离子体数控加工[J]. 光学精密工程, 2013,21(4): 934-940 DOI： 10.3788/OPE.20132104.0934.

LI Na WANG Bo JIN Hui-liang YUAN Ye YANG Yun-li. Numerically controlled atmospheric pressure plasma processing of micro-structured optics[J]. Editorial Office of Optics and Precision Engineering, 2013,21(4): 934-940 DOI： 10.3788/OPE.20132104.0934.

摘要

为了实现对微结构光学零件无表面损伤和亚表面损伤的高效加工，建立了大气等离子体数控加工系统。研究了该系统的平台设计、大气等离子体加工工艺特性及其数控加工过程。首先，根据大气等离子体加工的原理及要求介绍了该数控加工系统的组成。然后，以He/SF

加工熔融石英为例，采用针状电极等离子体矩对系统加工工艺的可控性以及多参数工艺特性进行了探索，并根据工艺实验结果拟合出该加工条件下的去除函数。最后，介绍了整个大气等离子体数控加工的实现过程。实验结果表明：利用该系统可以在平面融石英材料上加工出幅值为150 nm、波长为6 mm的正弦网格结构，由此验证了该数控加工系统的可行性，实现了对复杂面型光学零件表面的确定性加工。

Abstract

To process micro-structured surface optical elements without surface damage and subsurface damage in higher efficiency

a numerical control system for Atmospheric Pressure Plasma Processing (APPP) was established. The design of a system platform

APPP process characteristics and numerical control process were investigated. First

according to the principle and requirements of the APPP

the numerical control system composition was presented. Then

by taking the processing of fused silica by He/SF

as an example

the controllability of the process as well as multi-parameter process characteristics were explored using the plasma torch with a needle electrode

and the removal function under this condition was fitted. Finally

the entire realization process of the numerical control machining for the APPP was proposed. Experimental results indicate that the sine structure with an amplitude of 150 nm and wavelength of 6 mm can be processed on a flat fused silica surface by this system

which verifies the feasibility of the numerical control system and achieves the deterministic processing of complex optical surfaces.

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references

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