相移干涉测量中相移误差的自修正

赵智亮; 夏伯才; 陈立华; 郑万国; 张志华

doi:10.3788/OPE.20132105.1116

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相移干涉测量中相移误差的自修正

现代应用光学 | 更新时间：2020-08-12

- 相移干涉测量中相移误差的自修正
- Self-correction of phase step error in phase shifting interferometry measurement
- 光学精密工程 2013年21卷第5期页码：1116-1121
- 作者机构：
  
  成都精密光学工程研究中心/成都太科光电技术有限责任公司2. 中国工程物理研究院工学院3. 成都精密光学工程研究中心4. 成都太科光电技术有限责任公司
- 作者简介：
- 基金信息：
  
  科技型中小企业技术创新基金()
- DOI：10.3788/OPE.20132105.1116
  中图分类号： TH744.3
- 收稿日期：2012-12-13，
  
  修回日期：2013-02-05，
  
  网络出版日期：2013-05-24，
  
  纸质出版日期：2013-05-15
- 稿件说明：
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赵智亮夏伯才陈立华郑万国张志华. 相移干涉测量中相移误差的自修正[J]. 光学精密工程, 2013,21(5): 1116-1121

ZHAO Zhi-liang XIA Bo-cai CHEN Li-hua ZHENG Wan-guo ZHANG Zhi-hua. Self-correction of phase step error in phase shifting interferometry measurement[J]. Editorial Office of Optics and Precision Engineering, 2013,21(5): 1116-1121
赵智亮夏伯才陈立华郑万国张志华. 相移干涉测量中相移误差的自修正[J]. 光学精密工程, 2013,21(5): 1116-1121 DOI： 10.3788/OPE.20132105.1116.

ZHAO Zhi-liang XIA Bo-cai CHEN Li-hua ZHENG Wan-guo ZHANG Zhi-hua. Self-correction of phase step error in phase shifting interferometry measurement[J]. Editorial Office of Optics and Precision Engineering, 2013,21(5): 1116-1121 DOI： 10.3788/OPE.20132105.1116.

摘要

分析了相移干涉测量过程中相移误差产生的原因，研究了基于迭代最小二乘算法的相移误差修正法，实现了任意两幅干涉图间相对移相量的计算和自适应校正。基于光、机、电、算四系统，实现任意步长的3幅以上干涉图像的采集，用迭代最小二乘法计算任意两幅干涉图间的相对移相量，然后将其闭环反馈至硬件相移系统，自动修正相移步长为给定量的特征相移值，从而完成干涉仪相移误差的自修正。构建了相移误差自校正系统，通过实际干涉测量验证了算法的正确性和相移误差自修正系统的可行性。结果表明，自适应修正后相移量相对误差<5％，面形RMS测量重复性</1 000，实现了高精度、高效率的相移误差自适应修正。

Abstract

The reasons for the phase shifting errors in a phase shifting interferometric measurement were analyzed

and a method to correct the phase shifting errors was researched based on the least square method. The calculation and correction for the relative phase step amount between arbitrary two interferograms were implemented. With the combination of optical

mechanical

electrical and calculating subsystems

more than three step interferometric images with arbitrary intervals were achieved. Then

the iterative least-square algorithm was used to calculate the relative phase step amount between arbitrary two interferograms. The phase shift error was feedbacked to the hardware system and the phase step interval was corrected in self-adaption until the phase step interval was equal to the characteristic value of the phase shift. A phase shift error correction system based on iterative least-square algorithm was constructed to achieve phase step error self-correction on a phase shifting interferometry. The real measurement of optical surface was conducted to verify the correction of algorithm and the feasibility of phase step error self-correction system. The results show that the relative phase step error is less than 5%， and the root mean square error（RMS） for measurement repeatability of the optical surface is less than /1 000 with the help of the proposed phase step self-correction process.

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references

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