极紫外Mg/SiC、Mg/Co多层膜的稳定性

朱京涛; 宋竹青; 丁涛; 马爽; 李浩川

doi:10.3788/OPE.20132106.1380

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极紫外Mg/SiC、Mg/Co多层膜的稳定性

现代应用光学 | 更新时间：2020-08-12

- 极紫外Mg/SiC、Mg/Co多层膜的稳定性
- Stability of Mg/SiC, Mg/Co EUV multilayers
- 光学精密工程 2013年21卷第6期页码：1380-1386
- 作者机构：
  
  同济大学物理科学与工程学院精密光学工程技术研究所
- 作者简介：
- 基金信息：
  
  国家重点基础研究发展计划（973计划）(2013CB035501)
- DOI：10.3788/OPE.20132106.1380
  中图分类号： O484.1
- 收稿日期：2013-01-11，
  
  修回日期：2013-03-15，
  
  网络出版日期：2013-06-20，
  
  纸质出版日期：2013-06-15
- 稿件说明：
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朱京涛宋竹青丁涛马爽李浩川. 极紫外Mg/SiC、Mg/Co多层膜的稳定性[J]. 光学精密工程, 2013,21(6): 1380-1386

ZHU Jing-tao SONG Zhu-qing DING Tao MA Shuang LI Jie-chuan. Stability of Mg/SiC, Mg/Co EUV multilayers[J]. Editorial Office of Optics and Precision Engineering, 2013,21(6): 1380-1386
朱京涛宋竹青丁涛马爽李浩川. 极紫外Mg/SiC、Mg/Co多层膜的稳定性[J]. 光学精密工程, 2013,21(6): 1380-1386 DOI： 10.3788/OPE.20132106.1380.

ZHU Jing-tao SONG Zhu-qing DING Tao MA Shuang LI Jie-chuan. Stability of Mg/SiC, Mg/Co EUV multilayers[J]. Editorial Office of Optics and Precision Engineering, 2013,21(6): 1380-1386 DOI： 10.3788/OPE.20132106.1380.

摘要

采用磁控溅射法在Si(100)基底上镀制了膜系结构分别为[Mg/Co]

、[Mg/SiC]

的两组多层膜，以研究Mg基多层膜的稳定性。对放置在室温和80%相对湿度环境下的样品进行显微镜、表面粗糙度和X射线掠入射反射率测试，对比研究了Mg/Co和Mg/SiC两种多层膜结构在相同环境中的损坏状况。对比结果显示：放置4天后，Mg/SiC损坏面积为26.34%，表面粗糙度为10 nm；Mg/Co的损坏面积为2.78%，表面粗糙度为5 nm。6天后，X射线掠入射反射率测量显示Mg/SiC多层膜一级反射峰完全消失，而Mg/Co多层膜的一级反射峰仍有47.63%的反射率。实验表明，Mg/Co多层膜的表面层和内部多层膜结构的损坏速度较Mg/SiC慢，具有较好的环境稳定性。另外，X射线光电子谱（XPS）测试Mg基多层膜损坏后的产物主要为MgCO

、Mg(OH)

和少量的MgO，且内层Mg(OH)

与MgCO

含量的比值显著高于表面层。分析认为，水汽是造成Mg基多层膜损坏的主要原因，今后Mg基多层膜保护层的研究可主要针对如何防止水汽进入膜层。

Abstract

To research the stability of Mg-based multilayers

two groups of multilayers

[Mg/Co]20 and [Mg/SiC]

were coated on a Si(100) substrate by magnetron sputtering method. The two samples were tested by a microscopy

a surface roughness experiment and an X-ray grazing incidence reflectivity test at room temperature and a relative humidity of 80%.The contract experiments on multilayer damage for Mg/Co和Mg/SiC were performed in the same condition. The results show that after being exposed in the atmospheric environment for 4 days

the damaged area and surface roughness of the Mg/SiC multilayer sample are up to 26.34% and 10 nm

respectively

while those of the Mg/Co multilayer sample are 2.78% and 5 nm

respectively. After 6 days

the 1st reflection peak of Mg/SiC sample is completely disappeared

and Mg/Co sample still has a peak of 47.63% reflectivity. The experimental results show that the Mg/Co multilayer sample has a better environmental stability as compared with the Mg/SiC multilayer. The X Photoelectron Spectroscopy (XPS) shows that the productions of the damaged Mg-based multilayers are mainly MgCO

Mg(OH)

and modest MgO. Moreover

the content ratio of Mg (OH)

and MgCO

in the inner layer is significantly higher than that in the surface layer. Experimental results suggest that the reason for Mg-based multilayer damage is the erosion of H2O(g)

so the capping layer of Mg-based multilayer should prevent the H

O(g) penetrating into the mulilayer.

关键词

Keywords

references

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