压电陶瓷微位移驱动器的建模与控制

刘泊; 郭建英; 孙永全

doi:10.3788/OPE.20132106.1503

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压电陶瓷微位移驱动器的建模与控制

微纳技术与精密机械 | 更新时间：2020-08-12

- 压电陶瓷微位移驱动器的建模与控制
- Modeling and Control for Piezo-Actuated Micro-Displacement Stage
- 光学精密工程 2013年21卷第6期页码：1503-1509
- 作者机构：
  
  哈尔滨理工大学测控技术与通信工程学院
- 作者简介：
- 基金信息：
  
  国家高技术研究发展计划(863项目)()
- DOI：10.3788/OPE.20132106.1503
  中图分类号： TP273
- 收稿日期：2012-12-10，
  
  修回日期：2013-02-19，
  
  网络出版日期：2013-06-20，
  
  纸质出版日期：2013-06-15
- 稿件说明：
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刘泊郭建英孙永全. 压电陶瓷微位移驱动器的建模与控制[J]. 光学精密工程, 2013,21(6): 1503-1509

LIU Bo GUO Jian-ying SUN Yong-quan. Modeling and Control for Piezo-Actuated Micro-Displacement Stage[J]. Editorial Office of Optics and Precision Engineering, 2013,21(6): 1503-1509
刘泊郭建英孙永全. 压电陶瓷微位移驱动器的建模与控制[J]. 光学精密工程, 2013,21(6): 1503-1509 DOI： 10.3788/OPE.20132106.1503.

LIU Bo GUO Jian-ying SUN Yong-quan. Modeling and Control for Piezo-Actuated Micro-Displacement Stage[J]. Editorial Office of Optics and Precision Engineering, 2013,21(6): 1503-1509 DOI： 10.3788/OPE.20132106.1503.

摘要

考虑利用白光干涉仪进行表面三维形貌测量时压电陶瓷（PZT）的蠕变效应对微位移驱动器位移精度的影响，提出了一种沿参考镜光轴方向提高该驱动器位移精度的方法。系统研究了该驱动器的位移检测回路、PID闭环控制以及蠕变补偿控制；利用光电位置传感器和光学杠杆调节位移检测回路，将压电陶瓷驱动器微位移反馈至控制系统，建立PID闭环控制。充分考虑了PZT蠕变特性对测量过程的影响，建立了"电压蠕变"补偿模型，实现了基于PID闭环控制与蠕变补偿控制相结合的复合控制方法。利用XL-80激光干涉仪测量压电陶瓷驱动器在PID闭环控制和复合控制二种情况下的微位移，实验结果显示前者位移误差为0.007 m，后者位移误差为0.005 m。结果表明该方法可有效克服压电陶瓷迟滞非线性和蠕变对测量结果的影响，满足表面三维形貌测量的高精度要求。

Abstract

When a white light interferometer is applied to 3D surface microcosmic topographic measurement

the measuring accuracy is effected by the hysteresis and creeping phenomenon generated by the piezoelectric actuator seriously. Therefore

this paper proposes a method to improve the displacement accuracy of the reference mirror along the optical axis direction. The piezoelectric actuator is given

and its displacement detecting circuit

PID closed loop control algorithms

and creep compensation control are studied. First

displacement detecting circuit is established by a position sensitive device and an optical lever

by which the piezoelectric ceramic micro-displacement can be fed back to control the system

then the PID closed-loop control algorithm is established. Furthermore

the creeping characteristics of piezoelectric ceramic is discussed during the measurement. In order to eliminate the creeping phenomenon and improve measurement accuracy

the voltage creep compensation model is proposed. Finally

an integer control system based on PID closed-loop control and creep compensation control is established. The micro-displacement of the piezoelectric actuator is measured by a high-precision XL-80 laser interferometer under the two cases of PID closed-loop control and integer control. Experimental results indicate that the displacement error for the former is 0.007 m

and that for the latter is 0.005 m

respectively. This method reduces the influence of hysteresis and creeping on measurement results

and meets the requirements of three-dimensioned shape measurement for high accuracy.

关键词

Keywords

references

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