应用于干涉显微镜的直线压电作动器

朱华; 曹如意; 菅磊

doi:10.3788/OPE.20132106.1524

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应用于干涉显微镜的直线压电作动器

微纳技术与精密机械 | 更新时间：2020-08-12

- 应用于干涉显微镜的直线压电作动器
- Linear piezoelectric actuator applied to interference microscope
- 光学精密工程 2013年21卷第6期页码：1524-1530
- 作者机构：
  
  南京航空航天大学机械结构力学与控制国家重点实验室
- 作者简介：
- 基金信息：
  
  航空基金项目();国家自然科学基金项目（基于可交换clifford代数的彩色图像矩不变量研究）();南京航空航天大学基本科研业务费专项科研项目()
- DOI：10.3788/OPE.20132106.1524
  中图分类号： TN384;TH742.9
- 收稿日期：2012-11-13，
  
  修回日期：2013-01-13，
  
  网络出版日期：2013-06-20，
  
  纸质出版日期：2013-06-15
- 稿件说明：
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朱华曹如意菅磊. 应用于干涉显微镜的直线压电作动器[J]. 光学精密工程, 2013,21(6): 1524-1530

ZHU Hua CAO Ru-yi JIAN Lei. Linear piezoelectric actuator applied to interference microscope[J]. Editorial Office of Optics and Precision Engineering, 2013,21(6): 1524-1530
朱华曹如意菅磊. 应用于干涉显微镜的直线压电作动器[J]. 光学精密工程, 2013,21(6): 1524-1530 DOI： 10.3788/OPE.20132106.1524.

ZHU Hua CAO Ru-yi JIAN Lei. Linear piezoelectric actuator applied to interference microscope[J]. Editorial Office of Optics and Precision Engineering, 2013,21(6): 1524-1530 DOI： 10.3788/OPE.20132106.1524.

摘要

提出了应用于干涉显微镜焦距调节的直线压电叠堆作动器和微动台。介绍了基于三角位移放大原理的压电作动器结构设计，利用ANSYS的APDL语言实现了对作动器钢架结构的建模，并采用Optimus中自带的差分进化算法（DE）对其结构尺寸进行了优化。制作了实验样机，激光干涉实验表明：当驱动电压信号幅值为40~100 V时，作动器位移放大倍数可以达到7。最后，将设计的直线作动器作为驱动核心安装在自行设计的微动台上，然后将组成的系统用于光学干涉显微镜。实验显示，整个系统在电压为24~40 V，阶梯增量电压为0.8 V时，步进分辨率可达23 nm，满足干涉显微镜细分干涉条纹所需要的直线位移分辨率的要求。

Abstract

A linear piezoelectric stack actuator used for the focus adjustment system of an interference microscope was proposed and a micropositioner was also developed. The structure of the actuator was designed based on the principle of triangle displacement amplification. The modeling of the steel frame structure was realized by parameter design language APDL in the ANSYS

and the parameters of the structure were optimized by the optimization algorithm of Differential Evolution (DE) in Optimus. A experimental prototype for the actuator was produced

and laser interferometric experiment shows that the actuators amplification factor reaches 7 when the drive voltage is between 40 V and 100 V.Finally

the piezoelectric stack actuator was mounted on the micropositioner to be a driver for an interferometer. Experiments show that the step resolution of the micropositioner with flexure hinges has reached 23 nm under the system voltage of 24~40 V and an increment voltage of 0.8 V. These data meet the requirement of interferometric fringe of interference microscope for linear displacement resolution.

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references

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