不同金属基材上DLC薄膜的摩擦特性

郑锦华; 李聪慧; 张冲; 晁云峰

doi:10.3788/OPE.20132106.1545

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不同金属基材上DLC薄膜的摩擦特性

微纳技术与精密机械 | 更新时间：2020-08-12

- 不同金属基材上DLC薄膜的摩擦特性
- Friction Properties of DLC Film on Different Metal Substrates
- 光学精密工程 2013年21卷第6期页码：1545-1552
- 作者机构：
  
  郑州大学化工与能源学院 2.河南瑞邦能源科技开发有限公司
- 作者简介：
- 基金信息：
  
  河南省科技创性杰出人才计划()
- DOI：10.3788/OPE.20132106.1545
  中图分类号： TB34;TB333
- 收稿日期：2013-01-04，
  
  修回日期：2013-02-22，
  
  网络出版日期：2013-06-20，
  
  纸质出版日期：2013-06-15
- 稿件说明：
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郑锦华李聪慧张冲晁云峰. 不同金属基材上DLC薄膜的摩擦特性[J]. 光学精密工程, 2013,21(6): 1545-1552

ZHENG Jin-hua LI Cong-hui ZHANG Cong CHAO Yun-feng. Friction Properties of DLC Film on Different Metal Substrates[J]. Editorial Office of Optics and Precision Engineering, 2013,21(6): 1545-1552
郑锦华李聪慧张冲晁云峰. 不同金属基材上DLC薄膜的摩擦特性[J]. 光学精密工程, 2013,21(6): 1545-1552 DOI： 10.3788/OPE.20132106.1545.

ZHENG Jin-hua LI Cong-hui ZHANG Cong CHAO Yun-feng. Friction Properties of DLC Film on Different Metal Substrates[J]. Editorial Office of Optics and Precision Engineering, 2013,21(6): 1545-1552 DOI： 10.3788/OPE.20132106.1545.

摘要

针对类金刚石(DLC)薄膜在精密机械零件中的应用，研究了在常温条件下沉积高界面强度的DLC薄膜的技术，以提高DLC薄膜与金属基材之间的结合强度。通过在基材与薄膜之间沉积加入a-Si∶H中间过渡层，研究了在不同金属基材上DLC薄膜的结合强度。采用Ball-on-Disk方法评价了薄膜的摩擦特性并测定其摩擦系数、疲劳破坏寿命和磨耗。实验结果表明：在薄膜与金属基材之间加入a-Si∶H过渡层后，界面的结合（键合）强度得到了明显的改善，在金属基材上沉积的DLC薄膜在磨耗过程中被完全磨穿而没有发生剥离。实验显示，在自制的化学气相沉积RF-DCCVD装置上沉积的DLC薄膜的最大沉积厚度是3.3 m；在1 m厚度的薄膜上施加2.94 N的负荷（点载荷），其疲劳破坏寿命达到了70万循环；DLC薄膜与SiC

Si3N4

SUS304和SUJ2材料之间的摩擦系数为0.1～0.15。得到的结果验证了薄膜与金属间的结合强度和摩擦特性能够满足精密机械零件的使用要求。

Abstract

According to the applications of Diamond-Like Carbon(DLC) films to precision mechanical parts

a method to deposit a DLC film by DC-CVD at room temperature was explored to improve the bonding strength between film and metal substrates. The a-Si∶H intermediate material was intercalated between a substrate and a DLC film

and friction properties and bonding strength of the a-Si∶H∶DLC films deposited on different metal substrates were investigated and evaluated

and then their friction coefficients

fatigue failure life and the wear were determined by Ball-on-Disk. Experimental results show that the bonding strength at the interface is greatly improved by intercalating a-Si∶H intermediate layer

the DLC film is completely worn out without delaminating. Moreover

the maximum thickness of film deposited by the equipment developed by ourselves is less than 3.3 m

the failure lifetime within the thickness of 1 m is up to 0.7 million cycles as applying a load of 2.94 N (point load)

and the friction coefficients between DLC film and SiC

Si3N4

SUS304

SUJ2 are about 0.1-0.15. In conclusion

the bonding strength and friction properties of the film can satisfy the requirements of precision mechanical parts.

关键词

Keywords

references

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