衍射光栅机械刻划成槽的预控试验

张宝庆; 史国权; 石广丰; 蔡洪彬; 张善文

doi:10.3788/OPE.20132107.1666

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衍射光栅机械刻划成槽的预控试验

现代应用光学 | 更新时间：2020-08-12

- 衍射光栅机械刻划成槽的预控试验
- Pre-control of mechanical scratching diffractive grating
- 光学精密工程 2013年21卷第7期页码：1666-1675
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所,吉林长春,130033
  2. 长春理工大学机电工程学院,吉林长春,130022
- 作者简介：
- 基金信息：
  
  衍射光栅机械刻划理论及刀具设计研究();光栅机械刻划弹塑性变形机制及槽形控制策略研究();衍射光栅高精度机械刻划理论、可视化仿真及控形技术研究()
- DOI：10.3788/OPE.20132107.1666
  中图分类号： O436.1;TN305
- 收稿日期：2012-11-13，
  
  修回日期：2013-03-22，
  
  网络出版日期：2013-07-15，
  
  纸质出版日期：2013-07-15
- 稿件说明：
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张宝庆史国权石广丰蔡洪彬张善文. 衍射光栅机械刻划成槽的预控试验[J]. 光学精密工程, 2013,21(7): 1666-1675

. Pre-control of mechanical scratching diffractive grating[J]. Editorial Office of Optics and Precision Engineering, 2013,21(7): 1666-1675
张宝庆史国权石广丰蔡洪彬张善文. 衍射光栅机械刻划成槽的预控试验[J]. 光学精密工程, 2013,21(7): 1666-1675 DOI： 10.3788/OPE.20132107.1666.

. Pre-control of mechanical scratching diffractive grating[J]. Editorial Office of Optics and Precision Engineering, 2013,21(7): 1666-1675 DOI： 10.3788/OPE.20132107.1666.

摘要

由于目前机械刻划衍射光栅加工仍依赖操作者经验

故存在成槽质量差、无法预控等问题。本文结合铝薄膜蒸镀工艺现状，采用X射线衍射法（XRD）、扫描电子显微镜法（SEM）及纳米压痕实验揭示不同薄膜样本的微观结构与力学属性，提出了制作衍射光栅的薄膜分类试刻法。研究结果表明，光栅刻划过程可近似等效为楔体下压过程，对低弹性模量类薄膜，可采用滑移线场进行解析求解并一次试刻成槽；对弹塑性类薄膜，可采用有限元模拟实验进行成槽预控。该方法可预先对薄膜甄别分类，用不同的计算方法确定不同种类薄膜的工装参数，进而刻划出近乎完美的槽形；同时减少了试验刻划耗时与浪费

提高了成槽质量与刻划效率；为刻划更加精密的光栅奠定了基础。

Abstract

As the mechanical scratching of diffraction gratings still depends on the experiences of operators

it gives poor grooved quality and can not be precontrolled. This paper proposes a diffraction grating production method: film classification test engraving method based on an aluminum thin film deposition process status quo

and reveals the microstructure and mechanical properties of different thin film samples based on Xray Diffraction(XRD)

Scanning Electron Microscope (SEM) and nanoindentation experiments. The study results show that the grating ruling can be approximately equivalent to a wedge under the pressure of the process

so that the slipline field can be used to obtain the solution analytically and carve the slot on time trial for the low elastic modulus class film. Moreover

the finite element simulation can be used to precontrol the slot for elastoplastic class. The method can implement the preclassification of the films， and can determine the tool processing parameters for different types of films with different methods. Futhermore

a nearperfect trough is scratched. Experiments show that the timeconsuming and preengraving test times are reduced and the graving quality and efficiency are improved. The method lays the foundation for improving the characteristics of more sophisticated gratings.

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Keywords

references

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