微机械陀螺检测接口建模及前置放大器优化

赵阳; 裘安萍; 施芹; 赵健

doi:10.3788/OPE.20132107.1734

您当前的位置：

首页 >

文章列表页 >

微机械陀螺检测接口建模及前置放大器优化

微纳技术与精密机械 | 更新时间：2020-08-12

- 微机械陀螺检测接口建模及前置放大器优化
- Modeling of sensing interface for micromachined gyroscope and its front-end optimization
- 光学精密工程 2013年21卷第7期页码：1734-1740
- 作者机构：
  
  南京理工大学 MEMS惯性技术研究中心,江苏南京,210094
- 作者简介：
- 基金信息：
  
  武器装备预研基金项目();国家高技术研究发展计划(863)项目()
- DOI：10.3788/OPE.20132107.1734
  中图分类号： V666.123;TH824
- 收稿日期：2012-12-24，
  
  修回日期：2013-02-25，
  
  网络出版日期：2013-07-15，
  
  纸质出版日期：2013-07-15
- 稿件说明：
移动端阅览
赵阳裘安萍施芹赵健. 微机械陀螺检测接口建模及前置放大器优化[J]. 光学精密工程, 2013,21(7): 1734-1740

. Modeling of sensing interface for micromachined gyroscope and its front-end optimization[J]. Editorial Office of Optics and Precision Engineering, 2013,21(7): 1734-1740
赵阳裘安萍施芹赵健. 微机械陀螺检测接口建模及前置放大器优化[J]. 光学精密工程, 2013,21(7): 1734-1740 DOI： 10.3788/OPE.20132107.1734.

. Modeling of sensing interface for micromachined gyroscope and its front-end optimization[J]. Editorial Office of Optics and Precision Engineering, 2013,21(7): 1734-1740 DOI： 10.3788/OPE.20132107.1734.

摘要

为了进一步提高微机械陀螺的极限分辨率，建立了基于SOI工艺的微机械陀螺的检测接口模型，并设计了与之相匹配的前置接口放大器。首先，根据陀螺表头的实际结构建立了微机械陀螺表头的RC集总参数模型和微机械陀螺检测接口的噪声模型，分析了检测接口主导噪声源及提高极限分辨率的措施。然后，在跨阻式前置放大器的基础上设计了改进的与检测接口匹配的T型前置放大器。实验结果表明：相比于跨阻式前置放大器，采用改进的T型前置放大器的等效噪声输入电流由1.18 pA/Hz降低至0.27 pA/Hz，对应的电容极限分辨率可达到0.62 aF/Hz。结果显示，采用与检测接口匹配的T型前置放大器提高了微机械陀螺的极限分辨率。

Abstract

To improve the resolving limit of a micromachined gyroscope

a sensing interface model for the micromachined gyroscope fabricated by Silicon on Insulator(SOI) process was established

and a matching front-end was designed. Firstly

a RC lumped parameter model for the gyroscope was established based on the practical gyroscope structure

then a noise model for the sensing interface was built. The dominant noise source and methods to improve the resolving limit were analyzed. Finally

on the foundation of a TIA front-end

an improved T-network front-end was designed to match the sensing interface. Experimental results indicate that the T-network front-end improves the sensing interface equivalent input noise current from 1.18 pA/Hz to 0.27 pA/Hz

corresponding to a capacitive resolution of 0.62 aF/Hz as compared to those of the transimpedance front-end. It suggests that the improved T-network front-end can reach a better resolution.

关键词

Keywords

references

刘危,解旭辉,李圣怡.微机械惯性传感器的技术现状及展望[J]. 光学精密工程,2003，11(5): 425-431. LIU W, XIE X H, LI SH Y. Present state and perspectives of micromachined inertial sensors [J]. Opt. Precision Eng., 2003, 11(5): 425-431. (in Chinese)[2]BARBOUR N, SCHMIDT G. Inertial sensor technology trends [J]. IEEE Sensors Journal, 2001, 1(4):332-339.[3]YAZDI N, AYAZI F, NAJAFI K. Micromachined inertial sensors [J]. Proceedings of the IEEE,1998, 86(8): 1640-1659.[4]JASON K P H. Modeling and Identification of the Jet Propulsion Laboratory Vibratory Rate Microgyroscope [D]. Los Angeles: Mechanical engineering, University of California, 2002.[5]CHOI B D, PARK S, KO H, et al.. The first sub-deg/hr bias stability silicon-microfabricated Gyroscope [C]. Solid-State Sensors, Actuators and Microsystems , Transducers, 2005: 180-183.[6]JIANG X S. Capacitive Position-sensing Interface for Micromachined Inertial Sensors [D]. California: University of California, Berkeley, 2003.[7]ACAR C. Robust Micromachined Vibratory Gyroscopes [D]. California:Irvine University of California, 2004.[8]李锦明. 电容式微机械陀螺仪设计 [M]. 北京：国防工业出版社，2006.LI J M. Design of Capacitive Micromechanical Gyroscope [M]. Beijing: National Defense Industrial Press, 2006. (in Chinese)[9]GABRIELSON T B. Mechanical-thermal noise in micromachined acoustic and vibration sensors [J]. IEEE Trans on Electron Devices, 1993, 40 (5): 903-909. [10]刘梅，周百令. 硅微陀螺机械热噪声研究 [J]. 仪器仪表学报，2006，27(S2)：1163-1164.LIU M, ZHOU B L. Research on mechanical-thermal noise in micromachined gyroscopes [J]. Chinese Journal of Scientific Instrument, 2006, 27(S2): 1163-1164. (in Chinese)[11]FRANCO S. Design with Operational Amplifiers and Analog Integrated Circuits [M]. New York: McGraw Hill, 2002.[12]RICHARD C D. Modern Control Systems [M]. Pearson Education, 2008.[13]GRAEME J. Photodiode Amplifiers: OP Amp Solutions [M]. New York: McGraw Hill, 1996.[14]SHARMA A, ZAMAN M F, AYAZI F. A 104 db SNDR Transimpedance-Based CMOS ASIC Fortuning Fork Micro Gyroscopes [C]. IEEE Custom Integrated Circuits Conference, 2006: 655-658.

浏览量

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

脉冲密度反馈对力平衡微机械陀螺的影响

解耦z轴微机械陀螺的研制