软X射线双频光栅设计及制作

刘正坤; 刘颖; 邱克强; 徐向东; 付绍军

doi:10.3788/OPE.20132107.1780

您当前的位置：

首页 >

文章列表页 >

软X射线双频光栅设计及制作

微纳技术与精密机械 | 更新时间：2020-08-12

- 软X射线双频光栅设计及制作
- Design and Fabrication of Soft X-ray Double Frequency Grating
- 光学精密工程 2013年21卷第7期页码：1780-1785
- 作者机构：
  
  中国科学技术大学国家同步辐射实验室,安徽合肥,230026
- 作者简介：
- 基金信息：
  
  用于激光等离子体诊断的软X射线双频光栅剪切干涉()
- DOI：10.3788/OPE.20132107.1780
  中图分类号： O436.1;TH744.3
- 收稿日期：2012-12-14，
  
  修回日期：2013-02-04，
  
  网络出版日期：2013-07-15，
  
  纸质出版日期：2013-07-15
- 稿件说明：
移动端阅览
刘正坤刘颖邱克强徐向东付绍军. 软X射线双频光栅设计及制作[J]. 光学精密工程, 2013,21(7): 1780-1785

Zheng-Kun Liu Ke-qiang QIU Shao-Jun FU. Design and Fabrication of Soft X-ray Double Frequency Grating[J]. Editorial Office of Optics and Precision Engineering, 2013,21(7): 1780-1785
刘正坤刘颖邱克强徐向东付绍军. 软X射线双频光栅设计及制作[J]. 光学精密工程, 2013,21(7): 1780-1785 DOI： 10.3788/OPE.20132107.1780.

Zheng-Kun Liu Ke-qiang QIU Shao-Jun FU. Design and Fabrication of Soft X-ray Double Frequency Grating[J]. Editorial Office of Optics and Precision Engineering, 2013,21(7): 1780-1785 DOI： 10.3788/OPE.20132107.1780.

摘要

以软X射线双频光栅作为剪切干涉元件，研究了剪切干涉法在激光等离子体诊断实验中的应用。为提高实验成功率，研究了双频光栅栅线的平行度及光栅效率。根据软X射线双频光栅栅线平行度与剪切干涉系统的干涉图像的关系，理论计算得出光栅平行度的指标要求。在全息曝光工艺中，通过衍射光斑位置检测法和莫尔条纹法确认光栅平行性，保证光栅平行度达到0.01。利用合肥国家同步辐射实验室计量站对双频光栅的两组-1级衍射效率进行测试。测试结果显示，光栅平行性满足系统要求，光栅的两组-1级衍射效率均达到10%。软X射线双频光栅剪切干涉实验结果表明，双频光栅平行度及衍射效率满足激光等离子体诊断实验需求。

Abstract

Applications of a soft X-ray double frequency grating shearing interferometer to laser plasma diagnostics were explored by using a soft X-ray double frequency grating as the shearing interferometric element. To improve the success rate of experiment

this paper analyzed the line parallelism and diffraction efficiency of the double frequency grating. On the basis of the relationship between the line parallelism of the double frequency grating and the interferogram of shearing interferometer

it calculated the technical requirements of line parallelism of the grating. The fabrication method was described

the line parallelism of the grating was realized with the diffraction spot position monitoring

and the moir fringe method was applied in line parallelism judgment for the grating. A double frequency grating with line parallelism less than 0.01 was fabricated. The two groups of diffraction efficiencies of -1 order for the grating were examined in spectral radiation standard and metrology beamline of Hefei National Synchrotron Radiation Laboratory

and the results show both of them are over 10% at 13.9 nm. A shearing interferometer was set up for dense plasma diagnostics

whose results demonstrate that the parallelism and diffraction efficiency of the double-frequency grating can meet the experimental requirements.

关键词

Keywords

references

measurement of coherece of laser Light [J]. Opt. Precision Eng., 1996, 4(5): 139-143. (in Chinese)[5]KEVIN L B. X-ray wavefront analysis and phase reconstruction with a two-dimensional shearing interferometer [J]. Optical Engineering, 2009, 48(8): 086501.[6]陈光华, 陈林, 刘寿先. 剪切干涉测量电缆枪等离子体电子密度 [J]. 光子学报, 2007, 36(12): 2192-2195.CHEN G H, CHEN L, LIU S X. Electron density measurement for C-Gun plasma using shearing interferometer [J]. Acta Photonica. Sin., 2007, 36(12): 2192-2195. (in Chinese) [7]LIU Y, TAN X, LIU ZH K, et al.. Soft X-ray holographic grating beam splitter including a double frequency grating for interferometer pre-alignment [J]. Optics Express, 2008, 16(19): 14761-14770.[8]谭鑫，刘颖，徐向东，等. 13.9 nm Laminar分束光栅的研制 [J]. 光学精密工程，2009,17(1): 33-37.TAN X, LIU Y, XU X D, et al.. 13.9 nm Laminar grating as beam splitter [J]. Opt. Precision Eng., 2009,17(1): 33-37. (in Chinese)[9]付绍军，洪义麟，陶晓明，等. 离子束刻蚀双频光栅的实验研究 [J]. 量子电子学报，1992, 9(2): 186-190.FU SH J, HONG Y L, TAO X M, et al.. Experimental research of double frequency grating with ion beam etching technique [J]. Chinese Journal of Quantum Electronics, 1992, 9(2): 186-190. (in Chinese)[10]孙晓泉，明海，谢建平，等. 双频光栅剪切干涉术检测钛宝石棒热焦距 [J]. 中国激光，1995, 22(2): 126-128.SUN X Q, MING H, XIE J P, et al.. Measurement of the thermal lensing of a Ti: sapphire rod with double frequency holographic grating [J]. Chinese Journal of Lasers, 1995, 22(2): 126-128. (in Chinese)[11]李立峰. 光栅的电磁场理论 [M]. 2003：13-14.LI L F. Electromagnetic theory of grating [M].2003: 13-14.(In Chinese)[12]赵劲松，李立峰，吴振华. 全息光栅制作中的实时潜像自监测技术[J]. 光学学报，2004, 24(6): 851-858.ZHAO J S, LI L F, WU ZH H. In-situ self-monitoring of latent image in fabrication of holographic gratings [J]. Acta Optica Sinica, 2004,24(6): 851-858. (in Chinese)[13]徐向东，刘正坤，邱克强，等. 用于1 m Seya-Namioka 单色仪的1 200 lp/mm Laminar 光栅[J]. 光学精密工程，2012, 20(1): 1-8.XU X D, LIU ZH K, QIU K Q, et al.. Fabrication of 1 200 lp/mm laminar gratings for 1m Seya-Namioka monochromator at NSRL [J]. Opt. Precision Eng., 2012, 20(1): 1-8. (in Chinese)

浏览量

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

大数值孔径物镜的波像差测量及其特殊问题

数字横向剪切干涉仪相移技术

13.9 nm Laminar分束光栅的研制

长春光机所软X射线-极紫外波段光学研究

软X射线掠入射金属光栅闪耀特性的校正傅里叶展开微分法分析