用计算全息图校正非球面的畸变

高松涛; 王高文; 张健; 隋永新; 杨怀江

doi:10.3788/OPE.20132108.1929

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用计算全息图校正非球面的畸变

现代应用光学 | 更新时间：2020-08-12

- 用计算全息图校正非球面的畸变
- Correction of distortion in asphere testing with computer-generated hologram
- 光学精密工程 2013年21卷第8期页码：1929-1935
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春,130033
  2. 中国科学院大学北京,100039
- 作者简介：
- 基金信息：
  
  国家重大专项(2016ZX04002007)
- DOI：10.3788/OPE.20132108.1929
  中图分类号： O436.1;O438.1
- 收稿日期：2013-01-04，
  
  修回日期：2013-03-18，
  
  网络出版日期：2013-08-20，
  
  纸质出版日期：2013-08-15
- 稿件说明：
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高松涛王高文张健隋永新杨怀江. 用计算全息图校正非球面的畸变[J]. 光学精密工程, 2013,21(8): 1929-1935

GAO Song-tao WANG Gao-wen ZHANG Jian SUI Yong-xin YANG Huai-jiang. Correction of distortion in asphere testing with computer-generated hologram[J]. Editorial Office of Optics and Precision Engineering, 2013,21(8): 1929-1935
高松涛王高文张健隋永新杨怀江. 用计算全息图校正非球面的畸变[J]. 光学精密工程, 2013,21(8): 1929-1935 DOI： 10.3788/OPE.20132108.1929.

GAO Song-tao WANG Gao-wen ZHANG Jian SUI Yong-xin YANG Huai-jiang. Correction of distortion in asphere testing with computer-generated hologram[J]. Editorial Office of Optics and Precision Engineering, 2013,21(8): 1929-1935 DOI： 10.3788/OPE.20132108.1929.

摘要

针对用计算全息图(CGH)对非球面进行检测时出现的非对称畸变，分析了3种基本的畸变模型，提出了一种有效的校正非对称畸变的方法。该方法采用较少的拟合参数即可实现对非对称畸变的精确校正，从而可以较大程度地减少畸变校正所需要的数据点对，避免过度拟合效应。通过光学仿真模拟分析了整个干涉仪系统的畸变，并利用以上方法对畸变进行了校正。仿真结果显示，畸变校正的相对残差小于0.2%。最后，设计并制作了处于离轴工作状态的CGH，并用此CGH对非球面进行了检测。利用上述畸变校正方法对测量的非球面面形进行校正，并用校正之后的结果进行加工迭代，最终非球面面形的收敛精度达到1.8 nm(RMS)，得到的结果验证了提出的畸变校正方法的可靠性。

Abstract

On the basis of the asymmetric distortion from asphere measurement by a Computer-generated Hologram(CGH)

three basic distortion models were analyzed

and an effective correction method for asymmetric distortion was proposed. By using a few fitted parameters

the method can correct the asymmetric distortion accurately

reduce data point pairs needed by distortion correction and can avoid over-fitting effect. Furthermore

the distortion of whole interferometric system was simulated

and its distortion was corrected by the proposed method. The simulating result shows that the relative residual of the correction is less than 0.2%. Finally

an off-axis CGH was designed and fabricated to verify the reliability of the correcting method and an asphere surface was tested with this CGH. Then

the correcting method mentioned above was used to correct the testing result

and the correcting result was taken to fabricate the asphere iteratively. The experiments show that the aspheric surface figure converges at 1.8 nm RMS (Root Mean Square) eventually. These results verify the reliability of the correction method.

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references

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