基于运动学支撑的透镜光学表面面形及其复现性

于新峰; 巩岩; 倪明阳; 秦硕

doi:10.3788/OPE.20132108.2000

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基于运动学支撑的透镜光学表面面形及其复现性

微纳技术与精密机械 | 更新时间：2020-08-12

- 基于运动学支撑的透镜光学表面面形及其复现性
- Optical surface figure of lens under kinematic mount apparatus and its reproducibility
- 光学精密工程 2013年21卷第8期页码：2000-2007
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春,130033
  2. 空军航空大学,吉林长春,130022
- 作者简介：
- 基金信息：
  
  国家重大专项02专项()
- DOI：10.3788/OPE.20132108.2000
  中图分类号： TH703;TN305.7
- 收稿日期：2012-08-23，
  
  修回日期：2012-10-19，
  
  网络出版日期：2013-08-20，
  
  纸质出版日期：2013-08-15
- 稿件说明：
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于新峰巩岩倪明阳秦硕. 基于运动学支撑的透镜光学表面面形及其复现性[J]. 光学精密工程, 2013,21(8): 2000-2007

YU Xin-feng GONG Yan NI Ming-yang QIN Shuo . Optical surface figure of lens under kinematic mount apparatus and its reproducibility[J]. Editorial Office of Optics and Precision Engineering, 2013,21(8): 2000-2007
于新峰巩岩倪明阳秦硕. 基于运动学支撑的透镜光学表面面形及其复现性[J]. 光学精密工程, 2013,21(8): 2000-2007 DOI： 10.3788/OPE.20132108.2000.

YU Xin-feng GONG Yan NI Ming-yang QIN Shuo . Optical surface figure of lens under kinematic mount apparatus and its reproducibility[J]. Editorial Office of Optics and Precision Engineering, 2013,21(8): 2000-2007 DOI： 10.3788/OPE.20132108.2000.

摘要

根据高精度投影物镜的特点，提出了一种运动学支撑结构，并采用实验结合有限元分析的方法研究了该支撑结构引起的透镜光学表面变形以及重复装配过程中透镜光学表面面形的复现性。首先，介绍了运动学支撑结构的原理及镜面变形分析的方法。然后，应用Zernike多项式拟合实测和有限元分析得到的面形，并用两种方法对运动学支撑结构夹持力引起的透镜光学表面面形进行对比，以验证有限元分析模型的正确性。同时，分析了考虑重力情况下运动学支撑结构导致的透镜光学表面变形。最后，用实验的方法测量了运动学支撑结构在重复装配过程中透镜光学表面面形的复现性。实验和分析结果显示，由运动学支撑结构夹持力引起的透镜光学表面面形均方根（RMS）值的实测值为1.004 nm，分析值为0.974 nm，夹持力及重力综合作用下导致的透镜表面Fringe Zernike拟合面形RMS值为2.538 nm，产生的主要像差为离焦、初级三叶像差和二级三叶像差，重复装配过程中引起的透镜光学表面面形的复现性标准差为0.645 nm。得到的结果表明，所设计的运动学支撑结构能够保证透镜光学表面面形在重复装配过程中有良好的复现性。

Abstract

On the basis of characteristics of high precision projection objectives

a kinematic mount apparatus was proposed. In order to evaluate the performance of the kinematic mount apparatus

the geometrical deformation and the optical surface figure reproducibility of the lens caused by the kinematic mount apparatus were investigated with Finite Element Method(FEM) and experiments. Firstly

the working principle of kinematic mount apparatus was introduced and the analysis method for surface deformation was also given. Then

surface deformations from the experiment and the finite element analysis were fitted with Zernike polynomials and obtained results by the two methods were compared for verifying the feasibility of the FEM. Furthermore

the optical surface deformation of the lens caused by the kinematic mount apparatus under the gravity was also explored. Finally

the reproducibility of optical surface figure of lens during a repeating assembly of the kinematic mount apparatus was also given with the experiment method. The experiment and FEM results indicate that RMS values caused by clamping force are 1.004 nm and 0.973 nm

respectively

and that induced both by clamping force and gravity are 2.538 nm. Moreover

the Power

Pre Trefoil and Sec Trefoil are the main aberrations of surface deformation

and the optical surface figure reproducibility of lens is 0.645 nm during the repeating assembly. These results mean that the kinematic mount apparatus can keep the optical surface figure in a good reproducibility.

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references

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