脉冲密度反馈对力平衡微机械陀螺的影响

杨亮; 苏岩; 裘安萍; 夏国明

doi:10.3788/OPE.20132108.2087

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脉冲密度反馈对力平衡微机械陀螺的影响

微纳技术与精密机械 | 更新时间：2020-08-12

- 脉冲密度反馈对力平衡微机械陀螺的影响
- Effect of pulse density feedback on force balance micro-machined gyroscope
- 光学精密工程 2013年21卷第8期页码：2087-2094
- 作者机构：
  
  南京理工大学机械工程学院,江苏南京,中国,210094
- 作者简介：
- 基金信息：
  
  国防预研基金()
- DOI：10.3788/OPE.20132108.2087
  中图分类号： TP212.12;U666.1
- 收稿日期：2013-03-21，
  
  修回日期：2013-05-07，
  
  网络出版日期：2013-08-20，
  
  纸质出版日期：2013-08-15
- 稿件说明：
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杨亮苏岩裘安萍夏国明. 脉冲密度反馈对力平衡微机械陀螺的影响[J]. 光学精密工程, 2013,21(8): 2087-2094

YANG Liang SU Yan QIU An-ping XIA Guo-ming. Effect of pulse density feedback on force balance micro-machined gyroscope[J]. Editorial Office of Optics and Precision Engineering, 2013,21(8): 2087-2094
杨亮苏岩裘安萍夏国明. 脉冲密度反馈对力平衡微机械陀螺的影响[J]. 光学精密工程, 2013,21(8): 2087-2094 DOI： 10.3788/OPE.20132108.2087.

YANG Liang SU Yan QIU An-ping XIA Guo-ming. Effect of pulse density feedback on force balance micro-machined gyroscope[J]. Editorial Office of Optics and Precision Engineering, 2013,21(8): 2087-2094 DOI： 10.3788/OPE.20132108.2087.

摘要

通过研究脉冲密度反馈力对微机械陀螺性能的影响

设计了基于机电结合调制器原理的微机械陀螺检测闭环电路。首先，根据微机械陀螺敏感模态的等效形式，分析得出脉冲密度反馈力对敏感模态的影响机理可以分为负刚度效应和增益效应两部分，且负刚度效应与输入角速度无关。然后，根据闭环检测理论建立了角速度和反馈脉冲密度之间的关系、量程与反馈脉冲高电平之间的关系。最后，利用量程设计指标和实际微机械陀螺参数，理论计算了所需的反馈脉冲高电平，并在Simulink中进行了仿真。仿真结果表明，所选参数满足了设计指标，且在正交误差等效输入角速度为0（）/s、30（） /s和50（）/s 3种情况下，仿真得到平均脉冲密度和角速度之间的非线性分别为3.610-6、3.07%和5.12%。对正交误差等效输入角速度分别为30.4（）/s和47.3（）/s的I号陀螺和II号陀螺进行实验，结果表明，脉冲密度反馈力对负刚度的影响不随脉冲密度的变化而变化；得到的平均脉冲密度和角速度之间的非线性分别为2.9%和4.8%，实验与仿真结果符合得到较好。

Abstract

The effect of Pulse Density Force Feedback (PDFF) on the performance of a micro-machined gyroscope was investigated and a closed-loop circuit for the micro-machined gyroscope was designed based on a mechanical and electrical modulator. Firstly

from the equivalent forms of a sense mode for the micro-machined gyroscope

the effect principle of PDFF on the performance of sense mode was analyzed and it was divided into two parts: negative stiffness and gain effects. The analysis shows that the negative stiffness is independent on the input of angular rate. Then

the relationship between pulse density and input angular rate

and that between input range and high level feedback pulse were built based on the theory of closed-loop detection. Finally

the circuit parameters were calculated by using the range design index and the actual parameters of gyroscope

then these parameters were simulated in Simulink. Simulation result shows that the parameters satisfy the design objective

and the nonlinearities between average pulse density and angular rate are 3.610-6

3.07% and 5.12%

respectively

when the quadrature error equivalent input angular rates are 0（)/s

30（)/s and 50（)/s. Two gyro sample I and II with the quadrature error equivalent input angular rates of 30.4（) /s and 47.3（)/s were tested

and the experiment results show that the effect of PDFF on the negative stiffness doesnt change with the pulse density; and the nonlinearities between the average pulse density and angular velocity are 2.9% and 4.8%

respectively. The experimental and simulation results get a better match.

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references

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