电极表面粗糙度对检测电容的影响

张海峰; 刘晓为; 李海; 陈楠

doi:10.3788/OPE.20132109.2266

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电极表面粗糙度对检测电容的影响

微纳技术与精密机械 | 更新时间：2020-08-12

- 电极表面粗糙度对检测电容的影响
- Effect of the surface roughness on detecting capacitance
- 光学精密工程 2013年21卷第9期页码：2266-2271
- 作者机构：
  
  1. 哈尔滨工业大学微系统与微结构制造教育部重点实验室,黑龙江哈尔滨,150001
  2. 哈尔滨工业大学MEMS中心，黑龙江哈尔滨 150001
- 作者简介：
- 基金信息：
  
  国家重大科学研究计划();大尺寸有障碍空间角度与基面位置测量的关键技术()
- DOI：10.3788/OPE.20132109.2266
  中图分类号： TM934.2
- 收稿日期：2013-02-21，
  
  修回日期：2013-03-29，
  
  网络出版日期：2013-09-30，
  
  纸质出版日期：2013-09-15
- 稿件说明：
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张海峰刘晓为李海陈楠. 电极表面粗糙度对检测电容的影响[J]. 光学精密工程, 2013,21(9): 2266-2271

ZHANG Hai-feng LIU Xiao-wei LI Hai CHEN Nan. Effect of the surface roughness on detecting capacitance[J]. Editorial Office of Optics and Precision Engineering, 2013,21(9): 2266-2271
张海峰刘晓为李海陈楠. 电极表面粗糙度对检测电容的影响[J]. 光学精密工程, 2013,21(9): 2266-2271 DOI： 10.3788/OPE.20132109.2266.

ZHANG Hai-feng LIU Xiao-wei LI Hai CHEN Nan. Effect of the surface roughness on detecting capacitance[J]. Editorial Office of Optics and Precision Engineering, 2013,21(9): 2266-2271 DOI： 10.3788/OPE.20132109.2266.

摘要

平行板电容是大多数MEMS传感器件的核心检测结构。考虑随着检测电极间距的减小，电极表面粗糙度会对其空间电场分布产生影响，本文研究了电极表面粗糙度对检测电容性能的影响。建立了单粗糙电极的平行板电容器模型，并采用有限元法分析了表面粗糙度和边缘效应对静电场分布的影响；针对粗糙表面增大了电极存储电荷的能力，对粗糙表面的平行板电容器计算公式进行了修正。采用原子力显微镜对不同粗糙度的样本进行了表征，实验和仿真结果表明：减小两电极之间的距离，增大检测电极的表面粗糙度，可以显著增大检测电容。当检测电极的粗糙度从0.063 nm增加到60 nm时，平行板电容器电容值增大了9.0%。结论显示，增大MEMS电容器两电极的表面粗糙度，可以有效地增大MEMS器件的检测灵敏度。

Abstract

Parallel plate capacitor is a core mechanism in a Micro-mechanical-electrical (MEMS) sensing device. As the surface roughness of an electrode has obviously impact on the space electric field when the distance between the electrodes is shortened in the capacitance detection

this paper explores the effect of the surface roughness of electrode on the performance of the parallel plate capacitor. A parallel plate capacitor model with a single roughness electrode was established

and then the finite element method was used to study the effect of the surface roughness on the detecting capacitance. Based on increasing rough surface to enhance the memory electric charge capability

the formula for parallel plate capacitor with rough surface was corrcted. Finally

the Atomic Force Microscopy(AFM) was used to describe the samples with different surface roughnesses. Experiments and simulation results indicate that the surface roughness has a obviously effect on the detecting capacitance. Increasing the surface roughness of an electrode and decreasing the distance between the electrodes can improve the detecting capacitance greatly. When the surface roughness of an electrode increases from 0.063 nm to 60 nm

the detecting capacitance value grows by 9.0 percent. The result shows that increasing the surface roughnesses of electrodes can improve the sensitivity of MEMS devices.

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Keywords

references

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